Semiconductor device and manufacturing method thereof
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-029/66
H01L-027/12
H01L-029/786
H01L-051/00
H01L-023/29
H01L-027/32
출원번호
US-0340387
(2016-11-01)
등록번호
US-9929190
(2018-03-27)
우선권정보
JP-2002-316397 (2002-10-30)
발명자
/ 주소
Yamazaki, Shunpei
Takayama, Toru
Maruyama, Junya
Ohno, Yumiko
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Robinson Intellectual Property Law Office
인용정보
피인용 횟수 :
1인용 특허 :
111
초록▼
It is an object of the present invention to provide a peeling method that causes no damage to a layer to be peeled and to allow not only a layer to be peeled with a small surface area but also a layer to be peeled with a large surface area to be peeled entirely. Further, it is also an object of the
It is an object of the present invention to provide a peeling method that causes no damage to a layer to be peeled and to allow not only a layer to be peeled with a small surface area but also a layer to be peeled with a large surface area to be peeled entirely. Further, it is also an object of the present invention to bond a layer to be peeled to various base materials to provide a lighter semiconductor device and a manufacturing method thereof. Particularly, it is an object to bond various elements typified by a TFT, (a thin film diode, a photoelectric conversion element comprising a PIN junction of silicon, or a silicon resistance element) to a flexible film to provide a lighter semiconductor device and a manufacturing method thereof.
대표청구항▼
1. A display device comprising: a metal oxide layer over a first substrate with a first adhesive therebetween;a display portion over the metal oxide layer; anda second substrate over the display portion with a second adhesive therebetween,wherein:the first substrate and the second substrate have fle
1. A display device comprising: a metal oxide layer over a first substrate with a first adhesive therebetween;a display portion over the metal oxide layer; anda second substrate over the display portion with a second adhesive therebetween,wherein:the first substrate and the second substrate have flexibility,the display portion comprises a transistor, a pixel electrode and a display element, andthe metal oxide layer contains, as its main component, a metal element selected from Ti, Ta, W, Mo, Cr, Nd, Fe, Ni, Co, Zr, and Zn. 2. The display device according to claim 1, wherein the metal element is Ti. 3. The display device according to claim 1, wherein the display element is a light-emitting element. 4. The display device according to claim 1, wherein the display element is a liquid crystal element. 5. The display device according to claim 1, wherein the display element is sealed with the second adhesive. 6. An electronic device comprising a module with the display device according to claim 1. 7. The electronic device according to claim 6, wherein the electronic device is one selected from a video camera, a digital camera, a head mount display, a car navigation system, a personal computer, a portable telephone, and an electronic book. 8. A display device comprising: a metal oxide layer over a first substrate with a first adhesive therebetween;an oxide layer over the metal oxide layer;a display portion over the metal oxide layer; anda second substrate over the display portion with a second adhesive therebetween,wherein:the first substrate and the second substrate have flexibility,the oxide layer includes one of silicon oxide and silicon oxynitride,the display portion comprises a transistor, a pixel electrode and a display element, andthe metal oxide layer contains, as its main component, a metal element selected from Ti, Ta, W, Mo, Cr, Nd, Fe, Ni, Co, Zr, and Zn. 9. The display device according to claim 8, wherein the metal element is Ti. 10. The display device according to claim 8, wherein the display element is a light-emitting element. 11. The display device according to claim 8, wherein the display element is a liquid crystal element. 12. The display device according to claim 8, wherein the display element is sealed with the second adhesive. 13. An electronic device comprising a module with the display device according to claim 8. 14. The electronic device according to claim 13, wherein the electronic device is one selected from a video camera, a digital camera, a head mount display, a car navigation system, a personal computer, a portable telephone, and an electronic book.
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이 특허에 인용된 특허 (111)
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