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NTIS 바로가기한국전산유체공학회지 = Journal of computational fluids engineering, v.12 no.1 = no.36, 2007년, pp.28 - 34
고승우 (중앙대학교 대학원 기계공학과) , 노경철 (중앙대학교 기계공학부) , 유홍선 (중앙대학교 기계공학부)
This study evaluates the performance of the packed bed scrubber and proposes the optimization of spray system for improvements of collection efficiency. The packed bed scrubber is used primarily in the semiconductor manufacturing process. The mean diameter of entering solid particles in scrubber is ...
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