Method of dynamic balancing for magnetic levitation molecular pump
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01R-031/28
H02K-015/16
F04D-029/058
F04D-029/66
F04D-019/04
G01M-001/20
H02K-007/09
F16C-032/04
출원번호
US-0362806
(2012-11-22)
등록번호
US-9479035
(2016-10-25)
우선권정보
CN-2011 1 0399466 (2011-12-05)
국제출원번호
PCT/CN2012/085077
(2012-11-22)
국제공개번호
WO2013/083000
(2013-06-13)
발명자
/ 주소
Zhang, Kai
Wu, Han
Li, Qizhi
Zhang, Xiaozhang
Zou, Meng
출원인 / 주소
KYKY TECHNOLOGY CO., LTD.
대리인 / 주소
Birch, Stewart, Kolasch & Birch, LLP
인용정보
피인용 횟수 :
0인용 특허 :
4
초록▼
A method of rotor dynamic balancing for magnetic levitation molecular pump, including the steps of: activating an force free control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during
A method of rotor dynamic balancing for magnetic levitation molecular pump, including the steps of: activating an force free control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the force free control module, indicating that the force free control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of said rotor to exceed its rigid critical rotational speed; performing rotor dynamic balancing operation at a high speed by an influence coefficient method. The method of rotor dynamic balancing can directly perform rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.
대표청구항▼
1. A method of rotor dynamic balancing for magnetic levitation molecular pump, wherein comprising steps of: step 1: activating a force free control module of a controller of said magnetic levitation molecular pump after activating a motor of said magnetic levitation molecular pump for acceleration;c
1. A method of rotor dynamic balancing for magnetic levitation molecular pump, wherein comprising steps of: step 1: activating a force free control module of a controller of said magnetic levitation molecular pump after activating a motor of said magnetic levitation molecular pump for acceleration;controlling a displacement detector through said controller of said magnetic levitation molecular pump so as to collect radial displacement signals of a rotor of said magnetic levitation molecular pump and to detect radial vibration amplitude of said rotor; andsequentially executing step 2, if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of said rotor under the force free control module control, indicating that the force free control module is able to inhibit co-frequency vibration of said rotor, so as to allow a rotational speed of said rotor to exceed a rigid critical rotational speed of the motor; orapplying a typical rotor dynamic balancing method to achieve a low-speed balancing, so as to ensure the radial vibration amplitude of said rotor not to exceed ½ of said protective clearance before the rotational speed of said rotor exceeds the rigid critical rotational speed thereof, if the maximum radial vibration amplitude of said rotor exceeds ½ of said protective clearance, and then sequentially executing step 2, after the rotational speed of said rotor exceeds the rigid critical rotational speed thereof;step 2: detecting the radial vibration amplitude of said rotor through said displacement detector during the further acceleration of said motor; and stopping accelerating said motor, so as to stabilize said rotor at rotational speed ωi wherein, i represents whole numbers 0, 1, 2, 3, . . . , when the radial vibration amplitude of said rotor exceeds a preset vibration threshold of said rotor with respect to nonrated rotational speed detecting a current rotational speed ωi through a rotational speed detector controlled by said controller of said magnetic levitation molecular pump; anddetermining if the rotational speed ωi is below a rated rotational speed of said rotor ωE; if ωi is below ωE, then sequentially executing step 3, otherwise jumping to step 5;step 3: performing rotor dynamic balancing operation with respect to said rotor at the nonrated rotational speed, by means of influence coefficient method, under the force free control module, with the operation of rotor dynamic balancing for said rotor at ωi comprising steps of:3a) calling a rotor dynamic balancing module through said controller of said magnetic levitation molecular pump according to a current radial vibration amplitude and the rotational speed of said rotor, after said rotor with two balance planes preset thereon is accelerated to ωi, and recording a current initial imbalance vector V0 measured by a first radial displacement sensor and a second radial displacement sensor; wherein, the two balance planes are preset respectively away from the barycenter of the rotor, but located close to both ends of the rotor;3b) turning off said motor of said magnetic levitation molecular pump, so as to decelerate said rotor to zero, and adding a trial mass m1 on a first balance plane; then restarting said magnetic levitation molecular pump so as to accelerate to the rotational speed ωi, and recording the current imbalance vector V1 measured by said first radial displacement sensor and said second radial displacement sensor;3c) decelerating said rotor again to zero, and removing said trial mass m1 while adding a trial mass m2 on a second balance plane; and then restarting said magnetic levitation molecular pump so as to accelerate the magnetic levitation molecular pump to rotational speed ωi according to the aforesaid steps, and recording a current imbalance vector V2 measured by said first radial displacement sensor and said second radial displacement sensor;3d) with M1 and M2 being initial imbalance masses of two imbalance planes respectively, calculating influence coefficient matrix T by means of influence coefficient method, which is: V0=T[M1M2]T V1=T[M1+m1M2]T V2=T[M1M2+m2]T obtaining the influence coefficient matrix T according to the aforesaid matrix equations, and obtaining the initial imbalance mass matrix [M1 M2]T=T−1V0 through substitution in the first matrix equation; 3e) decelerating said rotor to zero, performing the rotor dynamic balancing operation through adding or removing weight to or from said two imbalance planes respectively based on the initial imbalance masses measured by means of step 3d);3f) restarting said magnetic levitation molecular pump, while accelerating said rotor to ωi, and detecting a vibration amplitude of said rotor to determine if the vibration amplitude is below the preset vibration threshold with respect to the nonrated rotational speed; if the detected radial vibration amplitude is below said preset vibration threshold regarding the nonrated rotational speed, completing the rotor dynamic balancing operation at the current rotational speed and jumping to the next step; otherwise, repeating with step 3a) to 3f) till said rotor rotating at speed ωi, and the detected radial vibration amplitude of said rotor is below the preset vibration threshold with respect to the nonrated rotational speed when the rotor rotates at speed ωi, and sequentially executing step 4;step 4: letting i=i+1, and repeating step 2;step 5: under the force free control module control, performing rotor dynamic balancing operation with respect to said rotor at a rated rotational speed; the radial vibration amplitude of said rotor is below the preset vibration threshold regarding the nonrated rotational speed during the acceleration of said rotor from zero to ωE; and when the rotational speed of said rotor reaches ωE, the radial vibration amplitude of said rotor is below the preset vibration threshold with respect to the rated rotational speed as well as the residual imbalance mass of said rotor is less than the preset imbalance mass, completing the rotor dynamic balancing operation. 2. The method of rotor dynamic balancing of claim 1, wherein said step 5 further comprises steps of: A. if ωi>ωE, activating said motor for decelerating said rotor speed to ωE, otherwise keeping said rotor rotating at ωE;B. calling said rotor dynamic balancing module by said controller of said magnetic levitation molecular pump based on the current radial vibration amplitude and the rotational speed of said rotor, and performing rotor dynamic balancing operation with respect to said rotor by means of influence coefficient method; performing rotor dynamic balancing operation with respect to said rotor rotating at ωE according to step 3a) to 3e), so as to obtain a required balance mass and a loaded phase of balance mass of said rotor; turning off said motor for decelerating said rotor to zero and sequentially executing step C;C. performing rotor dynamic balancing operation with respect to said rotor according to the calculated required balance mass and the loaded phase of balance mass and sequentially executing step D;D. activating said motor, and activating the force free control module, and detecting radial vibration amplitude of said rotor by said displacement detector; and sequentially executing step E, if under the force free control module control, the maximum radial vibration amplitude of said rotor caused by imbalance masses of said rotor does not exceed ½ of said protective clearance during the acceleration of said rotor, indicating that the force free control module is able to inhibit synchronous vibrations of said rotor and the rotor can be accelerated beyond a rigid critical rotational speed of the motor;E: detecting radial vibration amplitude of said rotor during the acceleration of said rotor to ωE during the further acceleration of said motor, and sequentially executing step F, if the radial vibration amplitude of said rotor is lower than the preset vibration threshold regarding the nonrated rotational speed; or turning off said motor from accelerating, and repeating said step B, if the detected radial vibration amplitude of said rotor is over or equivalent to the preset vibration threshold regarding the nonrated rotational speed;F: activating said motor for further accelerating said rotor to ωE; turning off said motor from acceleration, and keeping said rotor rotating at ωE, and then sequentially executing step G;G. detecting the current radial vibration amplitude of said rotor,a. if the radial vibration amplitude of said rotor is lower than the preset vibration threshold regarding the rated rotational speed, calling said rotor dynamic balancing module via said controller of said magnetic levitation molecular pump according to the current radial vibration amplitude and the phase of said rotor; performing rotor dynamic balancing operation with respect to said rotor by means of influence coefficient method so as to obtain the required balance mass and the loaded phase of the balance mass of said rotor, and turning off said motor for decelerating said rotor to zero:i. if a residual imbalance mass of said rotor is smaller than the preset imbalance mass, completing the rotor dynamic balancing operation;ii. otherwise sequentially executing step C;b. if the radial vibration amplitude of said rotor is above or equivalent to the preset vibration threshold with respect to the rated rotational speed, then repeating step B. 3. The method of rotor dynamic balancing of claim 1, wherein said two balance planes are disposed on an upper portion and a lower portion of said rotor respectively, which are respectively far away from the barycenter of said rotor and close to two ends of said rotor. 4. The method of rotor dynamic balancing of claim 1, wherein a range of said vibration threshold with respect to the nonrated rotational speed is [20 μm, 40 μm]; a range of said vibration threshold with respect to the rated rotational speed is [0.05 μm, 0.1 μm]; and a range of said preset imbalance mass is [5 mg, 12 mg]. 5. The method of rotor dynamic balancing of claim 4, wherein, further comprising the step of collecting the radial vibration amplitude of said rotor via said displacement detector through said first radial displacement sensor and said second radial displacement sensor, and collecting the rotational speed of said rotor via said rotational speed detector through a rotational speed detecting sensor. 6. The method of rotor dynamic balancing of claim 1, wherein said vibration threshold with respect to the nonrated rotational speed is 40 μm; said vibration threshold with respect to the rated rotational speed is 0.1 μm; and said preset imbalance mass is 10 mg. 7. The method of rotor dynamic balancing of claim 6, wherein, further comprising the step of collecting the radial vibration amplitude of said rotor via said displacement detector through said first radial displacement sensor and said second radial displacement sensor, and collecting the rotational speed of said rotor via said rotational speed detector through a rotational speed detecting sensor. 8. The method of rotor dynamic balancing of claim 1, wherein, before said step 1, further comprising steps of dynamical simulation calculating for said magnetic levitation molecular pump and obtaining the rigid critical rotational speed of said rotor and the rated rotational speed ωE. 9. The method of rotor dynamic balancing of claim 8, wherein, further comprising the step of collecting the radial vibration amplitude of said rotor via said displacement detector through said first radial displacement sensor and said second radial displacement sensor, and collecting the rotational speed of said rotor via said rotational speed detector through a rotational speed detecting sensor.
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이 특허에 인용된 특허 (4)
Ehrich Fredric F. (Marblehead MA), Balancing method and product.
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