초록

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Abstract ▼ AI-Helper

A simple formula of the envelope method, which uses two envelopes fitted to the transmittance at quarter- and half-wave optical thicknesses, is derived to determine the optical constants (refractive index and extinction coefficient) and the thickness of weakly absorbing thin films. We applied the en...

A simple formula of the envelope method, which uses two envelopes fitted to the transmittance at quarter- and half-wave optical thicknesses, is derived to determine the optical constants (refractive index and extinction coefficient) and the thickness of weakly absorbing thin films. We applied the envelope method to ZnS and SiOx films deposited in a vacuum chamber and determined the optical constants at different deposition conditions. For SiOx films, the decrease in refractive index is consistent with the increase in stoichiometry as the backfilled oxygen pressure increases.