Apparatus and method for beam diagnosis on laser processing optics
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01J-001/04
G01J-001/42
G01J-009/00
B23K-026/04
B23K-026/70
B23K-026/046
B23K-026/082
출원번호
US-0546067
(2016-02-03)
등록번호
US-10245683
(2019-04-02)
우선권정보
DE-10 2015 001 421 (2015-02-06)
국제출원번호
PCT/DE2016/000036
(2016-02-03)
국제공개번호
WO2016/124169
(2016-08-11)
발명자
/ 주소
Kramer, Reinhard
Maerten, Otto
Wolf, Stefan
출원인 / 주소
Primes GmbH Messtechnik fuer die Produktion mit Laserstrahlung
대리인 / 주소
Collard & Roe, P.C.
인용정보
피인용 횟수 :
0인용 특허 :
4
초록▼
Apparatus for determining geometrical parameters of a laser beam includes an optical system, a device for output coupling radiation, a beam diagnostic device, and a reflector element. The optical system focuses the laser beam into a processing region. The device for output coupling radiation couples
Apparatus for determining geometrical parameters of a laser beam includes an optical system, a device for output coupling radiation, a beam diagnostic device, and a reflector element. The optical system focuses the laser beam into a processing region. The device for output coupling radiation couples out radiation that runs through the optical system in a direction opposite to a direction of the laser beam. The reflector element has a first surface which is partially reflecting and curved, where the curvature is equal to a mean curvature of a wave front of the laser beam in a positioning region of the reflector element.
대표청구항▼
1. An apparatus for determining geometrical parameters of a laser beam, comprising: an optical system configured to focus the laser beam into a processing region,a device for output coupling of radiation that travels in a direction opposite to a direction of travel of the laser beam through the opti
1. An apparatus for determining geometrical parameters of a laser beam, comprising: an optical system configured to focus the laser beam into a processing region,a device for output coupling of radiation that travels in a direction opposite to a direction of travel of the laser beam through the optical system,a beam diagnostic device, anda first reflector element with a first surface,wherein the first reflector element is placeable in a positioning region between the optical system and the processing region,wherein the first surface of the first reflector element is partially reflecting and is curved,wherein a curvature of the first surface is equal to a mean curvature of a wave front of laser beam in the positioning region of the first reflector element, andwherein the focused laser beam is focused by the optical system. 2. The apparatus according to claim 1, wherein the first surface of the first reflector element is set concentrically to the wave front of the focused laser beam. 3. The apparatus according to claim 1, wherein a center of curvature of the first surface of the first reflector element is set to a target position of a laser beam focus of the focused laser beam. 4. The apparatus according to claim 1, further comprising additional reflector elements, wherein each of the additional reflector elements has a first surface, wherein the first surface of the first reflector element and the first surfaces of the additional reflector elements have an equivalent curvature and wherein the first reflector element and the additional reflector elements are arranged at different positions in a planar region parallel to the processing region. 5. The apparatus according to claim 1, wherein the optical system for focusing the laser beam is part of scanner optics of remote laser material processing system. 6. The apparatus according to claim 1, wherein the beam diagnostic device comprises a device for focusing the output coupled radiation and a spatially resolving sensor. 7. The apparatus according to claim 6, wherein the device for focusing comprises a lens array. 8. The apparatus according to claim 6, wherein the beam diagnostic device further comprises an image distance adjusting device, and wherein the image distance adjusting device is configured to change an axial distance between the spatially resolving sensor and a position of an image of the laser beam focus. 9. The apparatus according to claim 8, wherein the image distance adjusting device comprises a device for axially displacing the image distance adjusting device for focusing of the output coupled radiation. 10. The apparatus according to claim 8, wherein the image distance adjustment device comprises a lens element with adjustable focal length. 11. The apparatus according to claim 1, wherein a determination of geometric parameters of the laser beam comprises determining at least one of the variables selected from the group consisting of: a diameter of the laser beam, a focus diameter of the laser beam, a lateral position of the laser beam in the processing region, an axial focus position, an intensity distribution of the laser beam, a beam profile of a the laser beam, a wave front of the laser beam, a laser beam path velocity, and seam energy of a processing track. 12. A method for determining geometrical parameters of a laser beam, comprising the steps: focusing the laser beam into a processing region using an optical system,positioning a reflector element with a first surface in a positioning region between the optical system and the processing region,reflecting back of a portion of the focused laser beam on the first surface of the reflector element in the direction of the optical system,output coupling a portion of the back-reflected beam portion,determining at least one geometric parameter from the output coupled beam portion using a beam diagnostic device,wherein the first surface of the reflector element is curved, andwherein the reflector element is positioned in a positioning region, in which a mean curvature of a wave front of the focused laser beam that is focused by the optical system is equal to a curvature of the first surface of the reflector element. 13. The method according to claim 12, wherein the first surface of the reflector element is adjusted concentrically to the wave front of the focused laser. 14. The method according to claim 12, wherein a center of curvature of the first surface of the reflector element is set to a target position of the laser beam focus of the focused laser beam. 15. A method according to claim 12, wherein the step of determining the at least one geometric parameter from the output coupled beam portion comprises the following method steps: focusing at least a partial region of the output coupled beam portion onto a spatially resolving sensor,recording intensity data provided by the spatially resolving sensor, anddetermining at least one geometric parameter from the recorded intensity data of the spatially resolving sensor. 16. The method according to claim 15, wherein an axial distance between the spatially resolving sensor and a position of an image of the laser beam focus is varied. 17. The method according to claim 15, wherein the determining of the at least one geometric parameter of the laser beam comprises determining at least one of the variables selected from the group of variables consisting of: a diameter of the laser beam, a focus diameter of the laser beam, a lateral position of the laser beam in a processing region, an axial focus position, an intensity distribution of the laser beam, a beam profile of the laser beam, a wave front of the laser beam, a laser beam path velocity, and seam energy of a processing track.
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이 특허에 인용된 특허 (4)
Johnston ; Jr. Thomas F. (Auburn CA), Apparatus for measuring the mode quality of a laser beam.
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