End structure of nozzle, purging device, and load port
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/67
H01L-021/673
출원번호
US-0072823
(2016-03-17)
등록번호
US-9916997
(2018-03-13)
우선권정보
JP-2015-057368 (2015-03-20)
발명자
/ 주소
Morihana, Toshimitsu
Matsumoto, Yuki
Natsume, Mitsuo
출원인 / 주소
SINFONIA TECHNOLOGY CO., LTD.
대리인 / 주소
Oblon, McClelland, Maier & Neustadt, L.L.P.
인용정보
피인용 횟수 :
0인용 특허 :
8
초록▼
There is provided an end structure of a nozzle (11) including a gas-flow passage (13) communicable with an opening (104) provided through a bottom of a container (100) configured to contain an object, the nozzle (11) configured so that gas is injected into or discharged from the container (100) thro
There is provided an end structure of a nozzle (11) including a gas-flow passage (13) communicable with an opening (104) provided through a bottom of a container (100) configured to contain an object, the nozzle (11) configured so that gas is injected into or discharged from the container (100) through the gas-flow passage (13) and the opening (104). The end structure includes a contact portion (19) provided at an upper end portion of the nozzle (11) and around the gas-flow passage (13), and the contact portion (19) is configured to be brought into contact with a contacted portion (103) provided around the opening (104). The contact portion (19) includes a flat portion (19b) and protruding portions (19a and 19c) each protruding upward relative to the flat portion (19b), and the flat portion (19b) is made of material softer than that of the protruding portions (19a and 19c).
대표청구항▼
1. An end structure of a nozzle including a gas-flow passage communicable with an opening provided through a bottom of a container configured to contain an object, the nozzle being configured so that gas is injected into or discharged from the container through the gas-flow passage and the opening,
1. An end structure of a nozzle including a gas-flow passage communicable with an opening provided through a bottom of a container configured to contain an object, the nozzle being configured so that gas is injected into or discharged from the container through the gas-flow passage and the opening, the end structure comprising a contact portion provided at an upper end portion of the nozzle and around the gas-flow passage, the contact portion being configured to be brought into contact with a contacted portion provided around the opening,the contact portion including a flat portion and a plurality of protruding portions protruding upward relative to the flat portion, the flat portion being made of material softer than that of the protruding portions,the protruding portions including:an inner protruding portion provided between the gas-flow passage and the flat portion; andan outer protruding portion provided outside the flat portion. 2. A purging device comprising: a table configured so that a container is placed thereon; and a nozzle unit installed in the table, the purging device configured so that gas is injected into or discharged from the container through the nozzle unit, the nozzle unit including the end structure recited in claim 1. 3. A load port provided adjacent to a semiconductor manufacturing device, the load port comprising: the purging device recited in claim 2; and a mechanism configured to open/close a door of a container placed on the table of the purging device. 4. The load port according to claim 3, further comprising an up-down movement mechanism configured to move up and down the nozzle, wherein when the nozzle is moved up by the up-down movement mechanism and thereby the contact portion is brought into contact with the contacted portion, the gas-flow passage is hermetically connected to and communicates with the opening. 5. The load port according to claim 3, wherein the nozzle includes a nozzle upper body including the contact portion, and a nozzle lower body, andby assembling the nozzle upper body and the nozzle lower body into the nozzle, a through hole of the nozzle upper body is connected to a through hole of the nozzle lower body, to form the gas-flow passage. 6. The load port according to claim 5, wherein the nozzle is assembled by screwing a threaded portion of the nozzle upper body with a threaded portion of the nozzle lower body. 7. The load port according to claim 5, wherein an O ring is provided between the nozzle upper body and the nozzle body. 8. An end structure of a nozzle including a gas-flow passage communicable with an opening provided through a bottom of a container configured to contain an object, the nozzle being configured so that gas is injected into or discharged from the container through the gas-flow passage and the opening, the end structure comprising a contact portion provided at an upper end portion of the nozzle and around the gas-flow passage, the contact portion being configured to be brought into contact with a contacted portion provided around the opening,the contact portion including:a flat portion made of elastic material; anda protruding portion formed by a part of the upper end portion of the nozzle, the part protruding upward relative to the flat portion. 9. The end structure according to claim 8, wherein the elastic material is a rubber member. 10. The end structure according to claim 8, wherein the protruding portion is made of metal. 11. The end structure according to claim 8, wherein the protruding portion includes a plurality of protruding portion, andthe protruding portions include:an inner protruding portion provided between the gas-flow passage and the flat portion; andan outer protruding portion provided outside the flat portion. 12. A purging device comprising: a table configured so that a container is placed thereon; and a nozzle unit installed in the table, the purging device configured so that gas is injected into or discharged from the container through the nozzle unit, the nozzle unit including the end structure recited in claim 8. 13. A load port provided adjacent to a semiconductor manufacturing device, the load port comprising: the purging device recited in claim 12; and a mechanism configured to open/close a door of a container placed on the table of the purging device. 14. The load port according to claim 13, further comprising an up-down movement mechanism configured to move up and down the nozzle, wherein when the nozzle is moved up by the up-down movement mechanism and thereby the contact portion is brought into contact with the contacted portion, the gas-flow passage is hermetically connected to and communicates with the opening. 15. The load port according to claim 13, wherein the nozzle includes a nozzle upper body including the contact portion, and a nozzle lower body, andby assembling the nozzle upper body and the nozzle lower body into the nozzle, a through hole of the nozzle upper body is connected to a through hole of the nozzle lower body, to form the gas-flow passage. 16. The load port according to claim 15 wherein the nozzle is assembled by screwing a threaded portion of the nozzle upper body with a threaded portion of the nozzle lower body. 17. The load port according to claim 15, wherein an O ring is provided between the nozzle upper body and the nozzle body.
Natsume, Mitsuo; Ochiai, Mitsutoshi; Mizokawa, Takumi, Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method.
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