[특허]Flow control system, method, and apparatus

Flow control system, method, and apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	F16K-031/02 G01F-001/36 F16K-037/00 F16K-047/08 F16K-027/00 G01F-001/88 G01F-015/00 G05D-007/06
출원번호	US-0087130 (2016-03-31)
등록번호	US-9958302 (2018-05-01)
발명자 / 주소	Mudd, Daniel T. Mudd, Patti J.
출원인 / 주소	RENO TECHNOLOGIES, INC.
대리인 / 주소	The Belles Group, P.C.
인용정보	피인용 횟수 : 0 인용 특허 : 172

초록 ▼

In one embodiment, a control apparatus for delivery of a process gas includes an inlet conduit; a valve operably coupled to the inlet conduit and alterable between an open condition and a closed condition, the valve having a first conductance and being downstream of the inlet conduit; a characterized restrictor operably coupled to the valve, the characterized restrictor having a second conductance and being downstream of the valve; and an outlet conduit operably coupled to the characterized restrictor and being downstream of the characterized restrictor; wherein a ratio of the first conductance to the second conductance is 10:1 or higher.

대표청구항 ▼

1. A control apparatus for delivery of a process gas, comprising: a substrate block comprising an inlet conduit and an outlet conduit;a valve operably coupled to the substrate block, the valve comprising a valve body, a valve seat, and a poppet assembly, the valve fluidly coupled to the inlet conduit and alterable between an open condition and a closed condition, the valve being downstream of the inlet conduit;a characterized restrictor located within the valve body and fluidly coupled to the valve; anda proportional valve fluidly coupled to the inlet conduit and positioned between the inlet conduit and the valve;wherein the outlet conduit is fluidly coupled to the valve and downstream of the valve such that the proportional valve and the valve are arranged in series with the inlet conduit and the outlet conduit; andwherein the control apparatus is configured to deliver a desired flow rate to the outlet conduit. 2. The control apparatus according to claim 1 wherein, in the closed condition, a volume exists between the valve seat and the characterized restrictor, the volume being 0.02 cc or less. 3. The control apparatus according to claim 1 wherein the valve is an on-off valve. 4. The control apparatus according to claim 1 further comprising a pressure measurement device configured to measure a pressure of the process gas upstream of the characterized restrictor. 5. The control apparatus according to claim 1 wherein the control apparatus is free of any device between the characterized restrictor and the valve seat. 6. The control apparatus according to claim 1, wherein the characterized restrictor is downstream of the valve. 7. The control apparatus according to claim 1 wherein the control apparatus is free of any device between the valve and the outlet conduit. 8. The control apparatus according to claim 1 wherein the valve seat is upstream of the characterized restrictor. 9. The control apparatus according to claim 1 wherein the characterized restrictor is upstream of the valve seat. 10. The control apparatus according to claim 1 wherein the proportional valve has a variable restriction that is configured to be controlled by an amplitude modulated signal. 11. The control apparatus according to claim 1 wherein the proportional valve has a valve body. 12. The control apparatus according to claim 11 wherein the valve body of the proportional valve is separately formed from the substrate block and the valve body of the valve. 13. A control apparatus for delivery of a process gas, comprising: a substrate block comprising an inlet conduit and an outlet conduit;a proportional valve fluidly coupled to the inlet conduit, the proportional valve comprising a first valve body, a valve seat, and a closure member, the proportional valve configured to provide a variable restriction across the valve seat and the closure member, and the proportional valve being downstream of the inlet conduit;an on-off valve fluidly coupled to the inlet conduit and alterable between an open condition and a closed condition, the on-off valve having a second valve body, a valve seat, and a closure member, the on-off valve being downstream of the proportional valve;a characterized restrictor fluidly coupled to the second valve and located within the second valve body; andwherein the outlet conduit is fluidly coupled to the characterized restrictor and downstream of the characterized restrictor. 14. The control apparatus according to claim 13 wherein the closure member of the proportional valve is configured to vary its position relative to the valve seat of the proportional valve in response to an amplitude of a control signal. 15. The control apparatus according to claim 14 wherein the closure member of the on-off valve is configured to be controlled by a pulse width modulated signal. 16. The control apparatus according to claim 13 further comprising a pressure transducer, the pressure transducer mounted to the first valve body. 17. The control apparatus according to claim 13 wherein the variable restriction of the proportional valve is configured to be controlled by an amplitude modulated signal. 18. A control apparatus for delivery of a process gas, comprising: a substrate block comprising an inlet conduit and an outlet conduit; a proportional valve having a first valve body operably coupled to the substrate block and fluidly connected to the inlet conduit; a valve having a second valve body operably coupled to the substrate block, the valve fluidly coupled to the proportional valve, the valve being downstream of the inlet conduit and the proportional valve; a characterized restrictor located within the second valve body and fluidly coupled to the valve; and wherein the outlet conduit is fluidly coupled to the valve and downstream of the valve. 19. The control apparatus according to claim 18 wherein the valve has a first conductance and the characterized restrictor has a second conductance, wherein the ratio of the first conductance to the second conductance is 10:1 or higher.

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Chmura ; William J., Sintered ball valve.
상세보기
Chakrabarty Tapantosh,CAX ; Mainak Ghosh,CAX, Slurry hydroprocessing.
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Mudd, Daniel T., Small internal volume fluid mass flow control apparatus.
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Maxson William R., Solenoid pressure transducer.
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Cripps, Brian M.; Mudge, Dennis; Wilson, Kevin, Solenoid valve.
상세보기
Buchanan, Daryl; Tariq, Faisal; Mei, Hai; Tison, Stuart, System and method for producing and delivering vapor.
상세보기
Redemann, Eric J.; Wang, Chiun; Maginnis, Thomas Owen, System for and method of providing a wide-range flow controller.
상세보기
Mendelson, Jay; Dille, Joseph C.; Kehoe, Anthony B.; Whiteley, Jeffrey L.; Berger, Todd; Robertson, III, Walter Dennis, System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor.
상세보기
Bump Scott S. ; Campbell Gary P. ; Dille Joseph C., Thermal mass flowmeter and mass flow controller, flowmetering system and method.
상세보기
Linthorst, Eric J., Tunable ramp rate circuit for a mass flow controller.
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Davis Christopher B. (Suffield CT), Ultra-high efficiency porous metal filter.
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Ding, Junhua; Zarkar, Kaveh, Upstream volume mass flow verification systems and methods.
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Feldman, Joel; Sulcs, Peter; Zeiler, Daniel E.; Hayes, II, Charles W.; Hasak, David; Waller, Yancy J., Valve actuator with vent.
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Robertson, III, Walter Dennis; McNichols, Thomas John; Kramer, Stephen R., Valve assembly.
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Powers Kelly B. (Salt Lake City UT), Valve body ceramic liners.
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Hekkert Ydo M. (Oudewater NLX) Verduyn Hendrik A. (Krimpen a/d Ijssel NLX), Valve provided with sound-reducing means.
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Brown,Ronnie; DeLisio,Carmen J.; Scheffel,Gary; Stedman,David; Timko,Jared, Valve with adjustable stop.
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Ginn LeRoy D. (15247 Laverne Ct. San Leandro CA 94579) Ginn LeRoyce S. (1749 Kappa Ave. San Leandro CA 94579) Schneider Karen B. (Berkeley CA), Variable gas volume flow measuring and control methods and apparatus.
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Ciobanu Calin Ion ; Schaeffer Donald, Variable orifice flow sensor.
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Thordarson, Petur; Lowery, Patrick A., Variable pressure regulated flow controllers.
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Seale Joseph B. (Gorham ME), Variable-pulse dynamic fluid flow controller.
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Shambayati Ali (Tucson AZ), Wide-range laminar flowmeter.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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