|국가/구분||United States(US) Patent 등록|
|국제특허분류(IPC7판)||E04F-015/024 H01L-021/677 B62B-003/06|
|우선권정보||JP-2013-250534 (2013-12-03); JP-2013-250535 (2013-12-03)|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 0 인용 특허 : 14|
A free access floor structure to install a manufacturing apparatus such as a semiconductor manufacturing apparatus, in a short time, and a manufacturing apparatus and a carrier apparatus adapted for the floor structure. An embodiment of the manufacturing apparatus includes an apparatus-side connector which is provided, facing downward, to a bottom plate of a manufacturing apparatus. A floor structure of an embodiment includes a floor plate to be worked into a floor surface. The floor structure includes a floor-side connector which is provided, facing upw...
1. A free access floor structure comprising: a floor plate that is installable on a floor surface, anda floor-side connector which is connectable to one of a gas supply pipe and an exhaust gas pipe, and is provided to the floor plate so that, when the floor plate is installed on the floor surface, the floor-side connector faces upward, whereinthe free access floor structure is configured so that a semiconductor manufacturing apparatus, which includes a bottom plate and an apparatus-side connector provided to the bottom plate, is mountable on the free acc...