무수축 소성 기술인 glass infiltration 방법을 이용하여 ‘Al2O3/Glass/Al2O3’ 구조의 무수축 LTCC기판을 제조 하였다. Glass infiltration에 의한 무수축 기판 제조에 있어 가장 중요한 요소로는 alumina에 대해 glass의 점성은 작고, 젖음성(wattability)이 좋으며, 낮은 반응성이 요구되기 때문에 유리의 조성이 다소 제한된다. 그러므로 glass-alumina 복합체의 무수축 기판을 제조하기 위해서는 glass 선정이 매우 중요한 요소로서 작용한다. 본 연구에서는 Na, Pb, Mg계열의 각기 다른 glass들의 ...
무수축 소성 기술인 glass infiltration 방법을 이용하여 ‘Al2O3/Glass/Al2O3’ 구조의 무수축 LTCC기판을 제조 하였다. Glass infiltration에 의한 무수축 기판 제조에 있어 가장 중요한 요소로는 alumina에 대해 glass의 점성은 작고, 젖음성(wattability)이 좋으며, 낮은 반응성이 요구되기 때문에 유리의 조성이 다소 제한된다. 그러므로 glass-alumina 복합체의 무수축 기판을 제조하기 위해서는 glass 선정이 매우 중요한 요소로서 작용한다. 본 연구에서는 Na, Pb, Mg계열의 각기 다른 glass들의 젖음성을 평가하여 alumina와의 젖음성 및 치밀성이 우수한 Pb계열의 glass를 선정하여 LTCC 기판으로 적용 가능한 온도인 700~900℃에서 ‘Al2O3/Glass/Al2O3’구조의 glass infiltration 특성을 고찰하고, Al2O3/Glass/Al2O3 구조의 소성후 x-y축 0.2%, z축 40%, 밀도 3.8g/cm3, 표면조도 0.4㎛, 유전율 6.8, 품질계수 552로 무수축 기판으로서의 가능성을 확인하였다.
무수축 소성 기술인 glass infiltration 방법을 이용하여 ‘Al2O3/Glass/Al2O3’ 구조의 무수축 LTCC기판을 제조 하였다. Glass infiltration에 의한 무수축 기판 제조에 있어 가장 중요한 요소로는 alumina에 대해 glass의 점성은 작고, 젖음성(wattability)이 좋으며, 낮은 반응성이 요구되기 때문에 유리의 조성이 다소 제한된다. 그러므로 glass-alumina 복합체의 무수축 기판을 제조하기 위해서는 glass 선정이 매우 중요한 요소로서 작용한다. 본 연구에서는 Na, Pb, Mg계열의 각기 다른 glass들의 젖음성을 평가하여 alumina와의 젖음성 및 치밀성이 우수한 Pb계열의 glass를 선정하여 LTCC 기판으로 적용 가능한 온도인 700~900℃에서 ‘Al2O3/Glass/Al2O3’구조의 glass infiltration 특성을 고찰하고, Al2O3/Glass/Al2O3 구조의 소성후 x-y축 0.2%, z축 40%, 밀도 3.8g/cm3, 표면조도 0.4㎛, 유전율 6.8, 품질계수 552로 무수축 기판으로서의 가능성을 확인하였다.
The shrinkage variation of Low Temperature Co-fired Ceramics (LTCC) limits the size of the substrates that impose limitations on embedded passive components. Therefore, in this study, we attempted to find a way to control the shrinkage in x-y planers and reducing distortion during firing by utilizin...
The shrinkage variation of Low Temperature Co-fired Ceramics (LTCC) limits the size of the substrates that impose limitations on embedded passive components. Therefore, in this study, we attempted to find a way to control the shrinkage in x-y planers and reducing distortion during firing by utilizing the Al2O3 layer and glass layer by the glass infiltration. At that time it is very important of reactivity and melting properties of glass. As a result, various glasses, such as Na2O-ZnO-B2O3, PbO-ZnO-B2O3-SiO2, MgO-B2O3-SiO2 were examined to fabricate layered substrate with structures of ‘Al2O3/Glass/Al2O3'and the effect of glass properties on glass infiltration characteristics was investigated. And then Using PbO-ZnO-B2O3-SiO2glass of low melting temperature which had shown best sinterability among those glasses, the changes of infiltration depth, with wettability, viscosity and reactivity, were examined in zero shrinkage sheets fabricated. As expected by Washburn's relation, the infiltration depth increased with increase of sintering temperature due to reduction of glass viscosity. Ceramic sheet, which has ‘Al2O3/Glass/Al2O3' structure, was prepared to obtain laminated ceramic substrate with constant shrinkage during sintering. Infiltration behavior of glass into alumina was observed with variety of both sintering temperature(650℃≦ Tsint. ≦900℃) and particle distribution (D50=0.5㎛, 1.8㎛). Since glass of low melting point showed low viscosity at 650℃, infiltration started at that temperature and glass was infiltrated up to about 20㎛ with increase of temperature, but infiltration depth showed no noticeable increase above 800℃. When sintered at 900℃ controlling the sheet thicknesses of both glass and alumina, based on such results, the shrinkage in x-y direction was calculated at less than 0.2%, in z-direction, 40%, surface roughness was 4.1㎛ and dielectric constant(εr) measured 6.7 with quality factor(Q) of 552 at 1 GHz frequency. From these results, possibility of obtaining zero-shrinkage ceramic sheets could be confirmed without de-lamination.
The shrinkage variation of Low Temperature Co-fired Ceramics (LTCC) limits the size of the substrates that impose limitations on embedded passive components. Therefore, in this study, we attempted to find a way to control the shrinkage in x-y planers and reducing distortion during firing by utilizing the Al2O3 layer and glass layer by the glass infiltration. At that time it is very important of reactivity and melting properties of glass. As a result, various glasses, such as Na2O-ZnO-B2O3, PbO-ZnO-B2O3-SiO2, MgO-B2O3-SiO2 were examined to fabricate layered substrate with structures of ‘Al2O3/Glass/Al2O3'and the effect of glass properties on glass infiltration characteristics was investigated. And then Using PbO-ZnO-B2O3-SiO2glass of low melting temperature which had shown best sinterability among those glasses, the changes of infiltration depth, with wettability, viscosity and reactivity, were examined in zero shrinkage sheets fabricated. As expected by Washburn's relation, the infiltration depth increased with increase of sintering temperature due to reduction of glass viscosity. Ceramic sheet, which has ‘Al2O3/Glass/Al2O3' structure, was prepared to obtain laminated ceramic substrate with constant shrinkage during sintering. Infiltration behavior of glass into alumina was observed with variety of both sintering temperature(650℃≦ Tsint. ≦900℃) and particle distribution (D50=0.5㎛, 1.8㎛). Since glass of low melting point showed low viscosity at 650℃, infiltration started at that temperature and glass was infiltrated up to about 20㎛ with increase of temperature, but infiltration depth showed no noticeable increase above 800℃. When sintered at 900℃ controlling the sheet thicknesses of both glass and alumina, based on such results, the shrinkage in x-y direction was calculated at less than 0.2%, in z-direction, 40%, surface roughness was 4.1㎛ and dielectric constant(εr) measured 6.7 with quality factor(Q) of 552 at 1 GHz frequency. From these results, possibility of obtaining zero-shrinkage ceramic sheets could be confirmed without de-lamination.
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