초록 ▼

A method of removing copper oxide from copper surfaces is disclosed that comprises application of vapor generated by an ultrasonic wave nebulizer. The energized vapor droplets include water and a weak organic acid such as acetic acid, lactic acid, citric acid, uric acid, oxalic acid, or formic acid

A method of removing copper oxide from copper surfaces is disclosed that comprises application of vapor generated by an ultrasonic wave nebulizer. The energized vapor droplets include water and a weak organic acid such as acetic acid, lactic acid, citric acid, uric acid, oxalic acid, or formic acid that have a vapor pressure proximate to that of water. The weak organic acid preferably has a pKa high enough to avoid Cu etching but is sufficiently acidic to remove copper oxide at a rate that is compatible with high throughput manufacturing. In one embodiment, weak acid/water vapor is applied to a substrate in a spin bowl and is followed by a deionized water rinse step in the same spin bowl. Improved wettability results in improved uniformity in subsequently plated copper films. Considerable cost savings is realized as a result of reduced chemical consumption and higher product yields.

대표청구항 ▼

1. A method of removing copper oxide from copper surfaces, comprising: (a) providing a substrate on which a copper layer with a top surface has been formed;(b) applying vapor consisting of water and a weak organic acid at a temperature of about 20 to 25° C. to said top surface, said vapor is generat

1. A method of removing copper oxide from copper surfaces, comprising: (a) providing a substrate on which a copper layer with a top surface has been formed;(b) applying vapor consisting of water and a weak organic acid at a temperature of about 20 to 25° C. to said top surface, said vapor is generated by an ultrasonic wave nebulizer; and(c) rinsing the top surface of said copper layer with deionized water. 2. The method of claim 1 wherein the ultrasonic wave nebulizer is pre-programmed to provide a certain flow rate of the weak organic acid/water vapor. 3. The method of claim 1 wherein the substrate is rotated during steps (b) and (c). 4. The method of claim 1 wherein the weak organic acid is one of acetic acid, lactic acid, formic acid, citric acid, uric acid, and oxalic acid. 5. The method of claim 1 wherein the weak organic acid is acetic acid and the vapor comprises a weak acid/water ratio between about 0.5:1 and 1:1. 6. The method of claim 1 wherein the weak organic acid has a pKa from about 4 to 6. 7. The method of claim 1 wherein the vapor is transported from the ultrasonic wave nebulizer through a tube and an opening into a process chamber comprised of a spin bowl and a cover to contain said vapor within the process chamber during treatment of the substrate. 8. The method of claim 1 wherein weak organic acid/water vapor contacts said top surface for a period of about 30 to 60 seconds during the vapor application step. 9. The method of claim 1 wherein deionized water contacts said top surface for a period of 30 to 60 seconds during the rinsing step. 10. The method of claim 1 wherein steps (b) and (c) are performed within a single process chamber.