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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.21 no.3 = no.156, 2004년, pp.147 - 154
강중옥 (금오공과대학교 대학원 기전공학과) , 서문훈 (금오공과대학교 대학원 기전공학과) , 한창수 (한국기계연구원) , 홍성욱 (금오공대 기계공학부)
This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric act...
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