Wafer handling robots with rotational joint encoders
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B25J-009/04
B25J-009/08
B25J-009/10
H01L-021/687
H01L-021/67
H01L-021/677
B25J-011/00
H01L-021/68
B25J-013/08
출원번호
US-0815325
(2017-11-16)
등록번호
US-10155309
(2018-12-18)
발명자
/ 주소
Blank, Richard M.
출원인 / 주소
Lam Research Corporation
대리인 / 주소
Weaver Austin Villeneuve & Sampson LLP
인용정보
피인용 횟수 :
0인용 특허 :
17
초록
Wafer handling robots are provided that are configured to provide high wafer placement accuracy. Such robots utilize rotational drive transfer mechanisms as well as rotational encoders that are located at each rotational joint, as opposed to solely at the motor outputs.
대표청구항▼
1. A wafer handling system comprising: a robot arm including: a base;a first movable link, a first end of the first movable link rotatably connected to the base via a first rotational joint;a second movable link, a first end of the second movable link rotatably connected to a second end of the first
1. A wafer handling system comprising: a robot arm including: a base;a first movable link, a first end of the first movable link rotatably connected to the base via a first rotational joint;a second movable link, a first end of the second movable link rotatably connected to a second end of the first movable link via a second rotational joint;a first rotational drive transfer mechanism including a first pulley, a second pulley, and one or more first belts spanning between the first pulley and the second pulley, wherein: the second pulley is fixedly connected with the second movable link, andthe first rotational drive transfer mechanism is configured such that rotation of the first pulley relative to the first movable link causes the second pulley and the second movable link to rotate relative to the first movable link about a center axis of the second rotational joint;a first motor, the first motor located in the base and having a rotational output connected to the first movable link and configured to drive the first movable link;a second motor, the second motor located in the base and having a rotational output connected to the first pulley and configured to drive the first pulley;a first rotational encoder with a first portion fixedly connected with the base and a second portion fixedly connected with the first movable link; anda second rotational encoder with a first portion fixedly connected with the first movable link and a second portion fixedly connected with the second movable link. 2. The wafer handling system of claim 1, wherein the first rotational encoder and the second rotational encoder each have a resolution selected from the group consisting of: 30 bits or more and 33 micro-degrees or more. 3. The wafer handling system of claim 1, wherein: the first rotational joint includes a first ferrofluidic seal between the base and a portion of the first movable link that extends into the base, andthe second rotational joint includes a second ferrofluidic seal between the first movable link and a portion of the second movable link that extends into the first movable link. 4. The wafer handling system of claim 1, wherein the robot arm further includes: a third movable link, a first end of the third movable link rotatably connected to a second end of the second movable link via a third rotational joint;a second rotational drive transfer mechanism including a third pulley, a fourth pulley, and one or more second belts spanning between the third pulley and the fourth pulley; anda third rotational encoder with a first portion fixedly connected with the second movable link and a second portion fixedly connected with the third movable link, wherein: the third pulley is fixedly connected with the first movable link,the fourth pulley is fixedly connected with the third movable link, andthe second rotational drive transfer mechanism is configured such that rotation of the third pulley relative to the second movable link causes the fourth pulley and the third movable link to rotate relative to the second movable link about a center axis of the third rotational joint. 5. The wafer handling system of claim 1, wherein the robot arm further includes: a third motor;a third movable link, a first end of the third movable link rotatably connected to a second end of the second movable link via a third rotational joint;a second rotational drive transfer mechanism including a third pulley, a fourth pulley, and one or more second belts spanning between the third pulley and the fourth pulley; anda third rotational encoder with a first portion fixedly connected with the second movable link and a second portion fixedly connected with the third movable link, wherein: the third motor is configured to cause the third pulley to rotate about a rotational axis of the second rotational joint,the fourth pulley is fixedly connected with the third movable link, andthe second rotational drive transfer mechanism is configured such that rotation of the third pulley about the center axis of the second rotational joint relative to second movable link causes the fourth pulley and the third movable link to rotate relative to the second movable link about a center axis of the third rotational joint. 6. The wafer handling system of claim 5, wherein: the first rotational joint includes a first ferrofluidic seal between the base and a portion of the first movable link that extends into the base,the second rotational joint includes a second ferrofluidic seal between the first movable link and a portion of the second movable link that extends into the first movable link, andthe third rotational joint includes a third ferrofluidic seal between the second movable link and a portion of the third movable link that extends into the second movable link. 7. The wafer handling system of claim 5, wherein the first movable link includes a third rotational drive transfer mechanism that includes a fifth pulley, a sixth pulley, and one or more third belts spanning between the fifth pulley and the sixth pulley. 8. The wafer handling system of claim 7, wherein the third motor is located within the first movable link. 9. The wafer handling system of claim 7, wherein the robot arm further includes: a fourth motor;a fourth movable link, a first end of the fourth movable link rotatably connected to a second end of the second movable link via the third rotational joint;a fourth rotational drive transfer mechanism including a seventh pulley, an eighth pulley, and one or more fourth belts spanning between the seventh pulley and the eighth pulley; anda fourth rotational encoder with a first portion fixedly connected with the second movable link and a second portion fixedly connected with the fourth movable link, wherein: the fourth motor is configured to cause the seventh pulley to rotate about a rotational axis of the second rotational joint,the eighth pulley is fixedly connected with the fourth movable link, andthe fourth rotational drive transfer mechanism is configured such that rotation of the seventh pulley about the center axis of the second rotational joint relative to the second movable link causes the eighth pulley and the fourth movable link to rotate relative to the second movable link about a center axis of the third rotational joint. 10. The wafer handling system of claim 9, wherein the first movable link further includes a fifth rotational drive transfer mechanism that includes a ninth pulley, a tenth pulley, and one or more fifth belts spanning between the ninth pulley and the tenth pulley. 11. The wafer handling system of claim 10, wherein the fourth motor is located within the first movable link. 12. The wafer handling system of claim 1, wherein: the one or more first belts are made of stainless steel,the one or more first belts includes at least two first belts, andeach belt of the at least two first belts has a first end fixedly attached to one of the first pulley of the first rotational drive transfer mechanism and the second pulley of the first rotational drive transfer mechanism and a second end fixedly attached to the other of the first pulley of the first rotational drive transfer mechanism and the second pulley of the first rotational drive transfer mechanism. 13. The wafer handling system of claim 1, wherein: interior spaces of the base, the first movable link, and the second movable link are in fluidic communication with one another; andthe first rotational joint and the second rotational joint are both equipped with vacuum-rated seals. 14. The wafer handling system of claim 13, wherein each of the one or more first belts is a continuous belt. 15. The wafer handling system of claim 14, wherein: each of the one or more first belts is selected from the group consisting of: a v-belt, a flat belt, a toothed belt, and a round belt; andeach of the one or more first belts is made from a material or materials selected from the group consisting of: rubber and rubber in combination with a woven material. 16. The wafer handling system of claim 1, further comprising a chamber having a nominal width, length, and height, wherein: the chamber has a plurality of wafer stations arranged along opposing walls, each wafer station having a wafer center point;the width defines the nominal distance between the opposing walls;the base is located with a center axis of the first rotational joint located within 10% to 30% of the width from one of the opposing walls. 17. The wafer handling system of claim 1, further comprising: an end effector configured to support a semiconductor wafer and connected to the robot arm such that the end effector is supported by the first movable link and the second movable link, anda controller having a memory and one or more processors, wherein: the memory and the one or more processors are communicatively connected,the memory stores computer-executable instructions for controlling the one or more processors to: receive rotational position data from the first rotational encoder,receive rotational position data from the second rotational encoder, anddetermine a horizontal location of a point fixed in space relative to the end effector based, at least in part, on the rotational position data from the first and second rotational encoders. 18. The wafer handling system of claim 17, wherein the memory further stores computer-executable instructions for further controlling the one or more processors to control the first motor, the second motor, or the first motor and the second motor to activate for one or more periods of time to cause the point fixed in space relative to the end effector to move from a first location to a second location.
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Freerks Frederik W. ; Berken Lloyd M. ; Crithfield M. Uenia ; Schott David ; Rice Michael ; Holtzman Michael,ILX ; Reams William ; Giljum Richard ; Reinke Lance ; Booth John S., Wafer position error detection and correction system.
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