A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator ha
A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
대표청구항▼
1. A transport apparatus comprising: a housing;a drive mounted to the housing; andat least one transport arm connected to the drive;where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment;at least one stator
1. A transport apparatus comprising: a housing;a drive mounted to the housing; andat least one transport arm connected to the drive;where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment;at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment;where the at least one salient pole of the at least one stator and the at least one salient pole of the at least one rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator; andat least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator so that the at least one seal is free of transport apparatus structural loading but for a pressure differential loading between the isolated environment and as environment outside the isolated environment. 2. The transport apparatus of claim 1, wherein the at least one seal comprises a membrane mounted to the at least one stator. 3. The transport apparatus of claim 1, wherein the at least one seal depends from the at least one stator. 4. The transport apparatus of claim 1, wherein the at least one stator structurally supports the at least one seal. 5. The transport apparatus of claim 1, wherein the at least one seal conforms to a shape of the at least one stator. 6. The transport apparatus of claim 1, wherein the at least one rotor and the at least one stator form stacked motors or motors that are radially nested one inside the other. 7. The transport apparatus of claim 1, further comprising at least one reluctance based encoder track disposed on each of the at least one rotor and at least one reluctance based position feedback sensor configured to interface with the at least one reluctance based encoder track. 8. The transport apparatus of claim 1, wherein the at least one rotor is coupled to a coaxial drive shaft arrangement for driving the at least one transport arm. 9. The transport apparatus of claim 1, wherein the at least one stator is a segmented stator. 10. The transport apparatus of claim 1, wherein the drive is configured as an axial flux flow drive or a radial flux flow drive. 11. The transport apparatus of claim 1, wherein the at least one stator includes laminated salient poles. 12. The transport apparatus of claim 1, wherein the at least one rotor includes laminated salient poles. 13. The transport apparatus of claim 12, wherein the at least one rotor includes a drive member interface, and the drive further includes a drive transmission member interfaced with the at least one rotor at the drive member interface such that the drive transmission member interfaces with the laminated salient poles and fixes the laminated salient poles to the drive transmission member. 14. The transport, apparatus of claim 13, wherein the laminated salient poles are fixed to the drive transmission member so that the laminated salient poles are arranged axially relative to the drive transmission member. 15. The transport apparatus of claim 13, wherein the laminated salient poles are fixed to the drive transmission member so that the laminated salient poles are arranged radially relative to the drive transmission member. 16. The transport apparatus of claim 1, wherein the drive includes a z-axis drive motor connected to the housing. 17. A transport apparatus comprising: a housing;a drive mounted to the housing; andat least one transport arm connected to the drive;where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and being located within an isolated environment;at least one stator having salient stator poles with respective coil units and being located outside the isolated environment;at least one salient stator pole extension disposed within the isolated environment and aligned with a respective salient stator pole so that the at least one salient stator pole extension and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one stator and the at least one rotor; andat least one seal disposed between each salient stator pole drill a respective salient stator pole extension where the at least one seal and each stator extension are arranged so that the stator pole extension and the at least one seal are both configured to isolate the isolated environment. 18. The transport apparatus of claim 17, wherein the drive further includes a seal support member having an inner surface disposed in the isolated environment and an outer surface facing away from the isolated environment, where the at least one seal is disposed on or adjacent the outer surface and the seal support surface is configured to structurally support the at least one seal. 19. The transport apparatus of claim 18, wherein the seal support member is configured to house the at least one salient stator pole extension. 20. The transport apparatus of claim 17, wherein the at least one stator and the at least one rotor form stacked motors and the at least one seal is common to each of the stacked motors. 21. The transport apparatus of claim 17, wherein the at least one stator and the at least one rotor form a stack of motors and the at least one seal includes a seal for each motor that is distinct from seals of other motors in the stack of motors. 22. The transport apparatus of claim 17, wherein the at least one salient stator pole extension and the at least one rotor are positioned such that the at least one salient stator pole extension and the at least one rotor have an obstructionless interface. 23. The transport apparatus of claim 17, wherein each stator and respective rotor form a motor module configured to be stacked with other motor modules. 24. The transport apparatus of claim 17, wherein the drive is configured as an axial flux flow drive or a radial flux flow drive. 25. The transport apparatus of claim 17, wherein the at least one rotor includes laminated salient poles. 26. The transport apparatus of claim 25 wherein the at least one rotor includes a drive member interface, and the drive further includes a drive transmission member interfaced with the at least one rotor at the drive member interface such that the drive transmission member interfaces with the laminated salient poles and fixes the laminated salient poles to the drive transmission member. 27. The transport apparatus of claim 26, wherein the laminated salient poles are fixed to the drive transmission member so that the laminated salient poles are arranged axially relative to the drive transmission member. 28. The transport apparatus of claim 26, wherein the laminated salient poles are fixed to the drive transmission member so that the laminated salient poles are arranged radially relative to the drive transmission member. 29. The transport apparatus of claim 17, wherein the at least one stator includes laminated salient poles. 30. The transport apparatus of claim 17, wherein the drive includes a z-axis drive motor connected to the housing. 31. The transport apparatus of claim 17, further comprising at least one reluctance based encoder track disposed on each of the at least one rotor and at least one reluctance based position feedback sensor configured to interface with the at least one reluctance based encoder track. 32. The transport apparatus of claim 17, wherein the at least one rotor is coupled to a coaxial drive shaft arrangement for driving the at least one transport arm. 33. A transport apparatus comprising: a housing;a drive mounted to the housing; andat least one transport arm connected to the drive;where the drive includes at least one rotor having at least one salient pole of magnetic permeable material;at least one stator including a stator core;a salient top plate;a salient bottom plate; anda coil unit associated with each salient top and bottom plate pair;where the salient top plate and salient bottom plate are connected to and spaced apart by the stator core and configured to interface with the at least one salient pole of the at least one rotor to form a closed magnetic flux circuit between the at least one stator and the at least one rotor; andan isolation wall disposed between the salient top plate and salient bottom plate where the isolation wall is configured to isolate the stator core from an isolated environment in which the at least one transport arm operates. 34. A transport apparatus comprising: a housing;a drive mounted to the housing; andat least one transport arm connected to the drive;where the drive includes at least one laminated rotor having laminated salient poles of magnetic permeable material disposed in an isolated environment where the at least one laminated rotor is isolated from the isolated environment;at least one stator having at least one salient pole with respective coil units disposed outside the isolated environment such that the laminated salient poles of the at least one laminated rotor and the at least one salient pole of the at least one stator form a closed magnetic flux circuit between the at least one stator and the at least one rotor; andat least one seal disposed relative to the at least one salient pole of the at least one stator such that the at least one seal and the at least one salient pole are both configured to isolate the isolated environment. 35. The transport apparatus of claim 34, wherein the at least one laminated rotor includes a drive member interface and the drive further includes a drive transmission member interfaced with the at least one laminated rotor at the drive member interface such that the drive transmission member interfaces with the laminated salient poles and fixes the laminated salient poles to the drive transmission member. 36. The transport apparatus of claim 35, wherein the laminated salient poles are fixed to the drive transmission member so that the laminated salient poles are arranged axially relative to the drive transmission member. 37. The transport apparatus of claim 35, wherein the laminated salient poles are fixed to the drive transmission member so that the laminated salient poles are arranged radially relative to the drive transmission member. 38. The transport apparatus of claim 34, wherein the at least one laminated rotor is embedded in an insulator that is configured to isolate the at least one laminated rotor from the isolated environment. 39. The transport apparatus of claim 34, wherein the at least one seal is integral to the at least one stator. 40. The transport apparatus of claim 34, wherein the at least one seal comprises a membrane mounted to the at least one stator. 41. The transport apparatus of claim 34, wherein the at least one seal depends from the at least one stator. 42. The transport apparatus of claim 34, wherein the at least one stator structurally supports the at least one seal. 43. The transport apparatus of claim 34, wherein the at least one seal conforms to a shape of the at least one stator. 44. The transport apparatus of claim 34, wherein the at least one stator includes a stator core, a top plate and a bottom plate where the top plate and bottom plate form a salient pole and are connected to and spaced apart by the stator core and configured to interface with the at least one laminated rotor, and the at least one seal is between the top plate and bottom plate and configured to isolate the stator core from an isolated environment in which the at least one transport arm operates. 45. The transport apparatus of claim 34, wherein the drive further includes at least one salient stator pole extension disposed within the isolated environment and aligned with a respective salient pole of the stator, where the at least one seal is disposed between each salient pole of the stator and a respective salient stator pole extension. 46. The transport apparatus of claim 45, wherein the drive further includes a seal support member having an inner surface disposed in the isolated environment and an outer surface facing away from the isolated environment, where the at least one seal is disposed on or adjacent the outer surface and the seal support surface is configured to structurally support the at least one seal. 47. The transport apparatus of claim 46, wherein the seal support member is configured to house the at least one salient stator pole extension.
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