[미국특허]
Conductivity enhancement of solar cells
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-031/0224
H01L-031/068
H01L-031/18
출원번호
US-0211353
(2014-03-14)
등록번호
US-10074753
(2018-09-11)
발명자
/ 주소
Zhu, Xi
출원인 / 주소
SunPower Corporation
대리인 / 주소
Schwabe, Williamson & Wyatt, P.C.
인용정보
피인용 횟수 :
0인용 특허 :
4
초록▼
Methods and structures for forming a contact region on a solar cell are presented. The solar cell can have a front side which faces the sun during normal operation, and a back side opposite the front side and a silicon substrate. The silicon substrate can include at least one doped region a dielectr
Methods and structures for forming a contact region on a solar cell are presented. The solar cell can have a front side which faces the sun during normal operation, and a back side opposite the front side and a silicon substrate. The silicon substrate can include at least one doped region a dielectric layer formed over the doped region. The solar cell can also include a first metal contact, such as an electrolessly plated metal contact, within a contact region through a first dielectric layer and on the doped region. The solar cell can include a printed metal, such as aluminum, formed or deposited on the first metal contact. The solar cell can include a first metal layer having a first metal contact and the first printed metal. The solar cell can include a second metal layer, such as an electrolytically electroplated metal layer, formed on the first metal layer.
대표청구항▼
1. A method for forming a contact region on a solar cell, the solar cell having a front side which faces the sun during normal operation, and a back side opposite the front side, the method comprising: forming at least one contact opening through a first dielectric layer and over a silicon substrate
1. A method for forming a contact region on a solar cell, the solar cell having a front side which faces the sun during normal operation, and a back side opposite the front side, the method comprising: forming at least one contact opening through a first dielectric layer and over a silicon substrate of the solar cell, the silicon substrate having at least one doped region;electrolessly plating a first metal contact over at least one contact opening;forming a first metal paste over the first metal contact, the first metal paste having a thickness of at least 0.5 microns;curing the first metal paste to form a first metal layer;heating the first metal contact, first metal layer and the silicon substrate to a temperature of at least 550° C.;electrolyticaly plating a second metal layer on the first metal layer, wherein the first metal contact and first metal layer electrically couple the second metal layer to at least one doped region; andsubsequent to electrolyticaly plating the second metal layer on the first metal layer, electrolyticaly plating a third metal layer on the second metal layer. 2. The method of claim 1, wherein forming at least one contact opening comprises performing a method selected from the group consisting of wet-etching and laser ablation. 3. The method of claim 1, wherein electrolessly plating the first metal contact comprises electrolessly plating a metal selected from the group consisting of nickel, gold, silver, rhodium, chromium, zinc, tin and cadmium. 4. The method of claim 1, wherein forming the first metal paste comprises screen printing the first metal paste. 5. The method of claim 1, wherein the forming a first metal paste comprises depositing an aluminum paste. 6. The method of claim 1, wherein heating the first metal contact, first metal layer and the silicon substrate comprises annealing the first metal contact, first metal layer and the silicon substrate. 7. The method of claim 1, wherein electrolyticaly plating the second metal layer comprises electrolyticaly plating a metal selected from the group consisting of copper, tin, aluminum, silver, gold, chromium, iron, nickel, zinc, ruthenium, palladium, and platinum. 8. A method for forming a contact region on a solar cell, the solar cell having a front side which faces the sun during normal operation, and a back side opposite the front side, the method comprising: forming at least one contact opening through a first dielectric layer over a silicon substrate of the solar cell, the silicon substrate having at least one doped region;electrolessly plating at least one nickel contact over at least one contact opening;depositing an aluminum paste above at least one contact opening, the aluminum paste having a thickness of at least 0.5 microns;curing the aluminum paste to form a layer of aluminum;annealing at least one nickel contact, layer of aluminum and the silicon substrate to a temperature of at least 550° C.;electrolyticaly plating a second metal layer on the layer of aluminum, wherein the at least one nickel contact and layer of aluminum electrically couple the second metal layer to at least one doped region; andsubsequent to electrolyticaly plating the second metal layer on the layer of aluminum, electrolyticaly plating a third metal layer on the second metal layer. 9. The method of claim 8, wherein forming at least one contact opening through the first dielectric layer comprises performing a method selected from the group consisting of wet-etching and laser ablation. 10. The method of claim 8, wherein forming the first metal paste comprises screen printing the first metal paste. 11. The method of claim 8, wherein electrolyticaly plating the second metal layer comprises electrolyticaly plating a metal selected from the group consisting of copper, tin, aluminum, silver, gold, chromium, iron, nickel, zinc, ruthenium, palladium, and platinum. 12. The method of claim 8, wherein the at least one nickel contact, layer of aluminum and first metal layer electrically couple the third metal layer to at least one doped region. 13. A method for forming a contact region on a solar cell, the solar cell having a front side which faces the sun during normal operation, and a back side opposite the front side, the method comprising: forming at least one contact opening through a first dielectric layer and over a silicon substrate of the solar cell, the silicon substrate having at least one doped region;electrolessly plating a first metal contact over at least one contact opening;forming a first metal paste over the first metal contact, wherein forming the first metal paste comprises screen printing the first metal paste, the first metal paste having a thickness of at least 0.5 microns;curing the first metal paste to form a first metal layer;heating the first metal contact, first metal layer and the silicon substrate, wherein heating the first metal contact, first metal layer and the silicon substrate comprises annealing the first metal contact, first metal layer and the silicon substrate to a temperature of at least 550° C.;electrolyticaly plating a second metal layer on the first metal layer, wherein the first metal contact and first metal layer electrically couple the second metal layer to at least one doped region; andsubsequent to electrolyticaly plating the second metal layer on the first metal layer, electrolyticaly plating a third metal layer on the second metal layer. 14. The method of claim 13, wherein forming at least one contact opening comprises performing a method selected from the group consisting of wet-etching and laser ablation. 15. The method of claim 13, wherein electrolessly plating the first metal contact comprises electrolessly plating a metal selected from the group consisting of nickel, gold, silver, rhodium, chromium, zinc, tin and cadmium.
Mulligan,William P.; Cudzinovic,Michael J.; Pass,Thomas; Smith,David; Kaminar,Neil; McIntosh,Keith; Swanson,Richard M., Solar cell and method of manufacture.
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