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특허 상세정보

Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) E04F-015/024    H01L-021/677    B62B-003/06   
출원번호 US-0101603 (2014-12-02)
등록번호 US-10240350 (2019-03-26)
우선권정보 JP-2013-250534 (2013-12-03); JP-2013-250535 (2013-12-03)
국제출원번호 PCT/JP2014/081817 (2014-12-02)
국제공개번호 WO2015/083679 (2015-06-11)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Staas & Halsey LLP
인용정보 피인용 횟수 : 0  인용 특허 : 14
초록

A free access floor structure to install a manufacturing apparatus such as a semiconductor manufacturing apparatus, in a short time, and a manufacturing apparatus and a carrier apparatus adapted for the floor structure. An embodiment of the manufacturing apparatus includes an apparatus-side connector which is provided, facing downward, to a bottom plate of a manufacturing apparatus. A floor structure of an embodiment includes a floor plate to be worked into a floor surface. The floor structure includes a floor-side connector which is provided, facing upw...

대표
청구항

1. A free access floor structure comprising: a floor plate that is installable on a floor surface, anda floor-side connector which is connectable to one of a gas supply pipe and an exhaust gas pipe, and is provided to the floor plate so that, when the floor plate is installed on the floor surface, the floor-side connector faces upward, whereinthe free access floor structure is configured so that a semiconductor manufacturing apparatus, which includes a bottom plate and an apparatus-side connector provided to the bottom plate, is mountable on the free acc...

이 특허에 인용된 특허 (14)

  1. Parmley ; Sr. Daniel W. (129 E. Citation Tempe AZ 85284). Apparatus and method for replacing a battery pack in a battery powered vehicle. USP1995095452983.
  2. Doi Yoshiyuki (Kanagawa JPX). Apparatus for accurately positioning a printing plate stand. USP1997125695315.
  3. Shiomi, Tadataka; Nabika, Kouichi; Kawagoe, Takashi. Automatic system for conveying works in a machine shop. USP1985094538950.
  4. Hara, Shiro. Coupling system. USP2016039281223.
  5. Scheler Werner (Jena DEX) Lahne Berndt (Jena DEX) Mages Andreas (Jena DEX) Michl Uwe (Jena DEX) Gemkow Eberhard (Jena DEX) Schulz Alfred (Jena DEX). Device for coupling loading and unloading devices with semiconductor processing machines. USP1997085655869.
  6. Pflueger John C. ; Gravell Lawrence R.. Docking mechanism for aligning, coupling and securing a movable cart to a stationary workstation. USP2000036033175.
  7. Cooper Robert V. ; Branc Joseph R. ; Feldpausch Thomas G.. Floor system. USP2001036202374.
  8. Naka Hiromasa (Tokyo JPX) Nakamura Norio (Tokyo JPX) Okushima Takehiko (Saitama JPX) Okumura Takao (Saitama JPX) Shoji Tatsuo (Saitama JPX). Free access floor and method of constructing the same. USP1990054922670.
  9. Takeda Fumio (Hachiooji JPX) Kojima Yoshio (Yokohama JPX) Kaneko Tsuneo (Narashino JPX) Ishibashi Yutaka (Tokyo JPX) Sasaki Naoto (Yokohama JPX) Tsushima Isako (Tokyo JPX). Interior panel unit for permitting arrangement of cables and devices on room floor. USP1993095245805.
  10. Falcey Mark Masao. Modular access floor system. USP1999115992108.
  11. Schoenfeld Reinhard (Gruendau DEX) Hofmann Juergen (Bad Orb DEX). Multistory structure for chemical plants. USP1995125474411.
  12. Pitts, Leon; Rydman, Jeffrey; Oliver, Warren; Neads, Michael. System for installation, maintenance and removal of minienvironment components. USP2004036709225.
  13. Maekawa Hiroshi (Joyo JPX). Transportable robot system. USP1987054664590.
  14. Buchalter, Mark A.; Weller, George V.; Montgomery, Howard M.; Feldpausch, Thomas G.; Bartrand, Douglas L.; Forslund, III, Carl V.; Tsubaki, Arthur Y.; Hirai, Yasuyuki. Utility interface system. USP2004066748707.