[특허]Low cost high throughput processing platform

Low cost high throughput processing platform 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	F16H-007/00 B65G-015/12 H01L-021/677 H01L-021/687
출원번호	US-0173400 (2014-02-05)
등록번호	US-9493306 (2016-11-15)
발명자 / 주소	Niewmierzycki, Leszek
출원인 / 주소	Mattson Technology, Inc.
대리인 / 주소	Pritzkau Patent Group, LLC
인용정보	피인용 횟수 : 0 인용 특허 : 65

초록 ▼

As part of a system for processing workpieces, a workpiece support arrangement, separate from a process chamber arrangement supports at least two workpieces at least generally in a stacked relationship to form a workpiece column. A transfer arrangement transports at least two of the workpieces between the workpiece column and the process chamber arrangement by simultaneously moving the two workpieces at least generally along first and second transfer paths, respectively, that are defined between the workpiece column and the first and second process stations. The transfer arrangement can simultaneously move untreated and treated workpieces. Vertical motion swing arms and coaxial swing arms are described. A pair of spaced apart swing arms, the workpiece column and the processing stations can cooperatively define a pentagonal shape. Timing belt backlash elimination, a dual degree of freedom slot valve and low point chamber pumping, for removing chamber contaminants, are also described.

대표청구항 ▼

1. In a system for using a first, driven shaft to rotationally drive a second shaft, a configuration comprising: first and second toothed flexible closed-loop members; anda first pulley arrangement mounted on said first shaft and a second pulley arrangement mounted on said second shaft for receiving the first and second toothed flexible members in a side-by-side relationship such that at least a particular one of the pulley arrangements includes a first pulley engaging the first toothed flexible member and a second pulley engaging the second toothed flexible member, each of the first and second pulleys having a tooth receiving configuration which cooperates with said first and second toothed flexible members to provide a given backlash clearance when engaged with the first and second toothed belt members, respectively, and said first pulley and said second pulley are mounted with a rotational offset therebetween such that the tooth receiving configuration of the first pulley is rotationally offset with respect to the tooth receiving configuration of the second pulley, based on said given backlash clearance, in a way which limits an operational backlash of the particular pulley arrangement with respect to movement of the first and the second toothed flexible members to a value that is less than the given backlash clearance. 2. The configuration of claim 1 wherein said system is configured for processing workpieces and wherein said first shaft is driven by a motor and said second shaft is used to drive at least one swing arm for use in moving workpieces within said system. 3. The configuration of claim 1 wherein said first and second toothed flexible members are flexible belts. 4. In a system for using a first, driven shaft to rotationally drive a second shaft, a method comprising: providing first and second toothed flexible closed-loop members; andmounting a first pulley arrangement on said first shaft and a second pulley arrangement on said second shaft for receiving the first and second toothed flexible members in a side-by-side relationship such that at least a particular one of the pulley arrangements includes a first pulley engaging the first toothed flexible member and a second pulley engaging the second toothed flexible member, each of the first and second pulleys having a tooth receiving configuration which cooperates with said first and second toothed flexible members to provide a given backlash clearance when engaged with the first and second toothed belt members, respectively, and said first pulley and said second pulley are mounted with a rotational offset therebetween such that the tooth receiving configuration of the first pulley is rotationally offset with respect to the tooth receiving configuration of the second pulley, based on said given backlash clearance, in a way which limits an operational backlash of the particular pulley arrangement with respect to movement of the first and the second toothed flexible members to a value that is less than the given backlash clearance. 5. The method of claim 4 wherein said system is configured for processing workpieces and wherein said first shaft is driven by a motor and said method includes using said second shaft to drive a swing arm for use in moving workpieces within said system. 6. The method of claim 5 wherein said first and second toothed flexible members are flexible belts.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
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연합인증

Low cost high throughput processing platform 원문보기

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Low cost high throughput processing platform 원문보기

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