초록 ▼

The disclosure describes a probe card assembly for nondestructive integrated circuit testing. The probe card assembly includes an outer gimbal bearing with a tapered bearing surface being mounted on a top surface of a printed circuit board. The probe card assembly further includes an inner gimbal be

The disclosure describes a probe card assembly for nondestructive integrated circuit testing. The probe card assembly includes an outer gimbal bearing with a tapered bearing surface being mounted on a top surface of a printed circuit board. The probe card assembly further includes an inner gimbal bearing with a spherical bearing surface which contacts the tapered bearing surface of the outer gimbal bearing at a single point of contact about a circumference thereof. The probe card assembly further includes a spring plate mounted to the outer gimbal bearing, providing a downward force to a substrate.

대표청구항 ▼

1. A probe card assembly, comprising: an outer gimbal bearing with a tapered bearing surface being mounted on a top surface of a printed circuit board;an inner gimbal bearing with a spherical bearing surface which contacts the tapered bearing surface of the outer gimbal bearing at a single point of

1. A probe card assembly, comprising: an outer gimbal bearing with a tapered bearing surface being mounted on a top surface of a printed circuit board;an inner gimbal bearing with a spherical bearing surface which contacts the tapered bearing surface of the outer gimbal bearing at a single point of contact about a circumference thereof; anda spring plate mounted to the outer gimbal bearing, providing a downward force to a substrate,wherein the spherical bearing surface of the inner gimbal bearing and the tapered bearing surface of the outer gimbal bearing have a different profile such that the tapered bearing surface is tangential at a single position to the spherical bearing surface. 2. The probe card assembly of claim 1, further comprising a mechanism which prevents rotation of the inner gimbal bearing about a vertical axis with respect to the outer gimbal bearing. 3. The probe card assembly of claim 2, wherein the mechanism comprises a depressed area provided on one of the spring plate and the inner gimbal bearing which engages with a raised area of another of the spring plate and the inner gimbal bearing to prevent rotation of the substrate about a Z-axis. 4. The probe card assembly of claim 2, wherein the mechanism includes a flexible tab extending between the inner gimbal bearing and the outer gimbal bearing. 5. The probe card assembly of claim 2, wherein the mechanism includes slots provided on the spring plate engaging with at least one set screw provided as an assembly with the inner gimbal bearing. 6. The probe card assembly of claim 5, wherein the at least one set screw has a wedge shape which engages with a slotted pattern of the spring plate. 7. The probe card assembly of claim 6, wherein the slotted pattern is a serpentine configuration, which flexes when the substrate tilts and restraining a rotation about a Z axis of the substrate. 8. The probe card assembly of claim 1, wherein the inner gimbal bearing includes a spring mechanism to adjust a positioning of the substrate within the opening of the inner gimbal bearing. 9. The probe assembly of claim 1, further comprising a shim provided between the substrate and the inner gimbal bearing to reduce stresses in the substrate. 10. A probe card assembly, comprising: an outer gimbal hearing mounted on a top surface of a printed circuit board; a compliant interposer positioned within an opening of the outer gimbal bearing and contacting the top surface of the printed circuit board;an inner gimbal bearing positioned within the opening of the outer gimbal bearing; a substrate positioned within an opening of the inner gimbal bearing and in electrical contact with the compliant interposer; anda spring plate mounted to the outer gimbal bearing which is configured to apply downward force directly on a surface of the inner gimbal bearing,wherein an outer edge surface of the inner gimbal hearing and an inner edge surface of the outer gimbal bearing have a different profile such that the outer edge surface is tangential at a single position to the inner edge surface. 11. The probe card assembly of claim 10, further comprising a mechanism which prevents rotation of the inner gimbal bearing about a vertical axis. 12. The probe card assembly of claim 11, wherein: the mechanism includes slots provided on the spring plate engaging with at least one set screw provided as an assembly with the inner gimbal bearing;the slots of the spring plate are provided in a serpentine configuration above an upper surface of the inner gimbal bearing; andthe spring plate provides a downward force on the substrate, via the substrate's attachment to the inner gimbal bearing. 13. The probe card assembly of claim 10, wherein the inner gimbal bearing includes a spring mechanism to adjust a positioning of the substrate within the opening of the inner gimbal bearing. 14. The probe card assembly of claim 10, wherein a bearing surface of the inner gimbal bearing and the outer gimbal bearing have a same profile. 15. The probe card assembly of claim 10, wherein the compliant interposer includes a center post which is structured and positioned to facilitate a tilting motion of the substrate. 16. A probe card assembly, comprising: an outer gimbal bearing mounted on a top surface of a printed circuit board and having an opening with a first profile;a compliant interposer positioned within a lower portion of the opening of the outer gimbal bearing;an inner gimbal bearing positioned within an upper portion of the opening of the outer gimbal bearing having a second profile;a mechanism which prevents rotation of the inner gimbal bearing about a vertical axis; a substrate positioned within an opening of the inner gimbal bearing and in electrical contact with the compliant interposer; anda spring plate mounted to the outer gimbal bearing which is configured to provide a downward force on the inner gimbal bearing and the substrate,wherein a bearing surface of die inner gimbal beating and bearing surface of the outer gimbal bearing, have a different circumferential profile such that the bearing surface of the outer gimbal bearing is tangential at a single position to the bearing surface of the inner gimbal bearing. 17. The probe card assembly of claim 16, wherein: the mechanism includes serpentine slots provided on the spring plate engaging with at least one set screw provided as an assembly with the inner gimbal bearing;the serpentine slots of the spring plate are provided above a circumference of the inner gimbal bearing; andthe spring plate provides a downward force on the substrate by contacting the inner gimbal bearing such that electrical connections of the substrate are fully compliant with pins of the interposer. 18. The probe card assembly of claim 16, wherein the inner gimbal bearing includes a spring mechanism to adjust a positioning of the substrate within the opening of the inner gimbal bearing.