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NTIS 바로가기大韓機械學會論文集. Transactions of the Korean Society of Mechanical Engineers. B. B, v.28 no.5 = no.224, 2004년, pp.560 - 568
노광철 (서울시립대학교 대학원 기계정보공학과) , 오명도 (서울시립대학교 기계정보공학과) , 이승철 (동해대학교 자동차공학과)
We performed the numerical study on the characteristics of the 3-D airflow and dynamic cross contamination in the photolithography process cleanroom. The nonunifurmity, the deflection angle and the global cross contamination were used for analyzing the characteristics and performances of cleanroom. ...
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