초록 ▼

[1세부]
◇ 인공와우 패키징 설계 및 제작
◇ 인공와우-이소골 접속 구조기술
◇ 인공기저막 압전 특성 노화도 평가
◇ 통합소자 특성 평가
◇ 인공와우 패키징 생체 이식 시뮬레이션 (추가 연구개발 실적)
◇ 생체나노섬모 모사 관성센서 설계/제작

[2세부]
◇ 생체모사 인공기저막 소자의 최적화 및 통합 기전 특성시험 기술
◇ 생체모사 인공기저막 시제품의 패키징 및 성능평가 기술
◇ 패키징된 인공기저막 시제품 제작 및 성능평가 시험 기술
◇ 고효율 유연 압전박막 공정기술

[1세부]
◇ 인공와우 패키징 설계 및 제작
◇ 인공와우-이소골 접속 구조기술
◇ 인공기저막 압전 특성 노화도 평가
◇ 통합소자 특성 평가
◇ 인공와우 패키징 생체 이식 시뮬레이션 (추가 연구개발 실적)
◇ 생체나노섬모 모사 관성센서 설계/제작

[2세부]
◇ 생체모사 인공기저막 소자의 최적화 및 통합 기전 특성시험 기술
◇ 생체모사 인공기저막 시제품의 패키징 및 성능평가 기술
◇ 패키징된 인공기저막 시제품 제작 및 성능평가 시험 기술
◇ 고효율 유연 압전박막 공정기술개발

[3세부]
◇ 인공기저막 소자와 인터페이싱하는 다채널 증폭, 전류 자극기가 집적된 ASIC 칩 개발
◇ 배터리 충전 및 파라미터 송수신 무선 전자 모듈 개발
◇ 시스템 프로토타입 (통합된 전자모듈) 개발 및 전자모듈 패키징
◇ 시스템 유효성 검증을 위한 eABR 측정 동물실험
◇ 빛을 이용한 새로운 신경자극 기술 개발 (추가 연구개발 실적)

[4세부]
◇ 소리에너지를 인공기저막에 전달하는 기술 개발
◇ 인공기저막의 주파수변별과 전압발생 성능 분석
◇ 생체모사 인공와우의 수술기법 연구
◇ 동물실험을 통하여 생체모사인공와우의 생체 적합성 및 기능 검증

[5세부]
◇ 인공유모세포 모사 SiNx/Si기판 위 ZnO 나노필라 어레이 제조공정 최적화
◇ SiNx/Si기판 위 ZnO 나노필라 성장 최적화
◇ PI기판/금속표면 계면접착력 향상기술개발
◇ BSTO 압전박막 고결정화 기술개발 및 소자 제작
◇ PI기판상에서 제작된 압전소자의 주파수 응답 압전소자제작

(출처 : 보고서 요약서 4p)

Abstract ▼

Ⅳ. Research Results

[1st Sub-Project]
◇ Design of artificial cochlear package and interconnection structure
◆ Interconnection technique between middle ear and artificial basilar membrane
◆ Design technology for integrated device of core components
◇ Fabrication of interconnection

Ⅳ. Research Results

[1st Sub-Project]
◇ Design of artificial cochlear package and interconnection structure
◆ Interconnection technique between middle ear and artificial basilar membrane
◆ Design technology for integrated device of core components
◇ Fabrication of interconnection structure and artificial cochlear package
◆ Fabrication technology of interconnection structure between middle structure and artificial basilar membrane
◆ Fabrication technology for integrated device of core components
◇ Evaluation of degradation of artificial basilar membrane
◆ Evaluation of degradation of piezoelectric property
◇ Evaluation of package and integrated device
◆ Evaluation of mechano-electric performance artificial cochlear package
◆ Technology of artificial cochlear package for implant of internal body
◇ Development of biomimetic inertia sensor
◆ Development of prototype micro scale inertia sensor and evaluation of sensor characteristics
◆ Design and development of low frequency detecting inertia sensor using stiffness change and evaluation
◆ Design and development of high sensitivity detecting macro inertia sensor

[2nd Sub-Project]
◇ Optimization of biomimetic artificial basilar membrane design and evaluation of its integrated mechano-electric properties
◆ High efficient piezoelectric material for artificial basilar membrane and its fabrication
◆ Optimization of artificial basilar membrane structure
◆ Evaluation of mechanical and piezoelectrical properties of artificial basilar membrnae
◇ Packaging of biomimetic artificial basilar membrane prototype and its evaluation
◆ Application of large-scale high efficient piezoelectric membrane to the fabrication of artificial basilar membrane
◆ Design and fabrication of the package of artificial basilar membrnae and its interface
◆ Fabrication of packaged artificial basilar membrane final prototype
◇ Fabrication of packaged artificial basilar membrane prototype and its evaluation
◆ High efficiency of piezoelectric membrane applicable to packaged artificial basilar membrane
◆ Evaluation of the mecho-electric properties of packaged artificial basilar membrane and its performance
◆ Evaluation of integrated system of artificial basilar membrane and other components

[3rd Sub-Project]
◇ Fabrication of the ASIC chip that includes multi-channel amplifier array, digital controller and multi-channel current stimulator through semiconductor foundry services.
◆ Design and fabrication of 4 ASIC chips.
◆ Designed 16-channel amplifier array module shows high gain of 40.22~57.13 dB, extremely low input-referred noise of 8.15 μ V_rms (1~50 kHz).
◆ Digital controller module is designed using the RTL (resister transfer level) design and fabricated using Synopsys front-end and back-end tool chain.
◆ Design and fabrication of 16-channel current stimulator that generates charge-balanced biphasic current pulse up to 2.5 mA. High voltage CMOS process is applied to fabricate current stimulator to secure high compliance voltage.
◇ Development of other electronic modules
◆ Design, fabrication and evaluation of the wireless battery charging module. The module includes planar coil patterned on circuit substrate and a few discrete components. Rechargeable batter is charging wireless through an inductive coil link.
◆ Development and performance evaluation of a wireless parameter transceiver using a commercial Bluetooth module (CC2543, Texas Instruments Inc.).
◆ Design and fabrication of polymer-based thin-film cochlear electrode array using MEMS technologies (additional R&D result).
◇ Development of system prototype (integrated electronic module) and packaging of electronic module
◆ Development of 3 system prototypes. All electronic modules including ASIC chip, wireless parameter transceiver, battery charging module, and rechargeable battery are integrated into the system prototype. Also, final system prototype is as small as 16 cm² for in vivo implantation.
◇ Support for in vivo animal study
◆ Effectiveness of the developed system prototype is verified through an in vivo animal studies. Electrically evoked auditory brainstem responses (eABR) was recorded as an objective measure.
◇ Development of novel optical neural stimulation technique (additional R&D result)
◆ Development of novel neural stimulation technique based on low-power infrared laser and gold nanorods. Gold nanorods are injected into the neural tissue and act like a nano-heater for localized neural activation when light illuminates the tissue.

[4th Sub-Project]
◇ Development of technology transmission of acoustic energy into the artificial basilar membrane
◆ Acoustic analysis of commercialized completely implantable hearing aid (ex: Envoy ESTEEM 2)
◆ Computer simulation for the movement of tympanic membrane and ossicles
◆ Comparison between simulation and fresh cadaver
◆ Decision of power and direction in tansmitted energy, necessity of amplification
◇ Analysis of frequency specificity and voltage producibility of artificial basilar membrane
◆ Conference for structure design of artificial basilar membrane: material, size, package, vector
◆ Decision of location and number in resonance frequency (8 vs 22)
◆ Experimental establishment for analysis of frequency specificity, nanopillar induced energy
◆ Evaluation of frequency and voltage production using fresh cadaver
◇ Surgical technique of nanopillar based artificial cochlea
◆ Decision of size and shape in nanopillar based artificial cochlea
◆ Research of surgical technique using fresh cadaver
◇ Verification of biocompatibility and function in nanopillar based artificial cochlea using animal experiment
◆ Establishment of electrode implantation method into animal (cat) in the fresh cadaver condition
◆ Verification of acoustic transmission into cerebral cortex in implanted animal
◆ Analysis of frequency specificity in animal cerebral cortex
◆ Evaluation of change of transmitted stimulation via wireless mapping
◆ Estimation of consumed electric power and battery durability
◆ Verification of biocompatibility via animal experiment: cytotoxicity, intradermal test

[5th Sub-Project]
◇ Fabrication piezoelectric device for artificial hair cell using nano-pillar array on SiNx/Si substrate
◆ Fabrication of piezoelectric device using two-step photo lithogrpahy process
◆ Interfacial adhesion characteristic evaluation of piezoelectric device for artificial hair cell and adhesion improvement technology
◆ SiNx/ZnO nano-pillar based ABM fabrication
◆ SiNx/ZnO nano-pillar growth optimization
◇ PI/ZnO nano-pillar piezoelectric device fabrication
◆ PI/ZnO nano-pillar piezoelectric characteristic
◆ PI/ZnO nano-pillar piezoelectric device fabrication
◇ BSTO piezoelectric nano-particle fabrication and characteristic analysis
◆ Fabrication of BSTO nano-particle
◆ Hysterisis characteristic analysis of BSTO nano particle film
◇ Frequency characteristic analysis and fabrication of BSTO piezoelectric film by spin coating technique
◆ Fabrication technology of BSTO piezoelectric film by spin coating technique
◆ Experiment of BSTO piezoelectric poling
◆ Setting with BSTO based piezoelectric film frequency separation experiment
◆ Frequency separation experiment of BSTO based piezoelectric film

(출처 : SUMMARY 16p)

목차 Contents

• 표지 ... 1
• 제 출 문 ... 2
• 보고서 요약서 ... 4
• 요 약 문 ... 6
• SUMMARY ... 14
• CONTENTS ... 21
• 목차 ... 22
• 제1장 연구개발과제의 개요 ... 23
• 제2장 국내외 기술개발 현황 ... 30
• 제1절 국외 기술개발 현황 ... 30
• 제2절 국내 기술개발 현황 ... 40
• 제3장 연구개발수행 내용 및 결과 ... 44
• 제1절 1세부 과제 연구개발 내용 및 결과 ... 44
• 제2절 2세부 과제 연구개발 내용 및 결과 ... 57
• 제3절 3세부 과제 연구개발 내용 및 결과 ... 74
• 제4절 4세부 과제 연구개발 내용 및 결과 ... 87
• 제5절 5세부 과제 연구개발 내용 및 결과 ... 95
• 제4장 목표달성도 ... 110
• 제5장 연구개발결과의 활용계획 ... 114
• 제1절 기대성과 ... 116
• 제2절 활용 계획 및 타 연구에의 응용 분야 ... 117
• 제6장 연구개발과정에서 수집한 해외과학기술정보 ... 119
• 제7장 참고문헌 ... 124
• 끝페이지 ... 125