초록

Abstract ▼

■ Purpose
Importance of energy harvesting device rapidly increases according to the development of mobile electronics such as wearable or implantable devices. Among various types of energy harvesters, energy harvester to scavenge mechanical energy is expected to be drastically advanced. In partic

■ Purpose
Importance of energy harvesting device rapidly increases according to the development of mobile electronics such as wearable or implantable devices. Among various types of energy harvesters, energy harvester to scavenge mechanical energy is expected to be drastically advanced. In particular, a triboelectric energy harvester draws a great deal of attention due to high efficiency, diversity of material, and low cost. The purpose of this project is to develop a triboelectric energy harvester system using the well-developed silicon-based process, which can be accomplished with a collaboration with national nanofab center (NNFC).

■ Contents
● Stage 1: Design and fabrication of energy harvester
- Development of fundamental fabrication platform of protruded or dented Si structure
- Fabrication of energy device based on silicon process and characteristic evaluation
● Stage 2: Characterization and optimization of energy harvester
- Split of fabrication parameters for design optimization
- Design simulation with finite-element method (FEM)
- Fabrication of large area silicon template
- Analysis on reliability and endurance characteristics
- Technology transfer of unit energy harvester
● Stage 3: Development of high reliability package-assembled energy harvester
- Decision of reliability parameters and evaluation metrics
- Development of prototype package-assembled energy harvester
- Characterization and optimization of package-assembled energy harvester
- Technology transfer of package-assembled energy harvester
● Stage 4: Development of energy harvesting-storage hybrid system
- Design and fabrication of energy storage circuit system
- Reliability and optimization of the hybrid system
- Technology transfer of energy harvesting-storage system for commercialization
● Stage 5: Commercialization of energy harvesting-storage system
- Investigation on marketability with related companies
- Design and fabrication of energy harvesters with hybrid energy sources
- Manufacturing of test device and commercialization

■ Expected Contribution
The silicon fabrication based triboelectric energy harvester system proposed in this project is expected to remarkably improve the efficiency, lifetime, size, and cost of the wearable and wireless systems. The application area will be widened toward the self-powered mobile system due to its controllable and strong performance as well as excellent reproducibility arisen from the silicon process. Furthermore, practicality of the energy harvesting system will be improved by integrating with energy storage and driving circuit components.

목차 Contents

• 표지 ... 1
• 목차 ... 2
• 국가연구개발사업 연차실적·계획서(협약용) ... 3
• 한글요약문 ... 4
• SUMMARY ... 5
• 연구분야 ... 6
• Ⅰ. 실적 (1차년도) ... 7
• 1. 연구개발 목표 및 평가의 착안점 ... 7
• 2. 연구범위 및 연구수행 방법 ... 10
• 3. 연구수행 내용 및 결과 ... 11
• 3-1. 총괄연구개발과제 ... 11
• 3-2. 제1세부과제 ... 11
• 3-3. 제2세부과제 ... 11
• 4. 연구개발목표의 달성도 및 자체평가 ... 33
• 5. 연구성과 ... 36
• 6. 연구비 집행실적 ... 38
• 7. 연구수행에 따른 문제점 및 개선방향 ... 39
• 8. 중요 연구변경 사항 ... 39
• 9. 기타 건의사항 ... 39
• 10. 자체평가의견서 (총괄) ... 40
• 11. 연구비 사용실적 확인서 ... 43
• Ⅱ. 계획 (2차년도) ... 44
• Ⅱ-1. (총괄과제) 마찰 방식의 웨어러블 에너지 하베스터 스토리지 시스템개발 ... 44
• Ⅲ-2. 세부과제 ... 100
• Ⅲ-2-1. (세부과제1) 나노종합기술원 공정 기술을 활용한 마찰 대전 기반의에너지 소자 개발 ... 100
• Ⅲ-2-2. (세부과제2) 에너지 소자용 실리콘 기반 공정 기술 개발 ... 150
• 끝페이지 ... 175