A planar XY stage, for which a H-shaped frame is usually used as a base stage, is driven by two actuators, such as linear motors, with two position feedback sensors, such as linear scales or interferometers on the scanning motion axis. Linear scale feedback sensors are more popular than interferomet...
A planar XY stage, for which a H-shaped frame is usually used as a base stage, is driven by two actuators, such as linear motors, with two position feedback sensors, such as linear scales or interferometers on the scanning motion axis. Linear scale feedback sensors are more popular than interferometer systems because even though the latter is a high-speed high-precision instrument based on direct measurements of the target, it is also expensive. When linear scale is used, the position accuracy of the general stage is primarily affected by geometric motion errors, caused by parasitic motions of the stage, and misalignments, such as perpendicular errors. The error of a multi-axis feed unit in a machine tool system can be estimated and corrected at the tooling point, but for planar XY stages in semiconductor or display equipment, the modifications to the estimation and correction method is required because generating or measuring pattern of surface is more than 50 × 50- mm area. The stage is frequently used as main frame of the equipment. Therefore the machining and assembly process of rail and bed of the stage is one of first process during the equipment is built. The 2D position error, motion error and flatness of the stage can be measured when the real test is performed. If the errors of stage didn't meet the requirement of it's application, the stage must be corrected from first machining and assembly process. It is difficult and time and cost consuming work if assemble and disassemble process is repeated owing to large error of stages. In this paper, the estimation method for errors of a planar XY stage is suggested, Which is applied during the rails and bed of stage is measured. To estimate the errors of a planar XY stage, profiles measurement, estimation of motion error and 2D position estimation model is introduced. In addition, the compensation method for planar XY stage is also introduced.
A planar XY stage, for which a H-shaped frame is usually used as a base stage, is driven by two actuators, such as linear motors, with two position feedback sensors, such as linear scales or interferometers on the scanning motion axis. Linear scale feedback sensors are more popular than interferometer systems because even though the latter is a high-speed high-precision instrument based on direct measurements of the target, it is also expensive. When linear scale is used, the position accuracy of the general stage is primarily affected by geometric motion errors, caused by parasitic motions of the stage, and misalignments, such as perpendicular errors. The error of a multi-axis feed unit in a machine tool system can be estimated and corrected at the tooling point, but for planar XY stages in semiconductor or display equipment, the modifications to the estimation and correction method is required because generating or measuring pattern of surface is more than 50 × 50- mm area. The stage is frequently used as main frame of the equipment. Therefore the machining and assembly process of rail and bed of the stage is one of first process during the equipment is built. The 2D position error, motion error and flatness of the stage can be measured when the real test is performed. If the errors of stage didn't meet the requirement of it's application, the stage must be corrected from first machining and assembly process. It is difficult and time and cost consuming work if assemble and disassemble process is repeated owing to large error of stages. In this paper, the estimation method for errors of a planar XY stage is suggested, Which is applied during the rails and bed of stage is measured. To estimate the errors of a planar XY stage, profiles measurement, estimation of motion error and 2D position estimation model is introduced. In addition, the compensation method for planar XY stage is also introduced.
주제어
#XY stage 2D error 2D 오차
학위논문 정보
저자
황주호
학위수여기관
Korea Advanced Institute of Science and Technology
학위구분
국내박사
학과
Department of Mechanical Engineering Division of Mehcanical Engienering
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