Versatile holder for treating the surface of rod-shaped substrates
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B23P-019/10
C23C-014/02
C23C-014/04
C23C-014/50
H01J-037/32
출원번호
US-0888277
(2014-04-24)
등록번호
US-10072326
(2018-09-11)
우선권정보
DE-10 2013 007 454 (2013-05-02)
국제출원번호
PCT/EP2014/001091
(2014-04-24)
국제공개번호
WO2014/177254
(2014-11-06)
발명자
/ 주소
Siebert, Max
Vogel, Remo
Jotz, Karl Wolfgang
출원인 / 주소
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
대리인 / 주소
Notaro, Michalos & Zaccaria P.C.
인용정보
피인용 횟수 :
0인용 특허 :
10
초록▼
A holder for securing at least one rod-shaped substrate body having a variable cross-section along the substrate body has a substrate body region BQ1 comprising a surface to be treated. The holder comprises at least one perforated wall as the front wall, the wall having at least one opening, and als
A holder for securing at least one rod-shaped substrate body having a variable cross-section along the substrate body has a substrate body region BQ1 comprising a surface to be treated. The holder comprises at least one perforated wall as the front wall, the wall having at least one opening, and also comprises a support element and a retaining element. The support element is constructed and/or secured in the opening in such a way that at least part of the substrate body can be arranged longitudinally and obliquely in the support element and the retaining element is constructed and/or secured in the opening in such a way that the retaining element can retain the substrate body at a point between the region BQ1 and the remainder of the substrate body such that the region BQ1 protrudes from the holder through the opening.
대표청구항▼
1. Holder for fastening at least one rod-shaped body (10) with variable section along the substrate body and a surface to be treated, which is located in an area BQ1 of the substrate body (10) comprising an end of the substrate body (10) and a smaller cross-section than the rest of the substrate bod
1. Holder for fastening at least one rod-shaped body (10) with variable section along the substrate body and a surface to be treated, which is located in an area BQ1 of the substrate body (10) comprising an end of the substrate body (10) and a smaller cross-section than the rest of the substrate body (10), wherein the holder comprises at least one perforated wall as a front wall (3), which is provided with at least one opening (5) wherein the holder comprises at least one support element (9) and a retaining element (11), which are arranged at an opening (5), wherein: the support element (9) is constructed or secured in such a way to the opening (5), that the substrate body may be at least partially disposed oblique at an inclination angle α to the horizontal alongside in the support element (9), andthe retaining element (11) is constructed or secured in such a way to the opening (5) that the retaining element (11) can stop the substrate body at a position between the area BQ1 and the remainder of the substrate body in such a way that the area BQ1 projects through the opening (5) from the holder, wherein the angle of inclination α to the horizontal is greater than 2°. 2. Holder according to claim 1, characterized in that, preferably 5°≤α≤20°. 3. Holder according claim 1, characterized in that the supporting member (9) is elongate and has two ends, one end of the support element (9) being close to the front wall (3) or on the front wall (3) and the other end distant from the front wall (3). 4. Holder according to claim 3, characterized in that the holder comprises at least two support elements (9) for attachment of at least two substrate members (10) which are arranged parallel in the vertical plane or incisive in the horizontal plane, wherein the distance in the horizontal plane between the support elements (9) is greater with respect to the close to the front wall (3) lying areas compared to the distant from the front wall (3) areas, thereby also the distance in the horizontal plane between the substrate members (10) is greater with respect to the close to the front wall (3) lying areas compared to the distant from the front wall (3) areas. 5. Holder according to claim 4, characterized in that the holder comprises at least a second perforated wall, distant by a spacing from the front wall (3), is provided with at least one opening (5′) and being arranged as a supporting wall (13) for the supporting members (9) in the holder such that at least a part of one of the support elements (9) is supported by an opening (5′). 6. Holder according to claim 5, characterized in that the second perforated wall is provided with an array of openings (5″), the number of openings (5′) in the array of openings (5″) of the supporting wall (13) corresponds to the number of openings in the array of openings (5) of the front wall (3), and the support wall (13) is arranged in the holder in such a way that each supporting member (9) at the same time is supported by an opening (5) and an opening (5′). 7. Holder according to claim 6, characterized in that the supporting wall (13) in the holder is arranged parallel with respect to the front wall (3), or the array of openings (5″), or to the front wall (3) and the array of openings (5″) and is designed such that in the vertical plane, each opening of the arrangement of openings (5′) is arranged above the opening of the corresponding array of openings (5), or in the horizontal plane, the distance between the openings of the array of openings (5′) in the support wall(13) is smaller than the distance between the openings of the array of openings (5) in the front wall (3). 8. Holder according to claim 1, characterized in that the retaining elements (11) are made in the form of a front cover mask (17) having an array of openings (5″′). 9. Holder according to claim 5, characterized in that the holder comprises composite elements (15), with the aid of which the position of the front wall (3) in relation to the position of the support wall (13) is secured. 10. Holder according to claim 9, characterized in that the composite elements (15) are walls which form together with the rest of the holder a compartment cartridge (20). 11. Holder according to claim 1, characterized in that the holder is loaded with at least one substrate body (10) in such a way that the area BQ1 of the substrate body (10) is projecting through one of the openings (5) of the front wall (3) of the holder and thereby as well the surface to be treated of the substrate. 12. Holder according to claim 11, characterized in that the holder comprises a cover as a coating protective cover (40) which shade the spaces of the substrate body (10) which do not protrude through the opening (5) of the front wall (3) wherein the cover (40) is formed as an open box or a hood which is adapted to be pushed over from the side of the support wall (13). 13. Holder according to claim 11, characterized in that the holder comprises a cover as a transport protection cover (50), which covers the areas of the substrate body (10) protruding through the opening (5) of the front wall (3), wherein the protection cover (50) is formed as an open box or a hood which is adapted to be pushed over from the side of the cover mask (17).
Hirvonen James K. (Rockport MA) Wittkower Andrew B. (Rockport MA) Denholm A. Stuart (Sherman CT), Method and apparatus for controlling article temperature during treatment in vacuum.
Feucht Mark A. (Champlin MN) Klein Harold S. (Wayzata MN) Thorud Stanley R. (Plymouth MN) Siedlecki Mark (Chicago IL) Pis Andy (Chicago IL) Toscano Tony (Arlington Hgts. IL) Perea Mario (Naperville I, Organizer cabinet.
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