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A method and apparatus for cleaning a process chamber are provided. In one embodiment, a process chamber is provided that includes a remote plasma source and a process chamber having at least two processing regions. Each processing region includes a substrate support assembly disposed in the process

A method and apparatus for cleaning a process chamber are provided. In one embodiment, a process chamber is provided that includes a remote plasma source and a process chamber having at least two processing regions. Each processing region includes a substrate support assembly disposed in the processing region, a gas distribution system configured to provide gas into the processing region above the substrate support assembly, and a gas passage configured to provide gas into the processing region below the substrate support assembly. A first gas conduit is configured to flow a cleaning agent from the remote plasma source through the gas distribution assembly in each processing region while a second gas conduit is configured to divert a portion of the cleaning agent from the first gas conduit to the gas passage of each processing region.

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1. A valve for selectively controlling flow between a first gas conduit and a second gas conduit, comprising: a valve body;a first magnet encased in the valve body;a movable flapper housed by the valve body, wherein the flapper comprises: a flow-obstructing plate;an outer body attached to the flow-o

1. A valve for selectively controlling flow between a first gas conduit and a second gas conduit, comprising: a valve body;a first magnet encased in the valve body;a movable flapper housed by the valve body, wherein the flapper comprises: a flow-obstructing plate;an outer body attached to the flow-obstructing plate, the outer body including a first end and a second end; anda second magnet encased in the flapper,wherein, the flow obstructing plate extends from the second end of the outer body, the second end of the outer body including a plurality of depressions formed therein to engage with projections from a bearing disposed between the outer body and the valve body, and the first end of the outer body has a recess, a cap is inserted in the recess, the cap including a cross-hole formed perpendicularly to a centerline of the flapper, and one or more drive magnets are captured in the cross-hole; anda coupling mechanism disposed outside the valve body operable to rotate the outer body and the flow-obstructing plate about the centerline of the flapper so that the flapper rotates between a first position where the flow-obstructing plate blocks flow through the valve body and a second position where the flow-obstructing plate allows flow through the valve body,wherein the first magnet and the second magnet form a pair of repelling magnets to levitate the flapper within the valve body. 2. The valve of claim 1, wherein the coupling mechanism is configured to rotate the flapper through magnetic interaction. 3. The valve of claim 1, wherein the first magnet is disposed in a wall of the valve body, the second magnet is encased in an end of the flow-obstructing plate, and the first and second magnets form a bearing interfacing between the end of the flow-obstructing plate and the wall of the valve body to facilitate rotation of the flapper. 4. The valve of claim 1, wherein the flow-obstructing plate and the outer body are a single undivided body. 5. The valve of claim 4, wherein the flow-obstructing plate and the outer body are made of aluminum. 6. The valve of claim 1, wherein the coupling mechanism includes two magnetized end portions, and magnetic attraction between the magnetized end portions and opposite poles of the one or more drive magnets causes the flapper to rotate. 7. The valve of claim 6, wherein the coupling mechanism includes a U-shape body having the two magnetized end portions. 8. The valve of claim 1, wherein the flow-obstructing plate has a first end connected to the outer body and a second end connected to a disk. 9. A valve for selectively controlling flow between a first gas conduit and a second gas conduit, comprising: a valve body;a flapper housed by the valve body, wherein the flapper is operable to rotate about a centerline of the flapper in the valve body between a first position where the flapper blocks flow through the valve body and a second position where the flapper allows flow through the valve body;a first magnet encased in the valve body;a second magnet encased in the flapper, wherein the first magnet and the second magnet form a pair of repelling magnets to levitate the flapper along the centerline within the valve body;a coupling mechanism disposed outside the valve body to rotate the flapper through magnetic interaction,wherein the flapper comprises: a flow-obstructing plate; andan outer body attached to the flow-obstructing plate, the outer body including a first end and a second end, wherein the outer body interacts with the coupling mechanism,wherein the flow-obstructing plate extends from the second end of the outer body, the second end of the outer body includes a plurality of depressions formed therein to engage with projections from a bearing disposed between the outer body and the valve body, the first end of the outer body has a recess, a cap is inserted in the recess, the cap includes a cross-hole formed perpendicularly to the centerline of the flapper, and one or more drive magnets are captured in the cross-hole. 10. The valve of claim 9, wherein the flow-obstructing plate and the outer body are a single undivided body. 11. The valve of claim 10, wherein the flow-obstructing plate and the outer body are made of aluminum. 12. The valve of claim 9, wherein the coupling mechanism includes two magnetized end portions, and magnetic attraction between the magnetized end portions and opposite poles of the one or more drive magnets causes the flapper to rotate. 13. The valve of claim 12, wherein the coupling mechanism includes a U-shape body having the two magnetized end portions. 14. The valve of claim 9, wherein the flow-obstructing plate has a first end connected to the outer body and a second end connected to a disk.