Precise annealing of focal plane arrays for optical detection
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/00
C03B-009/41
H01L-021/66
B23K-026/00
H01L-027/146
출원번호
US-0824621
(2015-08-12)
등록번호
US-9793177
(2017-10-17)
발명자
/ 주소
Bender, Daniel A.
출원인 / 주소
National Technology & Engineering Solutions of Sandia, LLC
대리인 / 주소
Medley, Behrens & Lewis, LLC
인용정보
피인용 횟수 :
0인용 특허 :
11
초록▼
Precise annealing of identified defective regions of a Focal Plane Array (“FPA”) (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditi
Precise annealing of identified defective regions of a Focal Plane Array (“FPA”) (e.g., exclusive of non-defective regions of the FPA) facilitates removal of defects from an FPA that has been hybridized and/or packaged with readout electronics. Radiation is optionally applied under operating conditions, such as under cryogenic temperatures, such that performance of an FPA can be evaluated before, during, and after annealing without requiring thermal cycling.
대표청구항▼
1. A system comprising: a device configured to mount and position a Focal Plane Array (“FPA”), wherein the FPA comprises: a sensory layer and a ROIC layer, wherein the sensory layer is hybridized with the ROIC layer, wherein the sensory layer comprises an identified defective region, the defective r
1. A system comprising: a device configured to mount and position a Focal Plane Array (“FPA”), wherein the FPA comprises: a sensory layer and a ROIC layer, wherein the sensory layer is hybridized with the ROIC layer, wherein the sensory layer comprises an identified defective region, the defective region corresponding to at least one defective pixel, the defective region being less than an entirety of the FPA;an emitter that irradiates the defective region of the FPA to anneal the defective region without annealing a non-defective region of the FPA; anda controller component, wherein the controller component is configured to control the movement of the emitter or to control the movement of the device configured to mount and position the FPA. 2. The system of claim 1, further comprising a thermal vacuum chamber, wherein the emitter is configured to irradiate the defective region of the FPA while under thermal vacuum. 3. The system of claim 2, wherein the device configured to mount and position the FPA and the emitter are disposed inside the thermal vacuum chamber. 4. The system of claim 1, wherein the defective region is defective due to a defect in a PN-j unction within the sensor layer of the at least one defective pixel. 5. The system of claim 4, further comprising an interrogation component that: reads values from the ROIC layer when the FPA is under a dark condition; andidentifies the defective region based upon a value corresponding to the at least one defective pixel read from the ROIC layer. 6. The system of claim 1, wherein the emitter is further configured to focus a spot size of radiation emitted by the emitter to be less than the size of the at least one pixel. 7. The system of claim 1, wherein the device configured to mount and position the FPA is configured to translate the FPA relative to the emitter. 8. The system of claim 1, wherein the device configured to mount and position the FPA is static, and wherein the emitter is configured to move relative to the FPA. 9. The system of claim 1, wherein the controller component is configured to receive radiation characteristics for annealing the sensory layer. 10. The system of claim 1, further comprising an interrogation component that is configured to interrogate the ROIC layer during or after the emitter irradiates the defective region. 11. The system of claim 1, wherein the controller component is further configured to control the emitter to emit radiation with a particular focal spot size, pulse energy, or spatial-temporal profile. 12. The system of claim 1, wherein the sensory layer is hybridized with the ROIC layer by a contact layer. 13. A system comprising: a device configured to mount and position a Focal Plane Array (“FPA”), wherein the FPA comprises: a sensory layer and a readout integrated circuit (ROIC) layer, wherein the sensory layer is hybridized with the ROIC layer, wherein the sensory layer comprises an identified defective region, the defective region corresponding to at least one defective pixel, the defective region being less than an entirety of the FPA;a laser emitter that irradiates the defective region of the FPA to anneal the defective region without annealing a non-defective region of the FPA; anda computing apparatus comprising: a laser selector component that selects characteristics of a laser beam to be emitted by the laser emitter based at least in part upon a thermal model that simulates laser absorption and heat profile generation within a material to be annealed; anda controller component, wherein the controller component is configured to control the movement of the emitter or to control the movement of the device configured to mount and position the FPA. 14. A system comprising: a device configured to mount and position a Focal Plane Array (“FPA”);an emitter configured to emit annealing radiation and to focus the emitted annealing radiation onto a selected portion of a sensory layer of the FPA without annealing a non-defective region of the FPA;an interrogation component configured to read pixel values from a readout integrated circuit (ROIC) layer of the FPA and to identify defects from the read pixel values, wherein the ROIC layer is hybridized with the sensory layer; anda controller component, wherein the controller component is configured to control the movement of the emitter or to control the movement of the device configured to mount and position the FPA.
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이 특허에 인용된 특허 (11)
Yanka Robert W. (Liverpool NY) Noble Milton L. (Liverpool NY), A-dual band IR sensor having two monolithically integrated staring detector arrays for simultaneous, coincident image re.
Kornrumpf William P. (Albany NY) Marcinkiewicz Walter M. (Schenectady NY) Davern William E. (Syracuse NY) Zieger Herbert C. (Baldwinsville NY) Miles Jonathan R. (Liverpool NY), Compact, thermally efficient focal plane array and testing and repair thereof.
Russell Stephen D. ; Sexton Douglas A. ; Kelley Eugene P. ; Reedy Ronald E., Method of improving the spectral response and dark current characteristics of an image gathering detector.
Hatcher, Ryan Michael; Segal, Brent M.; Bowen, Robert Chris; Ward, Jonathan Wesley, Modified hybrid infrared focal plane array architecture for large scaling.
Robillard, Gene A.; Holland, Richard S.; Graney, Robert N.; Marciniec, John W.; Mullarkey, John D.; Rourke, Paul H., Thermal mismatch compensation technique for integrated circuit assemblies.
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