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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.25 no.12 = no.213, 2008년, pp.132 - 138
김경호 (한국기계연구원 지능형생산시스템연구본부) , 송창규 (한국기계연구원 지능형생산시스템연구본부) , 박천홍 (한국기계연구원 지능형생산시스템연구본부)
Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the sourc...
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