초록 ▼

A simple method of manufacturing a silica membrane which has high separation performance and high permeation flux is provided. The method is a method for manufacturing a silica membrane by depositing a silica sol on a porous substrate, drying the silica sol by air blowing which has a dew point of -7

A simple method of manufacturing a silica membrane which has high separation performance and high permeation flux is provided. The method is a method for manufacturing a silica membrane by depositing a silica sol on a porous substrate, drying the silica sol by air blowing which has a dew point of -70 to 0° C., and then firing the same thereafter to produce the silica membrane. Further, the silica sol is preferably dried by air blowing at an air velocity of 5 to 20 m/sec.

대표청구항 ▼

1. A method of manufacturing a silica membrane, comprising: depositing a silica sol on a porous substrate;drying the silica sol by blowing air, the air having a dew point of −70 to 0° C.; andfiring the dried silica sol and porous substrate thereafter so as to form a silica membrane,wherein the air i

1. A method of manufacturing a silica membrane, comprising: depositing a silica sol on a porous substrate;drying the silica sol by blowing air, the air having a dew point of −70 to 0° C.; andfiring the dried silica sol and porous substrate thereafter so as to form a silica membrane,wherein the air is at room temperature. 2. The method of manufacturing a silica membrane according to claim 1, wherein the silica sol is dried by the air blowing at an air velocity of 5 to 20 m/sec. 3. The method of manufacturing a silica membrane according to claim 1, wherein an outer peripheral surface of the porous substrate is masked to prevent a solvent in the silica sol from vaporizing, through the outer peripheral surface. 4. The method of manufacturing a silica membrane according to claim 1, wherein the drying by blowing air is started within 30 seconds of the silica sol being deposited. 5. The method of manufacturing a silica membrane according to claim 1, wherein a concentration of silica is 0.3 to 2 mass % in the silica sol.