Optical filter configured to transmit light of a predetermined wavelength
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G02B-005/18
G02B-005/20
G02B-005/00
출원번호
US-0307626
(2014-06-18)
등록번호
US-9513415
(2016-12-06)
우선권정보
JP-2013-162111 (2013-08-05)
발명자
/ 주소
Nakano, Takashi
Nakura, Mitsuru
Ishihara, Kazuya
Awaya, Nobuyoshi
Natsuaki, Kazuhiro
Takimoto, Takahiro
Uchida, Masayo
출원인 / 주소
Sharp Kabushiki Kaisha
대리인 / 주소
Keating & Bennett, LLP
인용정보
피인용 횟수 :
0인용 특허 :
2
초록▼
An optical filter configured to transmit light of a predetermined wavelength includes a substrate; a first conductive thin film that is disposed on the substrate and has apertures extending through the first conductive thin film and arranged with a period of less than the predetermined wavelength; a
An optical filter configured to transmit light of a predetermined wavelength includes a substrate; a first conductive thin film that is disposed on the substrate and has apertures extending through the first conductive thin film and arranged with a period of less than the predetermined wavelength; and a second conductive thin film at least a portion of which faces the apertures so as to be separated from the apertures.
대표청구항▼
1. An optical filter that transmits light of a predetermined wavelength, the optical filter comprising: a substrate;a first conductive thin film in direct contact with the substrate and including a plurality of apertures arranged with a period of less than the predetermined wavelength; anda second c
1. An optical filter that transmits light of a predetermined wavelength, the optical filter comprising: a substrate;a first conductive thin film in direct contact with the substrate and including a plurality of apertures arranged with a period of less than the predetermined wavelength; anda second conductive thin film at least a portion of which faces the apertures and is separated from the apertures; whereina material of a film between the first and the second conductive thin films, a material filling the apertures, and a material filling a plurality of patterned gaps of the second conductive thin film are an identical material and contain a material selected from a group consisting of silicon oxide, silicon nitride, titanium oxide, and aluminum oxide,the second conductive thin film includes a coordination geometry pattern having a same period of arrangement as a pattern of the first conductive thin film, andthe second conductive thin film includes a pattern that is reversed and differently sized than the pattern of the first conductive thin film. 2. The optical filter according to claim 1, wherein the apertures are holes or slits. 3. The optical filter according to claim 1, wherein the second conductive thin film is patterned with the period of arrangement of the apertures. 4. The optical filter according to claim 1, wherein the first conductive thin film contains a metal or an alloy of the metal, the metal being selected from a group consisting of aluminum, copper, silver, gold, titanium nitride, zirconium nitride, nickel, and cobalt, or contains a metal oxide transparent conductive material selected from a group consisting of In2O3-based materials including ITO (Sn:In2O3), ZnO-based materials including AZO (Al:ZnO), GZO (Ga:ZnO), BZO (B:ZnO), and IZO (In:ZnO), and IGZO-based materials. 5. The optical filter according to claim 1, wherein the second conductive thin film contains a metal or an alloy of the metal, the metal being selected from the group consisting of aluminum, copper, silver, gold, titanium nitride, zirconium nitride, nickel, and cobalt, or contains a metal oxide transparent conductive material selected from the group consisting of In2O3-based materials including ITO (Sn:In2O3), ZnO-based materials including AZO (Al:ZnO), GZO (Ga:ZnO), BZO (B:ZnO), and IZO (In:ZnO), and IGZO-based materials. 6. The optical filter according to claim 1, wherein each of the first conductive thin film and the second conductive thin film contains a metal or an alloy of the metal, the metal being selected from the group consisting of aluminum, copper, silver, gold, titanium nitride, zirconium nitride, nickel, and cobalt, or contains a metal oxide transparent conductive material selected from the group consisting of In2O3-based materials including ITO (Sn:In2O3), ZnO-based materials including AZO (Al:ZnO), GZO (Ga:ZnO), BZO (B:ZnO), and IZO (In:ZnO), and IGZO-based materials.
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이 특허에 인용된 특허 (2)
Ebbesen Thomas W. ; Ghaemi Hadi F. ; Thio Tineke ; Wolff Peter A., Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission.
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