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NTIS 바로가기大韓機械學會論文集. Transactions of the Korean Society of Mechanical Engineers. B. B, v.31 no.5 = no.260, 2007년, pp.457 - 466
노광철 (서울시립대학교 산업기술연구소) , 이현철 (삼성전기 생산기술연구소 MCC TG) , 박정일 (삼성전기 생산기술연구소 MCC TG) , 오명도 (서울시립대학교 기계정보공학과)
A numerical and experimental study on the evaluation and the prediction of cleanliness level in the mini-environment system was carried out. Using the concept of local mean air-age (LMA) and effective flow rate, the new direct method for estimating the mini-environment was developed and compared wit...
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Oh, M. D., 2002, 'A Trend of GIGA Level Cleanroom Technology,' International Symposium on Clean Technology and Management for Indoor Air, Korea Air Cleaning Association, pp. 17-62
Kobayashi, Y., Kobayashi, S., Tokunaga, K., Kato, K., and Minami, T., 2000, 'Particle Characteristics of 300-mm Minienvironment (FOUP and LPU),' IEEE Transactions on Semiconductor Manufacturing, IEEE, Vol. 13, No. 3, pp. 259-263
Shiu, H. R., Huang, H. Y., Chen, S. L., and Ke, M. T., 2003, 'Numerical Simulation for Air Flow in Mini-Environment and SMIF Enclosure,' IEEE Transactions on Semiconductor Manufacturing, IEEE, Vol. 16, No. 1, pp. 60-67
Hu, S. C. and Wu, T. M., 2003, 'Experimental Study of Airflow and Particle Characteristics of a 300-mm FOUP/LPU Minienvironment System,' IEEE Transactions on Semiconductor Manufacturing, IEEE, Vol. 16, No. 4, pp. 660-667
Hu, S. C., Chuah, Y. K. and Yen, M. C., 2002, 'Design and evaluation of a minienvironment for semiconductor manufacture process,' Building and Environment, Vol. 37, pp. 201-208
Chuah, Y. K., Tsai, C. H., and Hu, S. C., 2000, 'Simultaneous Control of Particle Contaminants and VOC Pollution under Different Operating Conditions of a Mini-environment that Contains a Coating Process,' Building and Environment, Vol. 35, pp. 91-99
Sandberg, M., 1983, 'Ventilation Efficiency as a Guide to Design,' ASHRAE Transactions, Vol. 89, Pt. 2B, pp. 455-479
Han, H. T., 1999, 'On the Definition of Ventilation Effectiveness,' Magazine of SAREK, Vol. 28, No. 1, pp. 38-47
Patankar, S. V., 1980, Numerical Heat Transfer and Fluid Flow, Hemisphere, Washington, DC
Han, H. T., 1998, 'Numerical Analysis of Local Exhaust Effectiveness using Reverse-flow Calculation Method,' Journal of SAREK, Vol. 10, No. 6, pp. 658-665
Park, M. S., 1993, Analysis of 3-Dimensional Flow Characteristics in a Clean Room with Low Pressure Drop Filter Installation, PH. D. Thesis, Hanyang University
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