Abstract ▼

Purpose&contents
The main goal of this project is to develop new eco-friendly lead-free piezoelectric thin films for micro actuator and sensor devices to replace the Pb-based ferroelectric thin films. This project is mainly emphasized on two lead-free candidate materials;
K0.5Na0.5NbO3 and Bo0

Purpose&contents
The main goal of this project is to develop new eco-friendly lead-free piezoelectric thin films for micro actuator and sensor devices to replace the Pb-based ferroelectric thin films. This project is mainly emphasized on two lead-free candidate materials;
K0.5Na0.5NbO3 and Bo0.5(Na,K)0.5TiO3-based piezoelectric thin films. The thin films can be fabricated by different deposition techniques, and the ferroelectric and piezoelectric properties can be discussed in detail.
Result
▪ Selected Materials
We have selected the basic composition of (K_0.5Na_0.5)_1-xLi_xNb_1-yTa_yO₃ and
Bi_0.5(Na_1-xK_x)_0.5Ti_1-yAl_yO₃ lead-free ferroelectric thin films on the basis of our previous study and reported works for this project.
▪ Deposition Techniques
The following well known deposition techniques could be used for the fabrication of thin films:
(1) Radio Frequency Magnetron Sputtering Technique
(2) Sol-Gel Deposition Method
▪ Characterizations and measurements
The deposited thin films would be characterized by the following measurements techniques:
(1) The crystallization of the thin films can be confirmed by high resolution XRD.
(2) The surface and cross-sectional morphology would be studied by FESEM, AMF, and SEM.
(3) Temperature-dependent phase transition by Impendence Analyzer
(4) Leakage current properties
(5) Polarization Hysteresis loops
(6) Piezoelectric properties could be measured by various measurements techniques such as PFM, Micro displacement of cantilever, and wave flexure method.
(7) Development of prototype micro actuator and its characterization by laser scanner.
Expected Contribution
(1) The KNN and BNKT-based thin film are rarely research all over the world due to the volatilization of alkali metals during fabrication process.
(2) We have experience for growing high quality thin films using sol-gel and RF-magnetron sputtering methods, and the results have been published in well reputed high impact (SCI) journals.
(3) The proposed study and developing techniques will be transferred to the related company for making micro actuator and sensor devices.
(4) The results are expected to be published in the highest level of impact factor (SCI) journals. Green piezoelectric thin films respond to environmental policy of the world can be secured by the green technology.

목차 Contents

• 핵심연구사업 최종보고서(평가용) ... 1
• 목 차 ... 3
• 연구계획 요약문 ... 4
• 연구결과 요약문 ... 5
• 한글요약문 ... 5
• SUMMARY ... 6
• 연구내용 및 결과 ... 7
• 1. 연구개발과제의 개요 ... 7
• 2. 국내외 기술개발 현황 ... 8
• 3. 연구수행 내용 및 결과 ... 11
• 4. 목표달성도 및 관련분야에의 기여도 ... 37
• 5. 연구결과의 활용계획 ... 39
• 6. 연구과정에서 수집한 해외과학기술정보 ... 41
• 7. 주관연구책임자 대표적 연구실적 ... 59
• 8. 참고문헌 ... 60
• 9. 연구성과 ... 62
• 10. 기타사항 ... 72
• 끝페이지 ... 87