초록 ▼

본 연구에서는 전구체 Ti$(O-i-C_3H_7)_4$와 산소를 혼합한 기체를 사용하여 PECVD(Plasma Enhanced Chemical Vapor Deposition) 방법으로 유리기판 위에 증착하여 $TiO_2$ 박막을 제조하였다. Ti$(O-i-C_3H_7)_4$와 산소의 비, 기체압력, discharge power, 기판의 온도와 같은 공정조건들이 박막의 성장에 미치는 영향을 살피면서 기판과의 접착력 및 물리적 특성이 우수하면서 광 활성도가 높은 박막제 조에 가장 적합한 조건을 확립하였다. XRD를 이용하여 박막의 결정

본 연구에서는 전구체 Ti$(O-i-C_3H_7)_4$와 산소를 혼합한 기체를 사용하여 PECVD(Plasma Enhanced Chemical Vapor Deposition) 방법으로 유리기판 위에 증착하여 $TiO_2$ 박막을 제조하였다. Ti$(O-i-C_3H_7)_4$와 산소의 비, 기체압력, discharge power, 기판의 온도와 같은 공정조건들이 박막의 성장에 미치는 영향을 살피면서 기판과의 접착력 및 물리적 특성이 우수하면서 광 활성도가 높은 박막제 조에 가장 적합한 조건을 확립하였다. XRD를 이용하여 박막의 결정구조를, SEM을 이용하여 표면구조를, 그리고 ESCA를 이용하여 표면의 화학적 성분을, PL 및 UV/Vis spectrometer를 사용하여 광학적 특성을 분석하였으며, tape test 방법으로 박막의 접착력을 평가하고, methylene blue 분해실험 및 대장균을 이용한 항균실험을 통하여 광촉매 특성을 평가하였다. 또한 $TiO_2$ 박막을 후처리하여 파장이 긴 자외선이나 가시광선에서도 활성을 보 일 수 있도록 표면개질시키는 공정을 확립하였다.

Abstract ▼

The ultimate goal of this research is establishment of deposition technology onto various materials of $TiO_2$ film with high photoactivity to make $TiO_2$ photocatalyst more practical in the diverse applications. In this study, $TiO_2$ thin film was deposited onto a glass plate by means of PECVD(Pl

The ultimate goal of this research is establishment of deposition technology onto various materials of $TiO_2$ film with high photoactivity to make $TiO_2$ photocatalyst more practical in the diverse applications. In this study, $TiO_2$ thin film was deposited onto a glass plate by means of PECVD(Plasma Enhanced Chemical Vapor Deposition) process. Ti$(O-i-C_3H_7)_4$ was used as a precursor and mixed with oxygen. The effects of operating parameters such as Ti$(O-i-C_3H_7)_4$/oxygen ratio, gas pressure, discharge power, and substrate temperature on the growth of the thin film were examined and the optimum condition was searched for the best physical properties, adhesion strength on a substrate, and photoactivity. Crystal structure and surface morphology of the film was analysed with XRD and SEM respectively. Optical property was analyzed with PL and UV/Vis spectrometer. Adhesion strength is measured by tape test. Photocatalytic characteristic was evaluated based on degradation capability of methylene blue and antibacterial property against E. Coli. And, surface modification process for the activation under visible light was established by post-treatment. Development of coating technology for $TiO_2$ thin film will make applications of $TiO_2$ photocatlyst to be more practical. Recently, this kind of immobilization technology becomes hot issue as a research topic. Especially, the fact that the film can be coated at relatively low temperature will promote the applications in wider area and reduce the energy-cost. And, it is a big achievement that $TiO_2$ thin film can be activated by long-wavelength UV or visible light by simple surface modification process. Solar beams or indoor light can be used for the activation without using a UV irradiation device, which is stumbling block in the application of $TiO_2$ photocatalyst. As a result, application of $TiO_2$ photocatalyst becomes handy and economical.

목차 Contents

• Ⅰ. 연구계획 요약문...3
• 1. 국문요약문...3
• Ⅱ. 연구결과 요약문...4
• 1. 국문요약문...4
• 2. 영문요약문...5
• Ⅲ. 연구내용 및 결과...6
• 1. 서론...6
• 2. 연구방법 및 이론...7
• 3. 결과 및 고찰...10
• 4. 결론...29
• 5. 인용문헌...29