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Design of a Cylindrical Flexure Jointed Stewart Platform for Aligning the Condenser in an X-ray Microscope 원문보기

International journal of precision engineering and manufacturing, v.7 no.3, 2006년, pp.60 - 65  

Kang Sung-Hoon (Department of Mechanical Engineering, KAIST) ,  Kang Dong-Woo (Department of Mechanical Engineering, KAIST) ,  Gweon Dae-Gab (Department of Mechanical Engineering, KAIST) ,  Yoon Gwon-Ha (Department of Radiology, Wonkwang University School of Medicine) ,  Min Jin-Young (LISTEM Co, Ltd)

Abstract ▼ AI-Helper 아이콘AI-Helper

This paper proposes a new type of six degree-of-freedom fine positioner that can be used to align the condenser in X-ray microscopy precisely. The new concept was based on the requirements for an X-ray microscope. A proposed modeling method was used to obtain an optimal design, which was verified wi...

주제어

#Optics alignment   #Flexure   #Stewart platform   #X-ray microscope  

AI 본문요약
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제안 방법

  • Cylindrical flexures were used for the joints of the Stewart platform to overcome the backlash and friction problems. The entire flexure mechanism was modeled mathematically. The modeling was verified by comparing the results with those obtained from an FEM.
  • The other parts, including the cylindrical flexures, were manufactured and assembled. The experiment consisted of measuring the resolution and workspace, and confirming the kinematics. The motion of the end-effector was measured using a hexahedron block and six proximity sensors, as shown in Fig.
  • The method of modeling the cylindrical flexure mechanism was verified by comparing the results using the proposed model and a finite element model (FEM). The flexure jointed Stewart platform shown in Fig.
  • The Stewart platform was constructed and tested. The tests consisted of resolution and workspace measurements, as well as a verification of the inverse kinematics. The tests showed that the mechanism had a 50-nm resolution in the x, y, and z directions, and 7.
  • 5. This modeling method was modified so it could be applied to a cylindrical flexure mechanism.

대상 데이터

  • The Stewart platform was constructed and tested. The tests consisted of resolution and workspace measurements, as well as a verification of the inverse kinematics.
  • It has 3 rotational DOF, similar to a ball joint, so that each strut of the Stewart platform will have 7 DOF if the flexure is used at both ends of the strut. This will give a Stewart platform with 12 DOF. However, 6 of these DOF are the rotation of struts, which do not influence the position of the end-effector.
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참고문헌 (12)

  1. Takeuchi, A., Aoki, S., Yamamoto, K., Takano, H., Watanabe, N. and Ando, M., 'Full-field x-ray fluorescence imaging microscope with a Wolter mirror,' Review of Scientific Instruments, Vol. 71, No. 3, pp. 1279-1285, 2000 

    상세보기 crossref

  2. Ninorniya, K. and Hasegawa, M., 'Scanning photoelectron microscope with sub micron lateral resolution using a Wolter-type x-ray focusing mirror,' Journal of Vacuum Science Technology A, Vol. 13, No.3, pp. 1224-1228, 1995 

    상세보기 crossref

  3. Watanabe, N., Yamamoto, K., Takano, H., Ohigashi, T, Yokosuka, H., Aota, T and Aoki, S., 'X-ray fluorescence microtomography with a Wolter mirror system,' Nuclear Instruments and Methods in Physics Research A, Vol. 467-468, No.2, pp. 837-840, 2001 

    상세보기 crossref

  4. Aoki, S., Kumegawa, M., Watanabe, N., Ohigashi, T, Aota, T, Yamamoto, K., Yokosuka, H., Tanoue, R., Tsujita, Y and Anto, M., 'X-ray scattering microscope with a Wolter mirror,' Review of Scientific Instruments, Vol. 73, No.7, pp. 2629-2633, 2002 

    상세보기 crossref

  5. Hasagawa, M., Yoneyama, A. and Ninorniya, K., 'Soft x-ray scanning photoelectron microscope using Wolter-type focusing mirror,' Journal of Electron Spectroscopy and Related Phenomena, Vol. 80, pp. 361-364, 1996 

    상세보기 crossref

  6. Voss, J., 'The scanning soft X-ray microscope at Hasylab: imaging and spectroscopy of photoelectrons, photoluminescence, desorbed ions, reflected, scattered and transmitted light,' Journal of Electron Spectroscopy and Related Phenomena, Vol. 84, No. 1/3, pp. 29-44, 1997 

    상세보기 crossref

  7. Horikawa, Y, 'Consideration on the condenser for an imaging type Schwarzschild soft X-ray microscope,' Journal of Modern Optics, Vol. 40, No.2, pp. 289-298, 1993 

    상세보기 crossref

  8. Berglund, M., Rymell, L., Peuker, M., Wilhein, T and Hertz, H. M., 'Compact water-window transmission X-ray microscope,' Journal of Microscopy, Vol. 197, pp. 268-273, 1999 

  9. Matyi, R. J., Moran, P. D., Hagquist, W. W. D. and Volz, H. M., 'Alignment system for crossed parabolic x-ray mirrors,' Review of Scientific Instruments, Vol. 71, No.6, pp.2292-2295, 2000 

    상세보기 crossref

  10. Ryu, J. W., '6-Axis ultraprecision positioning mechanism design and positioning control,' Ph.D. dissertation, KAIST, Daejon, South Korea, 1997 

  11. Kang, D. W., 'The design and test of ultraprecision XY stage using leaf spring mechanism and voice-coil motor,' Masters dissertation, KAIST, Daejon, South Korea, 1997 

  12. Mohammadi Diniali, H. R., Zsombor-Murray, P. J. and Angeles, J., 'Singularity analysis of planar parallel manipulators,' Mech. Mach. Theory, Vol. 30, No.5, pp. 665-678, 1995 

    상세보기 crossref

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