초록

Abstract ▼

1. Research purpose
Shape memory alloys (SMAs) have been an active field of research for decades. SMAs are being extensively used in functional devices because of their ability to have an elastic strain of up to 10%. With the rapid advancement in micro-electro-mechanical systems (MEMS) technology

1. Research purpose
Shape memory alloys (SMAs) have been an active field of research for decades. SMAs are being extensively used in functional devices because of their ability to have an elastic strain of up to 10%. With the rapid advancement in micro-electro-mechanical systems (MEMS) technology, it is necessary to characterize the behavior of SMAs at a thin-film scale. However, fabrication of SMAs at a thin-film scale is still a challenge and requires extensive optimization of the process parameters. Therefore, the goal of the research is to pave the way towards the utilization of SMAs thin films in energy harvesting devices.

SMAs are the class of materials that are able to elastically deform up to 8-10% [1]. The first reported discovery of SMA was in the 1930s when the superelastic behavior of Au-Cd alloy was discovered [2]. Since then a great amount of research has been conducted to understand the fundamentals of these materials, particularly at a bulk scale. SMAs are being utilized in several functional devices e.g., strain sensors [3] (Figure 1.1a), self-expandable structure [4] (Figure 1.1b), as flexible substrate carrying functional oxide layer [5] (Figure 1.1c), MEMS damper [6] (Figure 1.1d).

(출처 : 본문 : 1. Research Purpose 3p)

목차 Contents

• COVER ... 1
• Final Report ... 2
• 1. Research purpose ... 3
• 2. Research targets ... 6
• 3. Research methodology ... 7
• 4. Research Results ... 13
• 5. Future work ... 33
• References ... 35
• End of Page ... 36