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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.24 no.8 = no.197, 2007년, pp.89 - 96
In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings ...
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