A temperature adjustment apparatus suppresses decline in temperature adjustment performance by avoiding even partial impairment of the function of a thermoelectric module in respective zones, which is accomplished due to the presence of terminals. A terminal is provided via an electrode extension se
A temperature adjustment apparatus suppresses decline in temperature adjustment performance by avoiding even partial impairment of the function of a thermoelectric module in respective zones, which is accomplished due to the presence of terminals. A terminal is provided via an electrode extension section on a heat exchange plate side electrode of the thermoelectric module of inner zones apart from an outermost zone, of four zones. The electrode extension section is disposed at a position which is sandwiched between adjacent thermoelectric elements and over which a temperature adjustment side electrode spans. The terminals are disposed outside the thermoelectric module in the outermost zone.
대표청구항▼
1. A temperature adjustment apparatus, which comprises: a stage on which a temperature adjustment object is placed, a heat exchange plate, and a thermoelectric module provided on a thermoelectric module plate, the thermoelectric module together with the thermoelectric module plate being arranged bet
1. A temperature adjustment apparatus, which comprises: a stage on which a temperature adjustment object is placed, a heat exchange plate, and a thermoelectric module provided on a thermoelectric module plate, the thermoelectric module together with the thermoelectric module plate being arranged between the stage and the heat exchange plate, the thermoelectric module having a stage side facing the stage and a heal exchange plate side facing the heat exchange plate, wherein: the thermoelectric module includes a plurality of zones including an innermost zone having a circular shape and arranged closest to a center of the stage, and one or more outer zones that are ring-shaped and concentrically arranged with the innermost zone, the innermost zone and the one or more outer zones being configured to provide uninterrupted temperature adjustment, each zone including thermoelectric elements having one end face connected to a temperature adjustment side electrode being disposed on the stage side of the thermoelectric module and another end face connected to a heat exchange plate side electrode being disposed on the heat exchange plate side of the thermoelectric module, the temperature adjustment apparatus and the thermoelectric module are configured to perform temperature adjustment of the temperature adjustment object by passing an electric current to the heat exchange plate side electrode through at least one terminal provided in each zone of the plurality of zones formed from the center toward an outer side of the stage, the thermoelectric module being further configured to perform temperature adjustment independently in each zone of the plurality of zones from the center toward the outer side of the stage by passing the electric current through the one terminal of each zone, the one terminal of the innermost zone having an end provided with an electrode extension section connected to the heat exchange plate side electrode, the electrode extension section electrically connecting the thermoelectric elements in the innermost zone to the thermoelectric elements in another zone of the plurality of zones other than the innermost zone, the electrode extension section of the one terminal of the innermost zone is sandwiched between adjacent thermoelectric elements disposed in other zones of the plurality of zones, the electrode extension section being disposed at a position over which the temperature adjustment side electrodes are connected to the another end face of each of the adjacent thermoelectric elements, the one terminal and the electrode extension section are included in the thermoelectric module plate, and the one terminal of the innermost zone has another end disposed in an outer side region of the one or more outer zones and/or in a zone of the plurality of zones having the largest surface area. 2. The temperature adjustment apparatus according to claim 1, wherein each zone of the plurality of zones has another terminal provided, via an electrode extension section, to the heat exchange plate side electrode of the thermoelectric module plate, and the another terminal of each zone of the plurality of zones has another end disposed in the outer side region of the outermost zone. 3. The temperature adjustment apparatus according to claim 1, wherein the ends of the one terminal of all of the zones are disposed in the innermost zone. 4. The temperature adjustment apparatus according to claim 1, wherein the another ends of the one terminal of all of the zones are disposed in the zone having the largest surface area. 5. The temperature adjustment apparatus according to claim 2, wherein the another ends of the terminals of the outermost zone of the plurality of zones are disposed in the outer side region of the outermost zone, and the ends of the terminals of the innermost zone are disposed in the innermost zone. 6. The temperature adjustment apparatus according to claim 1, wherein the terminals of each zone comprise a positive terminal and a negative terminal,the electrode extension sections are provided respectively to the positive terminal and the negative terminal, andone of the positive and negative terminals of at least one zone is disposed in the innermost zone via a corresponding electrode extension section, and another one of the positive and negative terminals is disposed in the outer side region of the outermost zone via a corresponding electrode extension section. 7. The temperature adjustment apparatus according to claim 3, wherein the terminals of each zone comprise a positive terminal and a negative terminal,the electrode extension sections are provided respectively to the positive terminal and the negative terminal of the terminals, andeach positive and negative terminal is provided with a corresponding electrode extension section and disposed at positions mutually separated by a distance corresponding to at least two thermoelectric elements. 8. The temperature adjustment apparatus according to claim 4, wherein the terminals of each zone comprise a positive terminal and a negative terminal,the electrode extension sections are provided respectively to the positive terminal and the negative terminal, andeach positive and negative terminal is provided with a corresponding electrode extension section and disposed at positions mutually separated by a distance corresponding to at least two thermoelectric elements. 9. The temperature adjustment apparatus according to claim 4, wherein the terminals of each zone comprise a positive terminal and a negative terminal,the electrode extension sections are provided respectively to the positive terminal and the negative terminal, andeach positive and negative terminal is provided with a corresponding electrode extension section and disposed at positions mutually separated by a distance corresponding to at least two thermoelectric elements from a boundary of a zone having a largest surface area. 10. The temperature adjustment apparatus according to claim 1, wherein the terminals and the heat exchange plate have holes, and the temperature adjusting apparatus further comprises shafts for passing the electric current which are inserted through the holes in the terminals and the heat exchange plate. 11. The temperature adjustment apparatus according to claim 2, wherein the terminals and the heat exchange plate have holes, and the temperature adjusting apparatus further comprises shafts for passing the electric current which are inserted through the holes in the terminals and the heat exchange plate. 12. The temperature adjustment apparatus according to claim 3, wherein the terminals and the heat exchange plate have holes, and the temperature adjusting apparatus further comprises shafts for passing the electric current which are inserted through the holes in the terminals and the heat exchange plate. 13. The temperature adjustment apparatus according to claim 4, wherein the terminals and the heat exchange plate have holes, and the temperature adjusting apparatus further comprises shafts for passing the electric current which are inserted through the holes in the terminals and the heat exchange plate. 14. The temperature adjustment apparatus according to claim 5, wherein the terminals and the heat exchange plate have holes, and the temperature adjusting apparatus further comprises shafts for passing the electric current which are inserted through the holes in the terminals and the heat exchange plate. 15. The temperature adjustment apparatus according to claim 1, wherein the heat exchange plate side electrode, the electrode extension section and the terminal are formed in an integrated fashion. 16. The temperature adjustment apparatus according to claim 2, wherein the heat exchange plate side electrode, the electrode extension section and the terminal are formed in an integrated fashion. 17. The temperature adjustment apparatus according to claim 3, wherein the heat exchange plate side electrode, the electrode extension section and the terminal are formed in an integrated fashion. 18. The temperature adjustment apparatus according to claim 4, wherein the heat exchange plate side electrode, the electrode extension section and the terminal are formed in an integrated fashion. 19. The temperature adjustment apparatus according to claim 5, wherein the heat exchange plate side electrode, the electrode extension section and the terminal are formed in an integrated fashion.
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이 특허에 인용된 특허 (8)
Yoshida Yoshifumi,JPX ; Kishi Matsuo,JPX ; Yamamoto Minao,JPX, Cooling unit.
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