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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.21 no.2 = no.155, 2004년, pp.218 - 223
황성원 (전북대학교 대학원 기계공학과) , 신귀수 (전북대학교 기계항공시스템공학부) , 김근주 (전북대학교 기계항공시스템공학부) , 서남섭 (전북대학교 기계항공시스템공학부)
The sapphire wafers for blue light emitting devices were manufactured by the implementation of the surface machining technology based on micro-tribology. This process has been performed by Micro-lapping process. The sapphire crystalline wafers were characterized by double crystal X-ray diffraction. ...
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