초록 ▼

An isolation valve is provided, along with removable shield insert assemblies for an isolation valve. In one embodiment, a shield insert assembly for an isolation valve is provided that includes a graphite first shield insert having a flat ring shape. The first shield insert has a circular outer dia

An isolation valve is provided, along with removable shield insert assemblies for an isolation valve. In one embodiment, a shield insert assembly for an isolation valve is provided that includes a graphite first shield insert having a flat ring shape. The first shield insert has a circular outer diameter. An elongated aperture is formed through the first shield insert. At least two fastener holes are formed through the first shield insert configured to couple the first shield insert to a first shield support.

대표청구항 ▼

1. A shield insert assembly for an isolation valve comprising: a graphite first shield insert having a flat ring shape, the first shield insert comprising: a circular outer diameter;an elongated aperture formed through the first shield insert; andat least two fastener holes are formed through the fi

1. A shield insert assembly for an isolation valve comprising: a graphite first shield insert having a flat ring shape, the first shield insert comprising: a circular outer diameter;an elongated aperture formed through the first shield insert; andat least two fastener holes are formed through the first shield insert configured to couple the first shield insert to a first shield support. 2. The shield insert assembly of claim 1 comprising: a first shield support having a notch configured to mate with the circular outer diameter of the first shield insert. 3. The shield insert assembly of claim 2, wherein the first shield support is fabricated from graphite or aluminum. 4. The shield insert assembly of claim 2, wherein the notch of the first shield support forms a lap joint with the first shield insert. 5. The shield insert assembly of claim 2, wherein a thickness of the first shield support is about equal to a thickness of the first shield insert. 6. The shield insert assembly of claim 1 further comprising: a first shield support having an aperture configured to receive and mate with the circular outer diameter of the first shield insert;a second shield insert having an elongated aperture; anda second shield support having an aperture configured to mate with the second shield insert, the second shield insert sized to fit through the aperture of the first shield support. 7. The shield insert assembly of claim 6, wherein the second shield insert is fabricated from graphite. 8. The shield insert assembly of claim 6, wherein the second shield insert is oval shaped. 9. The shield insert assembly of claim 6, wherein the second shield insert further comprises: a thickness tapering to the elongated aperture of the second shield insert. 10. The shield insert assembly of claim 6, wherein the second shield insert further comprises: an outer wall larger than the aperture of the second shield support. 11. An ion implantation system comprising: an implantation chamber;a body assembly mounted to a side of the implantation chamber, wherein the body assembly comprises: a housing having an aperture providing a connection to the implantation chamber;a closure member disposed in the housing;an actuator coupled to the closure member, the actuator operable to move the closure member to open and close the aperture; andthe shield assembly of claim 1 coupled to the housing over the aperture. 12. The shield insert assembly of claim 1, further comprising: a first dimension corresponding to a height of the elongated aperture formed through the first shield insert; anda second dimension corresponding to a width of the elongated aperture formed in the first shield insert, wherein the second dimension is at least about four times greater than the first dimension. 13. The shield insert assembly of claim 1, wherein along a radius of the first shield insert, a first distance of the aperture to the circular outer diameter in a direction of the first dimension is smaller than a second distance of the aperture to the circular outer diameter in a direction of the second dimension. 14. The shield insert assembly of claim 1, wherein the graphite first shield insert further comprises: a first side, anda second side wherein a surface area of the second side is larger than a surface area of the first side. 15. The shield insert assembly of claim 14, wherein the at least two fastener holes extend through the first side. 16. The shield insert assembly of claim 15, wherein the at least two fastener holes do not extend through the second side. 17. The shield insert assembly of claim 16, wherein the at least two fastener holes have a countersink on the first side. 18. The shield insert assembly of claim 17, wherein the second side is substantially planar. 19. The shield insert assembly of claim 14, further comprising: a taper disposed on the first side completely circumscribing the aperture. 20. A shield insert assembly for an isolation valve comprising: a graphite first shield insert having a flat shape, the first shield insert comprising: an outer perimeter;an elongated aperture formed through the first shield insert; andat least two fastener holes are formed through the first shield insert configured to couple the first shield insert to a first shield support; anda graphite second shield insert having a flat shape, the second shield insert comprising: an outer perimeter; andan elongated aperture, wherein the outer perimeter of the second shield insert is sized to fit through the elongated aperture formed in the first shield insert.