[논문]<tex>$High-J_c\\;NdBa_2Cu_3O_{7-{\\delta}}$</tex> thin films on <tex>$SrTiO_3$</tex>(100) substrates prepared by the PLD process

Wee, Sung-Hun; Moon, Seung-Hyun; Yoo, Sang-Im

doi:10.9714/psac.2009.11.2.001

$High-J_c\\;NdBa_2Cu_3O_{7-{\\delta}}$ thin films on $SrTiO_3$(100) substrates prepared by the PLD process 원문보기

한국초전도·저온공학회논문지 = Superconductivity and cryogenics, v.11 no.2, 2009년, pp.1 - 6

Wee, Sung-Hun (Department of Materials Science and Engineering, Seoul National University) , Moon, Seung-Hyun (Superconductor, Nano & Advanced Materials Co.) , Yoo, Sang-Im (Department of Materials Science and Engineering, Seoul National University)

Abstract ▼ AI-Helper

We report a successful fabrication of $high-J_c\;NdBa_2Cu_3O_{7-{\delta}}$ (NdBCO) films on $SrTiO_3$(STO) (100) substrates by pulsed laser deposition (PLD) in a relatively wide processing window. Under various oxygen pressures controlled by either 1%$O_2$/Ar mixture gas or pure $O_2$ gas, strongly c-axis oriented NdBCO films were grown at the substrate temperature $(T_s)\;of\;800^{\circ}C$ in 800 mTorr with 1%$O_2$/Ar gas and also in 400 and 800 mTorr with pure $O_2$ gas. These samples exhibited $T_c$ values over 90K and $J_c$ values of $2.8-3.5MA/cm^2$ at 77K in self-field (77K, sf). On the other hand, $J_c$ values over $1A/cm^2$ were obtained at the temperature regions of $700-830^{\circ}C$ in 800 mTorr with 1%$O_2$/Ar gas at those of $750-830^{\circ}C$ in 800 mTorr with pure $O_2$ gas. Unlike previous reports, resent results support that the PLD processing window for high-Jc NdBCO films is not narrow.

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대상 데이터

solid-state reaction. The starting materials were Nd2O₃, BaCO₃ and CuO compounds with high purities (> 99.9%). The precursors were accurately weighed and ball-milled in a polyethylene jar containing zirconia balls and ethanol as the medium for 24 h.
The pellet was sintered at the same condition as pre-sintering. The target had a relative sintered density of 93%, on the basis of the theoretical density of NdBCO with tetragonal structure (6.5 g/cm³).

이론/모형

Microstructures of films were observed by a field emission scanning electron microscope (FE-SEM). Superconducting properties of Tc and Jc were measured by the standard four-probe method. For this purpose, Ag electrodes with ~1 pm thickness were deposited on the NdBCO films by rf magnetron sputtering and post-annealed at 450℃ for 1 h in pure oxygen gas.
Instead, an excessive substitution of Nd" ions for Ba2+ sites must be the most probable origin for Tc degradation. To clarify this point, the quantitative compositional analyses of the samples were performed using EPMA. The results are shown in Fig.

성능/효과

Regardless of the type of processing gas, J* (77K, sf) above 3 MA/cm² could be achieved from the samples grown at 800℃ in 800 mTorr with either l%O₂/Ar mixture gas or pure O₂ gas. In conclusion, under high deposition pressure of 800 mTorr with either l%O₂/Ar mixture gas or pure O₂ gas, NdBCO films having high "s (77K, sf) over 1 MA/cm² can be successfully grown on STO (100) substrates at the wide substrate temperature region, suggesting that the PLD processing window to obtain high/.-NdBCO films is m나ch wider than those of previous reports.
8. All films have excellent in-plane and out-of-plane textures with FWHM values of 0.55-0.65° and 0.06-0.2°, respectively, implying that the degree of textures fbr NdBCO films grown on the STO (100) substrates are insensitive to the growth temperature when the substrate temperature is higher than that fbr the strong c-axis oriented NdBCO film.

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