초록

Provided herein are methods, systems, and devices for the vapor phase delivery of high purity process gases to a critical process or application.

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1. A method comprising: (a) providing a non-aqueous solution comprising a process chemical and a solvent in a device configured to contain a liquid and a vapor phase, wherein the non-aqueous solution has a vapor phase comprising an amount of anhydrous vapor of the process chemical;(b) contacting a c

1. A method comprising: (a) providing a non-aqueous solution comprising a process chemical and a solvent in a device configured to contain a liquid and a vapor phase, wherein the non-aqueous solution has a vapor phase comprising an amount of anhydrous vapor of the process chemical;(b) contacting a carrier gas or vacuum with the vapor phase to form a gas stream; and(c) delivering the gas stream comprising the anhydrous vapor to a critical process or application,wherein the process chemical is hydrazine and wherein the solvent is selected from the group consisting of ethylene glycol, triethylene glycol, α-propylene glycol, β-propylene glycol, 1,3-Dimethyl-3,4,5,6-tetrahydro-2(1H)-pyrimidinone (DMPU), 1,3-Dimethyl-2-imidazolidinone (DMEU), and tetramethylurea. 2. The method of claim 1, further comprising changing the concentration of at least one component of the vapor phase by changing at least one of the following parameters: (a) the temperature of the non-aqueous solution, (b) the pressure of the non-aqueous solution, (c) the concentration of the non-aqueous solution, (d) the temperature of the carrier gas, (e) the pressure of the carrier gas or vacuum, and (f) the flow rate of the carrier gas. 3. The method of claim 1, wherein at least one membrane is disposed in the device, the membrane being configured to at least partially separate the vapor phase from the non-aqueous solution. 4. The method of claim 3, wherein the anhydrous vapor permeates the membrane at a faster rate than any other component of the non-aqueous solution. 5. The method of claim 3, wherein the membrane is an ion exchange membrane. 6. The method of claim 1, further comprising removing contaminants from the gas stream. 7. The method of claim 1, wherein the carrier gas is selected from the group consisting of nitrogen, argon, hydrogen, clean dry air, helium, and ammonia. 8. The method of claim 1, further comprising changing the concentration of at least one component of the vapor phase by adding energy to the non-aqueous solution. 9. The method of claim 1, wherein the non-aqueous solution is a non-aqueous hydrazine solution comprising from about 25% to about 69% by weight of hydrazine. 10. The method of claim 9, wherein the non-aqueous hydrazine solution comprises from about 65% to about 69% by weight of hydrazine. 11. The method of claim 1, wherein the non-aqueous solution contains less than 0.1% water. 12. The method of claim 1, wherein the concentration of anhydrous vapor delivered in the gas stream is stable to within about 5% of the average concentration delivered. 13. The method of claim 11, wherein the non-aqueous solution contains less than 0.01% water. 14. The method of claim 13, wherein the non-aqueous solution contains less than 0.001% water. 15. The method of claim 12, wherein the concentration of anhydrous vapor delivered in the gas stream is stable to within about 3% of the average concentration delivered.