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NTIS 바로가기大韓機械學會論文集. Transactions of the Korean Society of Mechanical Engineers. A. A, v.24 no.5 = no.176, 2000년, pp.1166 - 1174
In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. A...
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