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NTIS 바로가기센서학회지 = Journal of the Korean Sensors Society, v.14 no.2, 2005년, pp.131 - 135
This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) pro...
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