System and method for variable dispense position
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
F04B-043/02
F04B-013/00
F04B-049/06
출원번호
US-0466115
(2014-08-22)
등록번호
US-9617988
(2017-04-11)
발명자
/ 주소
Laverdiere, Marc
Cedrone, James
Gonnella, George
Gashgaee, Iraj
Magoon, Paul
King, Timothy J.
출원인 / 주소
Entegris, Inc.
대리인 / 주소
Entegris, Inc.
인용정보
피인용 횟수 :
0인용 특허 :
147
초록▼
Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense p
Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
대표청구항▼
1. A pumping system, comprising: a dispense pump, comprising:a dispense chamber; anda dispense diaphragm connected to a piston and movable by the piston to multiple positions within the dispense chamber, wherein the multiple positions include: a dispense pump hard stop position corresponding to zero
1. A pumping system, comprising: a dispense pump, comprising:a dispense chamber; anda dispense diaphragm connected to a piston and movable by the piston to multiple positions within the dispense chamber, wherein the multiple positions include: a dispense pump hard stop position corresponding to zero available volume for holding a process fluid in the dispense pump; anda dispense pump home position defining an available volume for holding a process fluid in the dispense pump in a dispense cycle;wherein the dispense pump has a maximum available volume for holding a process fluid and wherein the available volume is less than the maximum available volume. 2. The pumping system of claim 1, wherein the dispense pump home position is determined by a controller based on one or more parameters for a dispense operation. 3. The pumping system of claim 1, wherein the dispense pump home position is variable according to a set of processes capable of being performed by the pumping system. 4. The pumping system of claim 1, wherein the multiple positions include a second dispense pump home position corresponding to a second available volume for holding a second process fluid capable of being performed by the pumping system. 5. The pumping system of claim 1, further comprising a feed pump at a first stage of operation of the pumping system, wherein the dispense pump is downstream from the feed pump, and wherein the dispense pump operates at a second stage of operation of the pumping system. 6. A method, comprising: at a pumping system comprising a dispense pump having a dispense chamber and a dispense diaphragm connected to a piston and movable by the piston to multiple positions within the dispense chamber, the multiple positions including a dispense pump hard stop position corresponding to zero available volume for holding a process fluid in the dispense pump:moving the dispense diaphragm to a dispense pump home position defining an available volume for holding a process fluid in the dispense pump in a dispense cycle, wherein the dispense pump has a maximum available volume for holding a process fluid and wherein the available volume is less than the maximum available volume. 7. The method according to claim 6, wherein the dispense pump home position is determined by a controller based on one or more parameters for a dispense operation. 8. The method according to claim 6, wherein the dispense pump home position is variable according to a set of processes capable of being performed by the pumping system. 9. The method according to claim 6, further comprising: moving the dispense diaphragm to a second dispense pump home position corresponding to a second available volume for holding a second process fluid capable of being performed by the pumping system. 10. The method according to claim 6, wherein the pumping system further comprises a feed pump at a first stage of operation of the pumping system, wherein the dispense pump is downstream from the feed pump, and wherein the dispense pump operates at a second stage of operation of the pumping system. 11. A pumping system, comprising: A pump having a chamber and a diaphragm connected to a piston and movable by the piston to multiple positions in the chamber, the chamber having a fluid capacity, the diaphragm positionable in the chamber based on a set of factors affecting a dispense operation, the set of factors comprising a dispense volume and a hold-up volume;wherein, prior to dispensing a fluid from the pumping system, the diaphragm is moved to a home position in the chamber;wherein the home position defines an available volume for a holding process fluid in the pump in a dispense cycle;wherein the available volume for holding the process fluid in the pump in the dispense cycle includes the dispense volume and the hold-up volume; andwherein the available volume for holding the process fluid in the pump in the dispense cycle is less than the fluid capacity of the chamber. 12. The pumping system of claim 11, further comprising a pump controller, wherein the pump is controlled by the pump controller to move the diaphragm in the chamber to the home position. 13. The pumping system of claim 11, wherein the diaphragm is moved to the home position in the chamber after completion of a filtration segment of the dispense cycle. 14. The pumping system of claim 11, wherein the pump is a feed pump that feeds the fluid to a dispense pump. 15. The pumping system of claim 11, wherein the pump is a dispense pump downstream of a feed pump and receives the fluid from the feed pump. 16. The pumping system of claim 11, wherein the hold-up volume is user-selected. 17. The pumping system of claim 16, wherein the user-selected hold-up volume corresponds to a volume of the pump that is outside an effective range of the pump, wherein the effective range of the pump defines a linear region of the pump where the diaphragm experiences low stress. 18. The pumping system of claim 11, wherein the set of factors affecting the dispense operation includes at least one of an error volume, a dispense rate, dispense time, a purge volume, a suckback volume, a vent volume, a predispense rate, a predispense volume, an effective range of the pump, or a user defined volume. 19. The pumping system of claim 11, further comprising a motor, wherein the diaphragm is driven to the home position in the chamber by the motor. 20. The pumping system of claim 19, further comprising a position sensor, wherein the motor is controlled using real time feedback from the position sensor.
Raphael Ian P. (112 Ross Creek Ct. Los Gatos CA 95032), Detector system using extremely low power to sense the presence or absence of an inert or hazardous fuild.
Eberle,Wilfried; Klatte,Heiner, Device for providing wall ducts for, and process of assembling, conduits, tubing or electric cables for motor vehicles.
Greter,Andy, Diaphragm pump with eliminated pump chamber dead space, and circular recesses on the reverse side of the diaphragm for improved diaphragm chamber wall adherence.
Snodgrass Ocie T. (Garland TX) Farney Michael K. (Perryton TX) Gibson Gregory M. (Dallas TX), Filtering and dispensing system with independently activated pumps in series.
Proulx,Stephen; Perivolotis,George; Lin,Zhenwu; Straeffer,Gregory; Gagne,George A.; King,Kenneth; Stankowski,Ralph J., Filtration cartridge and process for filtering a slurry.
Story Carl E. (Cupertino CA) Nichols Jerry A. (San Jose CA) Cady Byron C. (Gilroy CA), Fluid pumping apparatus and system with leak detection and containment.
Biederstadt Clifford ; Costello Gerald B. ; Heiser ; Jr. Arthur J., High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm.
Khoshnevisan Mohsen (Newbury Park CA) Schoenwald Jeffrey S. (Thousand Oaks CA) Rode Jonathan P. (Westlake Village CA) Smith Raymond J. D. (Newbury Park CA) Kolloff Bruce G. (Sussex NJ) Beccue Steve (, High resolution optical hybrid absolute incremental position encoder.
Davlin, Karl A.; Tannous, Adel George; Loudermilk, Alan R., Input/output control systems and methods having a plurality of master and slave controllers.
Bowers William F. (Topsfield MA) Hunt Stephen G. (N. Billerica MA), Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes.
Tanny Mark N. (Brownsville VT) LeBlanc Raymond A. (Springfield VT) Bensley Douglas S. (Springfield VT) Zeitz Vernon W. (N. Springfield VT) Barney John E. (Springfield VT), Linear liquid dispensing pump for dispensing liquid in nanoliter volumes.
Burgess Roy T. (Troy MI) Gunda Rajamouli (Rochester Hills MI) Herta Frank (Kewadin MI) Hodges Robert C. (Troy MI) Kessler James A. (Troy MI) Leemhuis Richard S. (Rochester Hills MI) McCarty Michael R, Power transmission.
Honganen Ronald E. (600 Marathon Dr. Campbell CA 95008) Howe Robert L. (273 Marsh Dr. San Ramon CA 98543) Miller Leslie A. (4150 Piper Dr. San Jose CA 95117), Process for controlling a pump to account for compressibility of liquids in obtaining steady flow.
Patzke Robert C. (Prospect Heights IL) DeRyke Thomas V. (Libertyville IL) Ernohazy Stephen (Mount Prospect IL) Oddo Eugene P. (Mount Prospect IL), Pump and metering device.
Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
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