Recently, the industry is developing more rapidly than ever, but energy efficiency and environmental issues are also being raised. Among them, CF4, which is a non-degradable gas, is generated in the semiconductor industry, and many researches have been conducted on the plasma generator as a method f...
Recently, the industry is developing more rapidly than ever, but energy efficiency and environmental issues are also being raised. Among them, CF4, which is a non-degradable gas, is generated in the semiconductor industry, and many researches have been conducted on the plasma generator as a method for efficiently resolving the CF4. To date the application of a high efficiency microwave plasma generator with high energy density and reproducibility under low-pressure condition has been proposed for the efficient decomposition. However, due to the impedance mismatch in the waveguide and reactor, energy transfer efficiency is reduced and microwave is unbalanced, and as a result, CF4 could not be decomposed effectively.
In this paper, a circular reactor design method using tapered waveguide and slot to solve the problem of microwave plasma generator as described above is proposed. As a design method, the staircase structure is used for the impedance matching of the waveguide, which is the passage of the microwave, so that the microwave energy can be transmitted well. Since this step structure has the advantage of minimizing the reflection within the waveguide. Also, a method to position capacitive window at the end of the waveguide for energy accumulation around the slot proposed. Finally, considering the staircase structure and capacitive window, a design method to determine the waveguide length, slot size, and dielectric thickness is suggested.
To verify the design method, the simulation analysis using HFSS s/w package and the testing through fabrication of demonstrated facilities are conducted. First, we modeled the reactor using the proposed tapered waveguide and slot design method, and confirmed its validity by simulating S-parameter which means microwave field distribution concentration and to input-to-output voltage ratio at each frequency. Meanwhile, the microwave plasma generator was built based on the design value calculated by simulation. DRE(destruction and removal efficiency) of CF4 was analyzed through FT-IR(fourier transform infrared) according to changing the applied voltage, gas flow rate, pressure and dielectric length. As a result of the analysis, the concentration ratio of the CF4 gas before and after the treatment was higher than 90% by the strong energy of the microwave plasma considering the impedance matching.
Therefore, it was confirmed that more than 90% of CF4 gas, which is a decomposing gas, can be efficiently decomposed and treated by the tapered waveguide and slotted circular reactor design method proposed in this paper. In future, its successful application and role is expected in solving the CF4 environmental problem of the semiconductor industry field.
Recently, the industry is developing more rapidly than ever, but energy efficiency and environmental issues are also being raised. Among them, CF4, which is a non-degradable gas, is generated in the semiconductor industry, and many researches have been conducted on the plasma generator as a method for efficiently resolving the CF4. To date the application of a high efficiency microwave plasma generator with high energy density and reproducibility under low-pressure condition has been proposed for the efficient decomposition. However, due to the impedance mismatch in the waveguide and reactor, energy transfer efficiency is reduced and microwave is unbalanced, and as a result, CF4 could not be decomposed effectively.
In this paper, a circular reactor design method using tapered waveguide and slot to solve the problem of microwave plasma generator as described above is proposed. As a design method, the staircase structure is used for the impedance matching of the waveguide, which is the passage of the microwave, so that the microwave energy can be transmitted well. Since this step structure has the advantage of minimizing the reflection within the waveguide. Also, a method to position capacitive window at the end of the waveguide for energy accumulation around the slot proposed. Finally, considering the staircase structure and capacitive window, a design method to determine the waveguide length, slot size, and dielectric thickness is suggested.
To verify the design method, the simulation analysis using HFSS s/w package and the testing through fabrication of demonstrated facilities are conducted. First, we modeled the reactor using the proposed tapered waveguide and slot design method, and confirmed its validity by simulating S-parameter which means microwave field distribution concentration and to input-to-output voltage ratio at each frequency. Meanwhile, the microwave plasma generator was built based on the design value calculated by simulation. DRE(destruction and removal efficiency) of CF4 was analyzed through FT-IR(fourier transform infrared) according to changing the applied voltage, gas flow rate, pressure and dielectric length. As a result of the analysis, the concentration ratio of the CF4 gas before and after the treatment was higher than 90% by the strong energy of the microwave plasma considering the impedance matching.
Therefore, it was confirmed that more than 90% of CF4 gas, which is a decomposing gas, can be efficiently decomposed and treated by the tapered waveguide and slotted circular reactor design method proposed in this paper. In future, its successful application and role is expected in solving the CF4 environmental problem of the semiconductor industry field.
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