초록 ▼

Disclosed is a leakage detection system (200) and a leakage detection method for detecting leakage in a gas supply system (10′) comprising a gas source (11; 12) connected to a gas delivery module (14) by a pipeline. The leakage detection system (200) comprises a flow meter (113) connectable along th

Disclosed is a leakage detection system (200) and a leakage detection method for detecting leakage in a gas supply system (10′) comprising a gas source (11; 12) connected to a gas delivery module (14) by a pipeline. The leakage detection system (200) comprises a flow meter (113) connectable along the pipeline remotely from an inlet of the gas delivery module (14); and a detection module (110) configured to receive signals representing a measured flow rate from the flow meter (113), and to compare the measured flow rate (115) to a stored leakage-free reference value (116) to detect an increase in flow rate in the presence of a leak. A flow resistance between the detection module (110) and an outlet of the gas delivery module (14) amplifies the increase in flow rate in the presence of a leak. The system (200) may comprise a flow rate elevation system (121) connectable between the gas source (11; 12) and the flow meter (113) for temporarily increasing the flow rate in the pipeline.

대표청구항 ▼

1. A leakage detection system for detecting leakage in a gas supply system comprising a gas source connected to a gas delivery module by a pipeline, the leakage detection system comprising: a flow sensor connectable along the pipeline remotely from an inlet of the gas delivery module; anda detection

1. A leakage detection system for detecting leakage in a gas supply system comprising a gas source connected to a gas delivery module by a pipeline, the leakage detection system comprising: a flow sensor connectable along the pipeline remotely from an inlet of the gas delivery module; anda detection module configured to receive signals representing a measured flow parameter from the flow sensor, and to compare the measured flow parameter to a stored leakage-free reference value to detect a change in flow parameter in the presence of a leak;wherein a flow resistance between the detection module and an outlet of the gas delivery module amplifies the change in flow parameter in the presence of a leak,wherein the flow resistance comprises a flow resistor element, the flow resistor element being connectable between the flow sensor and the inlet of the gas delivery module. 2. A leakage detection system according to claim 1, wherein the flow resistance comprises an intrinsic flow resistance of the gas delivery module. 3. A leakage detection system according to claim 1, comprising a flow rate elevation system connectable between the gas source and the flow sensor for temporarily changing the flow rate in the pipeline. 4. A gas supply system for a wire bonding process, comprising: a gas source;a gas delivery module; anda leakage detection system according to claim 1, the leakage detection system being connected between the gas source and the gas delivery module. 5. A method of detecting leakage in a pipeline connected between a gas source and a gas delivery module, the method comprising steps of: connecting a flow parameter sensor along the pipeline remotely from an inlet of the gas delivery module;introducing or changing a flow resistance in the pipeline;measuring a flow parameter along the pipeline using the flow parameter sensor;comparing the flow parameter to a stored leakage-free reference value; andif the flow parameter is different from a predetermined level above the leakage-free reference value, determining that there is a leakage in the pipeline. 6. A method according to claim 5, wherein the predetermined level is 10% above the leakage-free reference value. 7. A method according to claim 5, further comprising temporarily increasing the flow rate from the gas source. 8. A method according to claim 5, further comprising determining the leakage-free reference value.