[미국특허]
Systems and methods for detecting flow of a fluid
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01F-015/14
G01F-001/69
G01F-015/06
G01F-001/684
G01F-005/00
출원번호
US-0060681
(2016-03-04)
등록번호
US-9791307
(2017-10-17)
발명자
/ 주소
Hartman, Neil W.
Roberts, Colin A.
Mitchell, Marcus A.
출원인 / 주소
Alicat Scientific, Inc.
대리인 / 주소
Dinsmore & Shohl LLP
인용정보
피인용 횟수 :
0인용 특허 :
17
초록▼
Embodiments described herein include systems and methods for detecting flow of a fluid. One embodiment of a system includes a flow body, a thermal tube sensor housing, and a computing device. In some embodiments, the flow body includes an inlet for receiving the fluid and an outlet for expelling the
Embodiments described herein include systems and methods for detecting flow of a fluid. One embodiment of a system includes a flow body, a thermal tube sensor housing, and a computing device. In some embodiments, the flow body includes an inlet for receiving the fluid and an outlet for expelling the fluid, the thermal tube sensor housing includes a sensor tube that includes a first connection portion and a second connection portion, and the sensor tube is configured with a cross position where a first portion of the sensor tube crosses paths with a second portion of the sensor tube, reducing a thermo-siphoning effect.
대표청구항▼
1. A system for detecting flow of a fluid comprising a flow body, a thermal tube sensor housing, and a computing device, wherein: the flow body comprises an inlet for receiving the fluid and an outlet for expelling the fluid;the thermal tube sensor housing comprises a sensor tube that comprises a fi
1. A system for detecting flow of a fluid comprising a flow body, a thermal tube sensor housing, and a computing device, wherein: the flow body comprises an inlet for receiving the fluid and an outlet for expelling the fluid;the thermal tube sensor housing comprises a sensor tube that comprises a first connection portion and a second connection portion;the sensor tube is configured with a cross position where a first portion of the sensor tube crosses paths with a second portion of the sensor tube, reducing a thermo-siphoning effect;the thermal tube sensor housing comprises a first inboard temperature sensor, a first outboard sensor, a second inboard temperature sensor, a second outboard sensor, and a heater that are coupled to the sensor tube;the fluid flows from the first outboard sensor to the first inboard sensor, to the heater, to the second inboard sensor, and to the second outboard sensor;the thermal tube sensor housing is coupled to the flow body by the first connection portion and the second connection portion, such that the fluid received by the inlet is communicated to the sensor tube at the first connection portion and is returned to the flow body by the second connection portion for expelling by the outlet of the flow body;a flow rate is determined based on a change in temperature of the fluid detected by the first outboard sensor, first inboard temperature sensor, the second inboard temperature sensor, and the second outboard sensor; anddata related to the flow rate is output for display. 2. The system of claim 1, wherein the flow rate includes at least one of the following: a mass flow rate and a volumetric flow rate. 3. The system of claim 1, further comprising a temperature sensor for detecting temperature and a pressure sensor for detecting pressure, wherein a reading from the temperature sensor and a reading from the pressure sensor are utilized by the computing device to calculate volumetric flow rate. 4. The system of claim 1, further comprising a proportional control valve, wherein the proportional control valve regulates an amount of fluid that enters the inlet. 5. The system of claim 4, further comprising a user option for holding constant at least one of the following: mass flow rate, temperature, and pressure. 6. The system of claim 1, wherein the first inboard temperature sensor and the second inboard temperature sensor are part of a bridge circuit for detecting the flow rate of the fluid. 7. The system of claim 1, wherein the flow body includes a bypass section, a feed section, and a return section, wherein the bypass section directs the fluid from the inlet to the outlet, wherein the feed section directs the fluid to the sensor tube, and wherein the return section directs the fluid from the sensor tube to the outlet. 8. The system of claim 1, wherein the thermal tube sensor housing comprises a housing cavity within which the first inboard temperature sensor, the second inboard temperature sensor, and the heater reside. 9. The system of claim 8, wherein the housing cavity further includes an insulator for reducing heat leaking from the housing cavity. 10. The system of claim 8, wherein the thermal tube sensor housing further comprises a sealable opening for receiving insulation into the housing cavity. 11. The system of claim 8, further comprising a cover plate that that covers at least a portion of the housing cavity. 12. The system of claim 1, wherein the first inboard temperature sensor comprises a temperature-sensitive resistance coil. 13. The system of claim 1, wherein the first inboard temperature sensor detects a temperature of the fluid prior to being heated by the heater and wherein the second inboard temperature sensor detects the temperature of the fluid after being heated by the heater. 14. The system of claim 1, further comprising a sensor adapter that is coupled to the flow body, wherein the sensor adapter receives a temperature sensor and a pressure sensor. 15. The system of claim 1, wherein the flow body comprises at least one of the following: a flow interface, a high flow plate, a flow element, a top plate, and a flow gasket. 16. The system of claim 1, wherein the sensor tube further comprises an upper straight portion, a first curved portion and a second curved portion, which are coupled to a first angled portion and a second angled portion, wherein the first curved portion creates a substantially acute angle between the upper straight portion and the first angled portion, and wherein the second angled portion creates a substantially acute angle between the upper straight portion and the second angled portion, such that the first angled portion and the second angled portion provide the cross position. 17. The system of claim 1, wherein the first inboard temperature sensor and the second inboard temperature sensor include a plurality of respective thermistors for detecting temperature. 18. A flow meter for detecting flow of a fluid, comprising a flow body, a thermal tube sensor housing, and a computing device, wherein: the flow body comprises an inlet for receiving the fluid and an outlet for expelling the fluid;the thermal tube sensor housing comprises a sensor tube that comprises a first connection portion, and a second connection portion;the sensor tube is configured with a cross position, where the cross position includes a first portion of the sensor tube crossing paths with a second portion of the sensor tube, thereby reducing a thermo-siphoning effect;the thermal tube sensor housing comprises a first inboard temperature sensor, a second inboard temperature sensor, a first outboard temperature sensor, a second outboard temperature sensor, and a heater that are coupled to the sensor tube,the fluid flows from the first outboard sensor to the first inboard sensor, to the heater, to the second inboard sensor, and to the second outboard sensor;a flow rate is determined based on a change in temperature of the fluid detected by the first inboard temperature sensor, the second inboard temperature sensor, the first outboard temperature sensor, and the second outboard temperature sensor; anddata related to the flow rate is output for display. 19. A thermal tube sensor housing for detecting flow of a fluid, comprising a sensor tube, a first sensor bridge, a second sensor bridge, and a heater, wherein: the first sensor bridge comprises a first inboard temperature sensor and a second inboard temperature sensor,the second sensor bridge comprises a first outboard temperature sensor and a second outboard temperature sensor;the first sensor bridge, the second sensor bridge, and the heater are coupled to the sensor tube such that the fluid flows from the first outboard sensor to the first inboard sensor, to the heater, to the second inboard sensor, and to the second outboard sensor;the sensor tube is configured with a cross position, where the cross position includes a first portion of the sensor tube crossing paths with a second portion of the sensor tube, thereby reducing a thermo-siphoning effect when the heater imparts thermal energy into the sensor tube;a flow rate is determined based on a change in temperature of the fluid detected by the first inboard temperature sensor, the second inboard temperature sensor, the first outboard temperature sensor, and the second outboard temperature sensor; anddata related to the flow rate is output for display.
Smirnov, Alexei V.; McDonald, R. Mike; Mauck, Justin, Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements.
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