초록

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Abstract ▼ AI-Helper

With the variation of Cr content and $N_2$ flow ratio, the soft magnetic properties, corrosion resistance and reactivity of the sputtered nanocrystalline FeZrCrN thin flims were investigated. In case of FeZrCrN thin films, a saturation magnetization was decreased with increasing $N_2...

With the variation of Cr content and $N_2$ flow ratio, the soft magnetic properties, corrosion resistance and reactivity of the sputtered nanocrystalline FeZrCrN thin flims were investigated. In case of FeZrCrN thin films, a saturation magnetization was decreased with increasing $N_2$ flow ratio. In addition, good soft magnetic properties were obtained at the flow ratio of 3% $N_2$. The $Fe_{64.9}Zr_{8.8}Cr_{5.8}N_{20.5}$ nanocrystalline thin film after annealing at $550^{\circ}C$ exhibited the saturation magnetization of 12.5kG, low coercivity of 0.4 Oe and high permeability of 2600 at 5 MHz. Films containing up to 7.5% Cr showed an enhanced corrosion resistance and reduced reactivity with the bonding glass without degradation of soft magnetic properties, although the saturation magnetization was decreased slightly with the Cr addtion.