Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01B-011/06
G01B-011/245
출원번호
US-0307481
(2014-06-17)
등록번호
US-9500471
(2016-11-22)
우선권정보
DE-10 2013 010 030 (2013-06-17)
발명자
/ 주소
Michelt, Berthold
Kunkel, Matthias
출원인 / 주소
Precitec Optronik GmbH
대리인 / 주소
Taylor English Duma LLP
인용정보
피인용 횟수 :
4인용 특허 :
30
초록▼
The invention relates to an optical measuring device for acquiring in situ a difference in distance between a support and an edge region of an object to be measured. The optical measuring device has a measuring head with dual beam guide which directs a first measuring beam towards the support and a
The invention relates to an optical measuring device for acquiring in situ a difference in distance between a support and an edge region of an object to be measured. The optical measuring device has a measuring head with dual beam guide which directs a first measuring beam towards the support and a second measuring beam towards the edge region of the object to be measured. Means are provided for acquiring and forming reflection spectra of the first measuring beam which is directed towards the support and the second measuring beam which is directed towards the edge region of the object to be measured. The measuring device has a multi-channel measuring apparatus with one spectrometer line. An evaluation unit for the reflection spectra for acquiring the stage height between the support and the edge region of the object works together with a spectrometer and a display unit.
대표청구항▼
1. An optical measuring device for acquiring differences in distance, in particular for acquiring in situ a stage height between a support and an edge region of an object, the device comprising: an optical measuring head with a dual beam guide, the optical measuring head configured as a dual measuri
1. An optical measuring device for acquiring differences in distance, in particular for acquiring in situ a stage height between a support and an edge region of an object, the device comprising: an optical measuring head with a dual beam guide, the optical measuring head configured as a dual measuring head having a first measuring head and a second measuring head;a measuring head guide device in which the first measuring head and the second measuring head are positioned side by side and connected mechanically, the first measuring head configured to acquire and form a reflection spectrum of a first measuring beam directed towards a first measuring point located on the support and the second measuring head configured to acquire and form a reflection spectrum of a second measuring beam directed towards a second measuring point located on the edge region of the object;at least two spectral broadband light sources for producing light of the first measuring beam and the second measuring beam;a first optical fibre for coupling reflected light from the first measuring beam and a second optical fibre for coupling reflected light from the second measuring beam into different measurement inputs of a multi-channel measuring apparatus with at least two measurement inputs;a first light guide, a second light guide, a third light guide, and a fourth light guide; anda common spectrometer line positioned in the multi-channel measuring apparatus on which both the reflected light from the first measuring beam and the reflected light from the second measuring beam are directed and with which the reflection spectrum of the first measuring beam and the reflection spectrum of the second measuring beam are measured, the multi-channel measuring apparatus comprising at least one Y-coupler for each of the at least two measurement inputs of the multi-channel measuring apparatus, the first light guide coupled to a first spectral broadband light source of the at least two spectral broadband light sources and the second light guide coupled to a second spectral broadband light source of the at least two spectral broadband light sources, the first light guide and the third light guide connected to an input of a first Y-coupler of the at least one Y-coupler, each of the second light guide and the fourth light guide connected to an input of a second Y-coupler of the at least one Y-coupler, each of the third light guide and the fourth light guide routed to and secured by a holder on an input side of a spectrometer of the multi-channel measuring apparatus, the third light guide and the fourth light guide being offset in relation to one another in a spectral direction via the holder along a lengthwise direction of the spectrometer line on the input side of the spectrometer, characteristic curves of the reflection spectra differing from one another and the reflection spectra of the measuring heads differing from one another, distance peaks that are formed from the reflection spectra of the first measuring beam and the second measuring beam being evaluated as a measure of a difference in distance. 2. The optical measuring device according to claim 1, wherein the optical measuring device has a multiplicity of optical measuring heads with dual beam guides, each optical measuring head being configured as a dual measuring head with a first measuring head and a second measuring head. 3. The optical measuring device according to claim 2, wherein each of the first measuring heads and each of the second measuring heads is connected by an optical fibre to a different measurement input of the multi-channel measuring apparatus so that the reflection spectrum of each of the first measuring heads and each of the second measuring heads are evaluated by the spectrometer line positioned in the multi-channel measuring apparatus. 4. The optical measuring device according to claim 2, wherein the multi-channel measuring apparatus has at least one multiplexer which switches between pairs of one first measuring head and one second measuring head. 5. The optical measuring device according to claim 4, wherein the multi-channel measuring apparatus has a multi-line detector. 6. The optical measuring device according to claim 1, further comprising an electronic filter. 7. An optical measuring method for acquiring at least one difference in distance, in particular for acquiring in situ a stage height between a support and an edge region of an object, whereby the method comprises the following steps: providing a measuring device with an optical measuring head with a dual beam guide, which is configured as a dual measuring head with a first measuring head and a second measuring head, in a measuring head guide device in which the first measuring head and the second measuring head are positioned side by side and connected mechanically, the measuring device further comprising a first light guide, a second light guide, a third light guide, a fourth light guide, at least two spectral broadband light sources, and a multi-channel measuring apparatus comprising a plurality of measurement inputs and at least one Y-coupler for each of at least two measurement inputs of the multi-channel measuring apparatus;coupling light from a first spectral broadband light source of the at least two spectral broadband light sources to an input of a first Y-coupler of the at least one Y-coupler via the first light guide and from a second spectral broadband light source of the at least two spectral broadband light sources to an input of a second Y-coupler of the at least one Y-coupler via the second light guide;producing a first measuring beam by the first measuring head and a second measuring beam by the second measuring head by means of the at least two spectral broadband light sources, wherein the first measuring head directs a first measuring beam towards a first measuring point and the second measuring head directs a second measuring beam towards a second measuring point, reflection spectra being formed in each case;coupling reflected light from the first measuring beam via the third light guide and reflected light from the second measuring beam via the fourth light guide into different measurement inputs of the multi-channel measuring apparatus, wherein the third light guide is coupled to the input of the first Y-coupler and the fourth light guide is coupled to the input of the second Y-coupler;offsetting the fourth light guide from the third light guide in a spectral direction along a lengthwise direction of a spectrometer line with a holder on an input side of a spectrometer of the multi-channel measuring apparatus, each of the third light guide and the fourth light guide secured to the holder, the spectrometer line positioned in the multi-channel measuring apparatus, the spectrometer line being a common spectrometer line on which both the reflected light from the first measuring beam and the reflected light from the second measuring beam are directed, characteristic curves of the reflection spectra differing from one another and the reflection spectra of the measuring heads differing from one another; andmeasuring the reflection spectra by means of the spectrometer line and an evaluation unit connected downstream of the spectrometer line, distance peaks being formed according to distances between the first measuring point and the first measuring head and between the second measuring point and the second measuring head, the distance peaks being evaluated as a measure of a difference in distance. 8. The method according to claim 7, wherein during the measuring step the measuring head is held in a fixed position in the measuring head guide device and the support and the object move rotationally in opposite directions of rotation under the measuring head. 9. The method according to claim 7, wherein during the measuring step a first measuring point is configured on the support and a second measuring point is configured on the edge region of the object, and their respective distances from the measuring head are acquired. 10. The method according to claim 7, wherein a decreasing object thickness is documented in situ by calculating the difference between the acquired distance values. 11. The method according to claim 7, wherein a chromatic confocal measuring method is used to acquire the difference in distance. 12. The method according to claim 7, wherein an interferometric measuring method is used to acquire the difference in distance. 13. The method according to claim 7, wherein the reflection spectra of the first measuring beam which is directed towards the support and the second measuring beam which is directed towards the edge region of the object are digitized for evaluation. 14. The method according to claim 7, wherein the surface of the edge region of the object and the surface of the support are scanned at a scanning rate of more than 4 kHz. 15. The method according to claim 7, wherein measuring errors are filtered out by an electronic digital filter in the evaluation unit.
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