Doosan Mecatec has developed alignment system for Organic Light-Emitting Diode (OLED) display production using large size substrate. In the present article, The alignment system between the substrate and the mask, which is a core technology for producing the OLED product using the fourth-generation ...
Doosan Mecatec has developed alignment system for Organic Light-Emitting Diode (OLED) display production using large size substrate. In the present article, The alignment system between the substrate and the mask, which is a core technology for producing the OLED product using the fourth-generation substrate with $730{\times}920mm^2$ or more, will be described by dividing into a substrate loader, a magnet unit, a CCD camera, etc. The substrate loader is optimized through the simulation where the central portion of the substrate droops by about 1.5mm by clamping each of a long side (920mm direction) and a short side (730mm direction) thereof by 6 point and 4 point. A magnet unit using a sheet type of rubber magnet is constituted and a CCD camera model with the specifications capable of minimizing the errors between a clear image and the same image is selected. The system to which an upward evaporation technique of small molecular organic materials will be applied has been developed so that repeatability and position accuracy becomes ${\pm}1{\mu}m$ or less using an UVW type of stage. Also, the vision accuracy of the CCD camera becomes ${\pm}1{\mu}m$ or less and the align process TACT becomes 30sec. or less so that the final alignment accuracy between the substrate and the mask becomes ${\pm}3{\mu}m$ or less. In order to meet an extra-large glass substrate, an evaporation system using an extra-large AMOLED substrate has been developing through a vertical type of an alignment system.
Doosan Mecatec has developed alignment system for Organic Light-Emitting Diode (OLED) display production using large size substrate. In the present article, The alignment system between the substrate and the mask, which is a core technology for producing the OLED product using the fourth-generation substrate with $730{\times}920mm^2$ or more, will be described by dividing into a substrate loader, a magnet unit, a CCD camera, etc. The substrate loader is optimized through the simulation where the central portion of the substrate droops by about 1.5mm by clamping each of a long side (920mm direction) and a short side (730mm direction) thereof by 6 point and 4 point. A magnet unit using a sheet type of rubber magnet is constituted and a CCD camera model with the specifications capable of minimizing the errors between a clear image and the same image is selected. The system to which an upward evaporation technique of small molecular organic materials will be applied has been developed so that repeatability and position accuracy becomes ${\pm}1{\mu}m$ or less using an UVW type of stage. Also, the vision accuracy of the CCD camera becomes ${\pm}1{\mu}m$ or less and the align process TACT becomes 30sec. or less so that the final alignment accuracy between the substrate and the mask becomes ${\pm}3{\mu}m$ or less. In order to meet an extra-large glass substrate, an evaporation system using an extra-large AMOLED substrate has been developing through a vertical type of an alignment system.
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제안 방법
This method can make the substrate flat as the original shape of the substrate, while the chamber should be provided with a system capable of applying the tension so that this method has limitations of the increase in the volume rate of the chamber and the addition of control sequence. The article will be described based on the results of the method of applying only the clamping to the substrate loader port in order to optimize the implementation of the OLED producing system technique by reducing the process time and minimizing the alignment error. It can be appreciated that the substrate loader applied to develop the alignment system minimally maintains the bending of the substrate when clamping the long side (920mm direction) and the short side (730mm direction) of the substrate by 6 point and 4 point, respectively without performing the operation of the stretching through the simulation [FIG.
The present article will describe the development contents and the characteristics of the large area alignment system by dividing the alignment system between the substrate and the mask into a substrate loader, a CCD camera, and a magnet unit, as a core producing technique system for producing the OLED products using the fourth-generation substrate with 730×920mm2 or more.
It is expected that the present development advances the technique for producing the midsize and large AMOLED. The system disclosed in the article is the alignment system of the upward evaporation manner using the small molecular organic materials developed by Doosan Mecatec and the development of the evaporation system is simultaneously under developing using the extralarge AMOLED substrate through the vertical type of the alignment system development to be corresponded to the next-generation extra-large glass substrate.
대상 데이터
is an important point. In order to avoid the interference with the structure within the chamber, a CV-A1 model with the depth of focus of 2.6mm and the working distance of 476mm is selected as the detailed specifications of the camera. This shows FOV 3.
후속연구
At the point in time where the interest in the large area and high resolution AMOLED TV has been gradually increased, the alignment system between the TFT back plane substrate and the metal mask in the OLED evaporation process is recognized as a core technique required for the midsize and large AMOLED panel by using the large sized substrate. It is expected that the present development advances the technique for producing the midsize and large AMOLED. The system disclosed in the article is the alignment system of the upward evaporation manner using the small molecular organic materials developed by Doosan Mecatec and the development of the evaporation system is simultaneously under developing using the extralarge AMOLED substrate through the vertical type of the alignment system development to be corresponded to the next-generation extra-large glass substrate.
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