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다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
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Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
|
출원번호 | US-0820422 (2015-08-06) |
등록번호 | US-9691645 (2017-06-27) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 26 인용 특허 : 713 |
A workpiece holder includes a puck, first and second heating devices in thermal communication with respective inner and outer portions of the puck, and a thermal sink in thermal communication with the puck. The first and second heating devices are independently controllable, and the first and second
A workpiece holder includes a puck, first and second heating devices in thermal communication with respective inner and outer portions of the puck, and a thermal sink in thermal communication with the puck. The first and second heating devices are independently controllable, and the first and second heating devices are in greater thermal communication with the puck, than thermal communication of the thermal sink with the puck. A method of controlling temperature distribution of a workpiece includes flowing a heat exchange fluid through a thermal sink to establish a reference temperature to a puck, raising temperatures of radially inner and outer portions of the puck to first and second temperatures greater than the reference temperature, by activating respective first and second heating devices disposed in thermal communication with the radially inner and outer portions of the puck, and placing the workpiece on the puck.
1. A workpiece holder that positions a workpiece for processing, the workpiece holder comprising: a substantially cylindrical puck, wherein: the puck is characterized by a cylindrical axis, a puck radius about the cylindrical axis, and a substantially planar top surface, anda direction parallel to t
1. A workpiece holder that positions a workpiece for processing, the workpiece holder comprising: a substantially cylindrical puck, wherein: the puck is characterized by a cylindrical axis, a puck radius about the cylindrical axis, and a substantially planar top surface, anda direction parallel to the top surface is defined as a lateral direction;a first heating device disposed in thermal communication with a radially inner portion of the puck;a second heating device disposed in thermal communication with a radially outer portion of the puck, wherein the first and second heating devices are independently controllable with respect to one another; anda thermal sink disposed in thermal communication with the puck,wherein: the first and second heating devices are in greater respective degrees of thermal communication with the puck, than a degree of thermal communication of the thermal sink with the puck; anda plurality of attachment points between the thermal sink and the puck provides substantially all of the thermal communication of the thermal sink with the puck, wherein for at least one of the attachment points:the puck forms a protrusion facing the thermal sink;the thermal sink forms an aperture; anda fastener passes through the aperture and couples within the protrusion. 2. The workpiece holder of claim 1, wherein at least one of the first heating device and the second heating device comprises a cable heater disposed within a groove defined within a bottom surface of the puck. 3. The workpiece holder of claim 2, further comprising a heater cap that is placed within the groove to hold the cable heater in place, the heater cap being secured to the puck along at least part of an arc length of the cable heater. 4. The workpiece holder of claim 1, wherein the puck is at least ten inches in diameter and the plurality of attachment points comprise at least twenty attachment points. 5. The workpiece holder of claim 4, wherein the puck is at least twelve inches in diameter and the plurality of attachment points comprise at least thirty attachment points. 6. The workpiece holder of claim 1, wherein at the at least one of the attachment points: the protrusion defines a first lateral extent, andthe thermal sink defines a cavity that faces a bottom surface of the puck, the cavity being partially bounded by a thinned portion of the thermal sink that is reduced in thickness around the aperture, the cavity defining a second lateral extent that is greater than the first lateral extent, such that a lateral gap exists between the protrusion and sides of the cavity. 7. The workpiece holder of claim 6, wherein the thermal sink defines one or more voids adjacent to the aperture and within the thinned portion, to limit thermal transfer through a thermal path extending from the puck, through the fastener and material of the thermal sink surrounding the fastener, to the thermal sink. 8. The workpiece holder of claim 1, further comprising a wave washer disposed about the fastener between the thermal sink and the protrusion, wherein: the wave washer has a net uncompressed thickness that is at least twice its compressed thickness; andthe fastener is partially tightened without flattening the wave washer completely, to allow for local thermal expansion effects. 9. The workpiece holder of claim 1, wherein the thermal sink comprises a metal plate that defines one or more fluid channels, and a heat exchange fluid flows through the fluid channels to define a reference temperature of the thermal sink. 10. The workpiece holder of claim 1, wherein the puck is characterized by a puck thickness, and wherein the substantially cylindrical puck defines one or more radial thermal breaks between the radially inner and radially outer portions of the puck, each thermal break being characterized as a radial recess that intersects at least one of the top surface and a bottom surface of the substantially cylindrical puck, wherein the radial recess is characterized by: a thermal break depth that extends from the top surface or the bottom surface of the puck through at least half of the puck thickness,and a thermal break radius that is disposed symmetrically about the cylindrical axis, and is at least one-half of the puck radius. 11. The workpiece holder of claim 1, wherein the protrusion is integrally formed with the puck, and protrudes from a bottom surface of the puck toward the thermal sink. 12. The workpiece holder of claim 1, wherein the fastener couples with an internally threaded surface of the protrusion. 13. The workpiece holder of claim 1, wherein the attachment points are substantially evenly distributed across each of the inner and outer portions of the puck. 14. A workpiece holder that positions a workpiece for processing, the workpiece holder comprising: a substantially cylindrical puck that is characterized by a cylindrical axis and a substantially planar top surface, wherein the puck defines two radial thermal breaks, a first one of the thermal breaks being characterized as a radial recess that intersects a bottom surface of the puck at a first radius, and extends from the bottom surface through at least one-half of a thickness of the puck,a second one of the thermal breaks being characterized as a radial recess that intersects the top surface of the puck at a second radius that is greater than the first radius, and extends from the top surface through at least one-half of the thickness of the puck,the first and second thermal breaks defining a demarcation between a radially inner portion of the puck and a radially outer portion of the puck;and wherein the puck comprises: a first heating device embedded within the radially inner portion of the puck, anda second heating device embedded within the radially outer portion of the puck;the workpiece holder further comprising a thermal sink that extends substantially beneath the bottom surface of the puck, the thermal sink comprising a metal plate that flows a heat exchange fluid through channels defined therein, to maintain a reference temperature for the puck;wherein the thermal sink mechanically and thermally couples with the puck at a plurality of attachment points that provide a degree of thermal communication between the thermal sink and the puck that is less than a degree of thermal communication between each of the first and second heating devices and the puck. 15. The workpiece holder of claim 14, wherein the thermal sink comprises a metal plate that defines one or more fluid channels, and wherein a heat exchange fluid flows through the one or more fluid channels to define a reference temperature of the thermal sink. 16. The workpiece holder of claim 14, wherein a plurality of attachment points between the thermal sink and the puck provides substantially all of the thermal communication of the thermal sink with the puck. 17. The workpiece holder of claim 16, wherein the attachment points are substantially evenly distributed across each of the inner and outer portions of the puck. 18. The workpiece holder of claim 16, wherein the puck is at least ten inches in diameter and the plurality of attachment points comprise at least twenty attachment points. 19. The workpiece holder of claim 18, wherein the puck is at least twelve inches in diameter and the plurality of attachment points comprise at least thirty attachment points. 20. The workpiece holder of claim 14, wherein at least one of the first heating device and the second heating device comprises a cable heater disposed within a groove defined within a bottom surface of the puck. 21. The workpiece holder of claim 20, further comprising a heater cap that is placed within the groove to hold the cable heater in place, the heater cap being secured to the puck along at least part of an arc length of the cable heater.
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