A thermal sensing device comprises a substrate, a first insulating layer, at least one first sensing resistor, at least one second sensing resistor, a plurality of etching holes and a cavity. The first insulating layer is disposed on the substrate. The first sensing resistor is disposed above the fi
A thermal sensing device comprises a substrate, a first insulating layer, at least one first sensing resistor, at least one second sensing resistor, a plurality of etching holes and a cavity. The first insulating layer is disposed on the substrate. The first sensing resistor is disposed above the first insulating layer. The second sensing resistor is disposed above the first insulating layer and isolated from the at least one first sensing resistor. The etching holes are disposed around the at least one first sensing resistor and the at least one second sensing resistor. The cavity is formed below the at least one first sensing resistor and the at least one second sensing resistor. The thermal sensing device is implemented in a measurement circuit to improve the problem that the signal becomes smaller when the sensing element is minimized.
대표청구항▼
1. A thermal sensing device, comprising: a substrate;a first insulating layer disposed on the substrate;at least one first sensing resistor disposed above the first insulating layer;at least one second sensing resistor disposed above the first insulating layer;a plurality of etching holes disposed a
1. A thermal sensing device, comprising: a substrate;a first insulating layer disposed on the substrate;at least one first sensing resistor disposed above the first insulating layer;at least one second sensing resistor disposed above the first insulating layer;a plurality of etching holes disposed around the at least one first sensing resistor and the at least one second sensing resistor;a cavity formed below the at least one first sensing resistor and the at least one second sensing resistor;wherein the thermal sensing device is implemented in a measurement circuit, the measurement circuit includes a first resistor, a second resistor, a third resistor, and a fourth resistor, and the at least one first sensing resistor and the at least one second sensing resistor are respectively implemented to be at least two of the first resistor, the second resistor, the third resistor, and the fourth resistor of the measurement circuit. 2. The thermal sensing device as claimed in claim 1, further comprising: a second insulating layer covering a portion of the first insulating layer, the at least one first sensing resistor, and the at least one second sensing resistor. 3. The thermal sensing device as claimed in claim 1, further comprising: a plurality of electrical connecting wires disposed on the first insulating layer and configured to electrically connect the at least one first sensing resistor and the at least one second sensing resistor with an external circuit. 4. The thermal sensing device as claimed in claim 1, further comprising: a third insulating layer covering the at least one first sensing resistor and a portion of the first insulating layer. 5. The thermal sensing device as claimed in claim 1, wherein the measurement circuit is a Wheatstone Bridge circuit, and the first resistor and the second resistor of the measurement circuit are connected in series between a voltage difference of an operating voltage and a ground point, and the third resistor and the fourth resistor are connected in series between the voltage difference of the operating voltage and the ground point, and the first resistor and the second resistor in series are further connected in parallel with the third resistor and the fourth resistor in series. 6. The thermal sensing device as claimed in claim 5, wherein both the quantities of the at least one first sensing resistor and the at least one second sensing resistor are one, and both of the at least one first sensing resistor and the at least one second sensing resistor have positive temperature coefficient of resistance and are implemented respectively to be the second resistor and the third resistor or respectively to be the first resistor and the fourth resistor in the measurement circuit. 7. The thermal sensing device as claimed in claim 5, wherein both the quantities of the at least one first sensing resistor and the at least one second sensing resistor are one, and both of the at least one first sensing resistor and the at least one second sensing resistor have negative temperature coefficient of resistance and are implemented respectively to be the second resistor and the third resistor or respectively to be the first resistor and the fourth resistor in the measurement circuit. 8. The thermal sensing device as claimed in claim 5, wherein both the quantities of the at least one first sensing resistor and the at least one second sensing resistor are one, one of the at least one first sensing resistor and the at least one second sensing resistor has positive temperature coefficient of resistance and the other one of the at least one first sensing resistor and the at least one second sensing resistor has negative temperature coefficient of resistance, and the at least one first sensing resistor and the at least one second sensing resistor are implemented respectively to be the third resistor and the fourth resistor, respectively to be the third resistor and the first resistor, respectively to be the second resistor and the first resistor, or respectively to be the second resistor and fourth resistor in the measurement circuit. 9. The thermal sensing device as claimed in claim 5, wherein the at least one first sensing resistor and the at least one second sensing resistor respectively have positive temperature coefficient of resistance and negative temperature coefficient of resistance, the number of the at least one first sensing resistor is two and the number of the at least one second sensing resistor is one, and the at least one first sensing resistor is implemented to be the second resistor and the third resistor of the measurement circuit and the at least one second sensing resistor is implemented to be the first resistor or the fourth resistor of the measurement circuit, or the at least one first sensing resistors are implemented to be the first resistor and the fourth resistor of the measurement circuit and the at least one second sensing resistor is implemented to be the second resistor or the third resistor of the measurement circuit. 10. The thermal sensing device as claimed in claim 5, wherein the at least one first sensing resistor and the at least one second sensing resistor respectively have positive temperature coefficient of resistance and negative temperature coefficient of resistance, the number of the at least one first sensing resistor is one and the number of the at least one second sensing resistor is two, and the at least one first sensing resistor is implemented to be the second resistor or the third resistor of the measurement circuit and the at least one second sensing resistor is implemented to be the first resistor and the fourth resistor of the measurement circuit, or the at least one first sensing resistor is implemented to be the first resistor or the fourth resistor of the measurement circuit and the at least one second sensing resistor is implemented to be the second resistor and the third resistor of the measurement circuit. 11. The thermal sensing device as claimed in claim 5, wherein the at least one first sensing resistor and the at least one second sensing resistor respectively have positive temperature coefficient of resistance and negative temperature coefficient of resistance, the number of the at least one first sensing resistor is two and the number of the at least one second sensing resistor is two, and the at least one first sensing resistor is implemented to be the second resistor and the third resistor of the measurement circuit and the at least one second sensing resistor is implemented to be the first resistor and the fourth resistor of the measurement circuit, or the at least one first sensing resistors are implemented to be the first resistor and the fourth resistor of the measurement circuit and the at least one second sensing resistors are implemented to be the second resistor and the third resistor of the measurement circuit.
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Streczyn Michael (1218 Junipero Redwood City CA 94061) Loughlin Joseph B. (20701 Beach Blvd. ; Space 231 Huntington Beach CA 92648), Alarm circuit for detecting overheated condition.
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