Method of damping actuator with translation mechanism and actuator
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-041/09
H01L-041/083
H01L-041/053
H02N-002/04
출원번호
US-0162562
(2014-01-23)
등록번호
US-9496478
(2016-11-15)
우선권정보
JP-2013-011990 (2013-01-25)
발명자
/ 주소
Mori, Shigeki
출원인 / 주소
Akita Prefecture
대리인 / 주소
Christensen O'Connor Johnson Kindness PLLC
인용정보
피인용 횟수 :
0인용 특허 :
12
초록▼
According to one embodiment, a method of damping an actuator to reduce an amplitude of a resonance peak of the actuator, including a piezoelectric element and a translation mechanism, includes securing one surface of a restraint member having at least two surfaces to a movable part of the translatio
According to one embodiment, a method of damping an actuator to reduce an amplitude of a resonance peak of the actuator, including a piezoelectric element and a translation mechanism, includes securing one surface of a restraint member having at least two surfaces to a movable part of the translation mechanism with an elastic or viscoelastic body therebetween, securing the other surface of the restraint member to a support portion of the translation mechanism with an elastic or viscoelastic body therebetween, and converting vibration energy of the movable part into thermal energy, based on distortion caused by deformation of the elastic or viscoelastic body.
대표청구항▼
1. A method of damping an actuator to reduce an amplitude of a resonance peak of the actuator, which comprises a piezoelectric element and a translation mechanism comprising a movable part, which is displaced as the piezoelectric element is displaced, and configured to directly transmit the displace
1. A method of damping an actuator to reduce an amplitude of a resonance peak of the actuator, which comprises a piezoelectric element and a translation mechanism comprising a movable part, which is displaced as the piezoelectric element is displaced, and configured to directly transmit the displacement of the piezoelectric element as a rectilinear motion, the method comprising: securing one surface of a restraint member having at least two surfaces to the movable part with an elastic or viscoelastic body therebetween;securing the other surface of the restraint member to a support portion of the translation mechanism with an elastic or viscoelastic body therebetween; andconverting vibration energy of the movable part into thermal energy, based on distortion caused by deformation of the elastic or viscoelastic body, to reduce the amplitude of the resonance peak of the actuator. 2. The method of claim 1, wherein the translation mechanism comprises a support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to a direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element; and which further comprises securing one of surfaces of the restraint member to the mover with the elastic or viscoelastic body therebetween, and securing the other of the surfaces to the support portion with an elastic or viscoelastic body therebetween. 3. The method of claim 1, wherein the translation mechanism comprises a support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to a direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element; and which further comprises securing the one surface of the restraint member to respective side surfaces of the mover and the elastic spring bearing portions with the elastic or viscoelastic body therebetween, and securing the other surface to the support portion with the elastic or viscoelastic body therebetween. 4. The method of claim 1, wherein the translation mechanism comprises the support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to the direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element; and which further comprises securing the one surface of the restraint member to respective front surfaces of the mover and the pair of elastic spring bearing portions with the elastic or viscoelastic body therebetween, and securing the other surface to the support portion with the elastic or viscoelastic body therebetween. 5. The method of claim 1, wherein the translation mechanism comprises a support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to a direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element, the restraint member being prismatic; and which further comprises securing the one surface of the restraint member to the mover with the elastic or viscoelastic body therebetween, and securing the other surface or two surfaces of the restraint member to the elastic spring bearing portions with the elastic or viscoelastic body therebetween. 6. The method of claim 1, wherein the translation mechanism comprises a support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to the direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element; and which further comprises securing the one surface of the restraint member to respective upper surfaces of the mover and the pair of elastic spring bearing portions with the elastic or viscoelastic body therebetween, and securing the other surface or two surfaces of the restraint member to the support portion and the elastic spring bearing portions with the elastic or viscoelastic body therebetween. 7. The method of claim 1, wherein the restraint member is formed of a metal or ceramic more stiff than the elastic or viscoelastic body and serves to increase the mechanical stiffness of the actuator and suppress motions other than a translational motion. 8. An actuator comprising: a piezoelectric element;a translation mechanism comprising a movable part configured to displace as the piezoelectric element is displaced, and configured to directly transmit the displacement of the piezoelectric element as a rectilinear motion; anda restraint member comprising at least two surfaces, one and the other of which are secured to the movable part and a support portion of the translation mechanism with an elastic or viscoelastic body therebetween, and configured to convert vibration energy of the movable part into thermal energy, based on distortion caused by deformation of the elastic or viscoelastic body to reduce an amplitude of a resonance peak of the actuator. 9. The actuator of claim 8, wherein the translation mechanism comprises the support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to a direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element, the one surface of the restraint member is secured to the mover with the elastic or viscoelastic body therebetween, and the other surface of the restraint member is secured to the support portion with the elastic or viscoelastic body therebetween. 10. The actuator of claim 8, wherein the translation mechanism comprises the support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to the direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to a direction of displacement of the piezoelectric element, the one surface of the restraint member is secured spanning respective side surfaces of the mover and the elastic spring bearing portions with the elastic or viscoelastic body therebetween, and the other surface of the restraint member is secured to the support portion with the elastic or viscoelastic body therebetween. 11. The actuator of claim 8, wherein the translation mechanism comprises the support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to the direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to a direction of displacement of the piezoelectric element, the one surface of the restraint member is secured spanning respective front surfaces of the mover and the elastic spring bearing portions with the elastic or viscoelastic body therebetween, and the other surface of the restraint member is secured to the support portion with the elastic or viscoelastic body therebetween. 12. The actuator of claim 8, wherein the translation mechanism comprises the support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to the direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to the direction of displacement of the piezoelectric element, the restraint member being prismatic, the one surface of the restraint member is secured to the mover with the elastic or viscoelastic body therebetween, and the other surface or the two surfaces of the restraint member are secured to the elastic spring bearing portions with the elastic or viscoelastic body therebetween. 13. The actuator of claim 8, wherein the translation mechanism comprises the support portion to which the piezoelectric element is secured and a pair of elastic spring bearing portions extending from the support portion in a direction parallel to the direction of displacement of the piezoelectric element and opposed to each other with a gap therebetween, and the movable part comprises a mover opposed to the support portion with a gap therebetween and secured to the piezoelectric element and spring portions of the elastic spring bearing portions supporting the movable part for linear motion parallel to a direction of displacement of the piezoelectric element, the one surface of the restraint member is secured spanning the respective upper surfaces of the mover and the pair of elastic spring bearing portions with the elastic or viscoelastic body therebetween, and the other surface or the two surfaces of the restraint member are secured to the support portion and the elastic spring bearing portions with the elastic or viscoelastic body therebetween. 14. The actuator of claim 8, wherein the restraint member is formed of a material and with a shape more stiff than the elastic or viscoelastic body.
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