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한국소음진동공학회논문집 = Transactions of the Korean society for noise and vibration engineering, v.12 no.3, 2002년, pp.187 - 194
하성규 (한양대학교 기계공학부) , 박성균 (한양대학교 대학원 기계설계학과) , 김영호 (한양대학교 대학원 기계설계학과)
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A seven-port impedance and admittance matrices of multilayered piezoelectric beam are derived for the analysis of piezoelectric AFM ( atomic force microscope) cantilever that is partially covered by the piezoelectric layer. The variational principle is used for deriving the extensional and flexural ...
Chui, B.W., Stowe, T.D., Ju, Yongho Sungtaek, Goodson, K.E., Kenny, T.W., Mamin, H.J., Terris, B.D., Ried, R.P., Rugar, D.. Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.7, no.1, 69-78.
Mamin, H.J., Fan, L.S., Hoen, S., Rugar, D.. Tip-based data storage using micromechanical cantilevers. Sensors and actuators. A, Physical, vol.48, no.3, 215-219.
Mamin, H.J., Ried, R.P., Terris, B.D., Rugar, D.. High-density data storage based on the atomic force microscope. Proceedings of the IEEE, vol.87, no.6, 1014-1027.
Cullis, A. G., Canham, L. T., Calcott, P. D. J.. The structural and luminescence properties of porous silicon. Journal of applied physics, vol.82, no.3, 909-965.
Smits, J.G., Dalke, S.I., Cooney, T.K.. The constituent equations of piezoelectric bimorphs. Sensors and actuators. A, Physical, vol.28, no.1, 41-61.
Smits, J.G., Ballato, A.. Dynamic admittance matrix of piezoelectric cantilever bimorphs. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.3, no.3, 105-112.
Smits, J.G., Wai-Shing Choi, Ballato, A.. Resonance and antiresonance of symmetric and asymmetric cantilevered piezoelectric flexors. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol.44, no.2, 250-258.
Chung, S.H., Chou, C.C.. Electromechanical analysis of an asymmetric piezoelectric/elastic laminate structure: theory and experiment. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol.46, no.2, 441-451.
Lee, Chengkuo, Itoh, Toshihiro, Suga, Tadatomo. Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities. Sensors and actuators. A, Physical, vol.72, no.2, 179-188.
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